Anti-reflective coating forming composition containing reaction product of isocyanuric acid compound with benzoic acid compound
There is provided anti-reflective coating forming composition containing a reaction product of an isocyanuric acid compound having two or three 2,3-epoxypropyl groups with a benzoic acid compound. The anti-reflective coating obtained from the composition has a high preventive effect for reflected light, causes no intermixing with photoresists, can form a photoresist pattern having no footing at the lower part, and can use in lithography process by use of a light such as ArF excimer laser beam and F2 excimer laser beam, etc.
1. A method for forming a photoresist pattern having no footing at the lower part of the photoresist for use in manufacturing semiconductor devices, comprising:
coating an anti-reflective coating forming composition on a semiconductor substrate, and baking it to form an anti-reflective coating;
forming a photoresist layer on the anti-reflective coating;
exposing the semiconductor substrate covered with the anti-reflective coating and the photoresist layer to light; and
developing the photoresist layer after the exposure to light to form a photoresist pattern having no footing at the lower part; wherein
the anti-reflective coating forming composition comprises: a reaction product, an oligomer of the reaction product, a crosslinking compound, a solvent, and an acid compound, wherein
the reaction product is a mixture of:
a compound having a structure obtained by a reaction of an epoxy group of a compound of formula (1)
where R 1 is 2,3-epoxypropyl, with a carboxy group of a hydroxy benzoic acid compound; and
a compound having a structure obtained by a reaction of one epoxy group of the compound of formula (1) with a hydroxy group and another epoxy group of formula (1) with a carboxy group of the hydroxy benzoic acid compound,
the oligomer of the reaction product is obtained by a reaction of an epoxypropyl group of the compound of formula (1) with a carboxy group of the hydroxy benzoic acid compound and by a reaction of an epoxypropyl group of another compound of formula (1) with a hydroxy group of the hydroxy benzoic acid compound,
the acid compound comprises pyridinium-p-toluene sulfonate,
the reaction product is obtained by reacting the compound of formula (1) with the hydroxy benzoic acid compound in a molar ratio of 1:2 to 1:3 (the compound of formula (1): the hydroxy benzoic acid compound),
the crosslinking compound comprises tetramethoxymethyl glycoluril,
the content of the photoacid generator is 0.1 to 5 mass % of the solid content of the anti-reflective coating forming composition,
the content of the acid compound is 0.1 to 5 mass % of the solid content of the anti-reflective coating forming composition,
wherein the solid content of the anti-reflective coating forming composition is with respect to the mass of the anti-reflective coating forming composition excluding the solvent, and
the anti-reflective coating has
a thickness of 0.01 to 3.0 μm,
a refractive index (n) at a wavelength of 193 nm of around 1.81, and
an attenuation coefficient (k) of around 0.44.
2. A method for forming a photoresist pattern having no footing at the lower part of the photoresist for use in manufacturing semiconductor devices, comprising:
coating an anti-reflective coating forming composition on a semiconductor substrate, and baking it to form an anti-reflective coating;
forming a photoresist layer on the anti-reflective coating;
exposing the semiconductor substrate covered with the anti-reflective coating and the photoresist layer to irradiation light of F2 excimer laser beam (wavelength 157 nm); and
developing the photoresist layer after the exposure to light to form a photoresist pattern having no footing at the lower part; wherein
the anti-reflective coating forming composition comprises: a reaction product, an oligomer of the reaction product, a crosslinking compound, a solvent, and an acid compound, wherein
the reaction product is a mixture of:
a compound having a structure obtained by a reaction of an epoxy group of a compound of formula (1)
where R 1 is 2,3-epoxypropyl, with a carboxy group of a hydroxy benzoic acid compound; and
a compound having a structure obtained by a reaction of one epoxy group of the compound of formula (1) with a hydroxy group and another epoxy group of formula (1) with a carboxy group of the hydroxy benzoic acid compound,
the oligomer of the reaction product is obtained by a reaction of an epoxypropyl group of the compound of formula (1) with a carboxy group of the hydroxy benzoic acid compound and by a reaction of an epoxypropyl group of another compound of formula (1) with a hydroxy group of the hydroxy benzoic acid compound,
the acid compound comprises pyridinium-p-toluene sulfonate,
the reaction product is obtained by reacting the compound of formula (1) with the hydroxy benzoic acid compound in a molar ratio of 1:2 to 1:3 (the compound of formula (1): the hydroxy benzoic acid compound),
the crosslinking compound comprises tetramethoxymethyl glycoluril,
the content of the photoacid generator is 0.1 to 5 mass % of the solid content of the anti-reflective coating forming composition,
the content of the acid compound is 0.1 to 5 mass % of the solid content of the anti-reflective coating forming composition
wherein the solid content of the anti-reflective coating forming composition is with respect to the mass of the anti-reflective coating forming composition excluding the solvent, and
the anti-reflective coating has
a thickness of 0.01 to 3.0 μm,
a refractive index (n) at a wavelength of 193 nm of around 1.81, and
an attenuation coefficient (k) of around 0.44.