Transport system, mover, control apparatus, and control method

1. A transport system comprising:

a mover movable in a first direction, the mover having a first magnet group and a second magnet group, the first magnet group including a plurality of first magnets arranged along a first direction and the second magnet group including a plurality of second magnets arranged along a second direction crossing the first direction; and

a stator having a plurality of coils, the plurality of coils being arranged along the first direction so as to be able to face the first magnet group and the second magnet group,

wherein the second magnet group is provided on a tip side of the mover than the first magnet group in the first direction.

2. The transport system according to claim 1 , wherein the second magnet group includes a plurality of second magnet groups, at least one of the plurality of second magnet groups is provided at the tip of the mover than the first magnet group in the first direction, and at least another of the plurality of second magnet groups is provided at an end of the mover than the first magnet group in the first direction.

3. The transport system according to claim 1 , wherein the first magnet group includes a plurality of first magnet groups, the second magnet group includes a plurality of second magnet groups, and at least one of the plurality of second magnet groups is provided between the two first magnet group.

4. The transport system according to claim 3 , wherein magnetic poles of the first magnets closest to the second magnet group included respectively in the two first magnet groups across the second magnet group are the same as each other.

5. The transport system according to claim 1 , wherein the first magnet group and the second magnet group are provided with a space therebetween.

6. The transport system according to claim 1 , wherein a length of at least one coil of the plurality of coils in the second direction is shorter than a length of the second magnet group in the second direction.

7. The transport system according to claim 1 , wherein a length of at least one coil of the plurality of coils in the second direction is longer than a length of the first magnet group in the second direction.

8. The transport system according to claim 1 , wherein first magnets next to each other in the first direction included in the plurality of first magnets have different polarities from each other at a position where the plurality of first magnets are able to face the plurality of coils, and

wherein second magnets next to each other in the second direction included in the plurality of second magnets have different polarities from each other at a position where the plurality of second magnets are able to face the plurality of coils.

9. The transport system according to claim 1 , wherein the mover has a top face parallel to the first direction, and

wherein the first magnet group and the second magnet group are arranged on the top face.

10. The transport system according to claim 9 , wherein at least one of the plurality of coils has an iron core and is arranged to be able to face downward with respect to the first magnet group and the second magnet group.

11. A control method of controlling a transport system, the transport system comprising:

a mover movable in a first direction, the mover having a first magnet group and a second magnet group, the first magnet group including a plurality of first magnets arranged along a first direction and the second magnet group including a plurality of second magnets arranged along a second direction crossing the first direction; and

a stator having a plurality of coils, the plurality of coils being arranged along the first direction so as to be able to face the first magnet group and the second magnet group,

wherein the second magnet group is provided on a tip side of the mover than the first magnet group in the first direction,

the control method comprising:

controlling transportation of the mover in the first direction by controlling electromagnetic force generated between the first magnet group and the plurality of coils; and

controlling an attitude of the mover by controlling electromagnetic force generated between the first magnet magnetic group and the plurality of coils and/or between the second magnet magnetic group and the plurality of coils.

12. The control method according to claim 11 , wherein the second magnet group includes a plurality of second magnet groups, at least one of the plurality of second magnet groups is provided at the tip of the mover than the first magnet group in the first direction, and at least another of the plurality of second magnet groups is provided at an end of the mover than the first magnet group in the first direction.

13. The control method according to claim 11 , wherein the first magnet group and the second magnet group are provided with a space therebetween.

14. The control method according to claim 11 , wherein a length of at least one coil of the plurality of coils in the second direction is shorter than a length of the second magnet group in the second direction.

15. The control method according to claim 11 , wherein a length of at least one coil of the plurality of coils in the second direction is longer than a length of the first magnet group in the second direction.

16. An article manufacturing method for manufacturing an article, the method comprising: transporting a workpiece by using the control method according to claim 11 ; and performing, by using a process apparatus, a processing on the workpiece.