Capacitive device and piezoelectric device
A capacitive device includes a unit cell including a CMUT, and a transmission/reception plate for impedance matching which is provided above the unit cell via a connection portion, in which a membrane of the CMUT constituting the unit cell is connected to the transmission/reception plate via the connection portion having an area smaller than that of the transmission/reception plate. The area of the transmission/reception plate is desirably larger than the area of a hollow portion of the CMUT.
1. A capacitive device comprising:
an ultrasonic transducer comprising:
a substrate,
a lower electrode formed above the substrate,
a hollow portion provided above a first insulating film and below a second insulating film sequentially formed above the lower electrode,
an upper electrode formed above the hollow portion,
a third insulating film formed above the upper electrode, and
a membrane constituted by the second insulating film and the third insulating film above the hollow portion;
a connection portion formed on the membrane and having a first area; and
a transmission/reception plate formed above the ultrasonic transducer via the connection portion and having a second area larger than the first area, wherein
the second area of the transmission/reception plate is larger than an area of the hollow portion,
the transmission/reception plate is fixed to the ultrasonic transducer via a fixed portion,
the transmission/reception plate has a planar spiral shape, and
the hollow portion, the membrane, and the connection portion are arranged at a position closer to the fixing portion than a center portion of the transmission/reception plate.
2. The capacitive device according to claim 1 , wherein
a plurality of the ultrasonic transducer arranged in an array is connected to the transmission/reception plate formed above the plurality of the ultrasonic transducer, via a plurality of the connection portion each having an area smaller than an area of the transmission/reception plate.
3. The capacitive device according to claim 1 , wherein
each of the plurality of the ultrasonic transducer arranged in an array is connected to the transmission/reception plate formed above each of the plurality of the ultrasonic transducer, via the connection portion having an area smaller than an area of the transmission/reception plate.