IP Library › Granted Patent US 11,380,546
Granted Patent B2
US 11,380,546 · App. 16/726,431 · Granted Jul 5, 2022

Deposition mask, deposition mask apparatus, manufacturing method of deposition mask, and manufacturing method of deposition mask apparatus

Inventors: Masato Ushikusa (Tokyo, JP); Yusuke Nakamura (Tokyo, JP); Hideyuki Okamoto (Tokyo, JP); Yoshinori Murata (Tokyo, JP)
Assignee: Dai Nippon Printing Co., Ltd.
H01L21/0337C23C14/04C23C14/24H01L21/0332H01L51/001H01L51/0011H01L51/50H05B33/10C23C14/042
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Quick Facts
Patent No.
US 11,380,546
App. No.
16/726,431
Granted
Jul 5, 2022
Kind
B2
Abstract

A deposition mask includes: a first mask having an opening formed therein; and a second mask superposed on the first mask and having a plurality of through-holes formed therein, the through-hole having a planar dimension smaller than a planar dimension of the opening; wherein: the deposition mask has a plurality of joints that join the second mask and the first mask to each other; the plurality of joints are arranged along an outer edge of the second mask; and a notch is formed at a position in the outer edge of the second mask, the position corresponding to a space between the adjacent two joints.

Claims (15)

1. A deposition mask comprising:

a first mask having openings formed therein; and

a second mask superposed on the first mask and having a plurality of through-holes formed therein, each through-hole having a planar dimension smaller than a planar dimension of each opening;

wherein:

the second mask has a rectangular outer edge;

the deposition mask has a plurality of joints that join the second mask and the first mask to each other;

the plurality of joints are arranged along all sides of the outer edge of the second mask; and

a notch is formed at a position corresponding to a space between two adjacent joints arranged along the same side of the outer edge of the second mask.

2. A deposition mask according to claim 1 , wherein

the notch extends inwardly from the outer edge of the second mask beyond the space directly between two adjacent joints.

3. A deposition mask according to claim 1 , further comprising at least three notches formed along at least one side of the outer edge of the second mask.

4. A deposition mask according to claim 1 , further comprising at least three notches formed along all sides of the outer edge of the second mask.

5. A deposition mask apparatus comprising:

the deposition mask according to claim 1 ; and

a frame attached to the deposition mask.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 4, 2020
From: USHIKUSA, MASATO; NAKAMURA, YUSUKE; OKAMOTO, HIDEYUKI; MURATA, YOSHINORI
To: DAI NIPPON PRINTING CO., LTD.
Reel/Frame 051712/0842 →
Priority Claims (1)
JP JP2017-132162 · Jul 5, 2017 · national
Continuity (2)
Continuation PCTJP2018023065 · Jun 18, 2018
Related Publication 20200152463A1 · May 14, 2020
Cited By (2)
US 12,312,670 US 12,594,626