IP Library › Granted Patent US 11,383,514
Granted Patent B2
US 11,383,514 · App. 16/956,709 · Granted Jul 12, 2022

Die for a printhead

Inventors: James Michael Gardner (Corvallis, OR); Anthony M. Fuller (Corvallis, OR); Scott A. Linn (Corvallis, OR)
Assignee: Hewlett-Packard Development Company, L.P.
B41J2/04581B41J2/04585
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Quick Facts
Patent No.
US 11,383,514
App. No.
16/956,709
Granted
Jul 12, 2022
Kind
B2
Abstract

A die for a printhead is described herein. The die includes a number of fluid feed holes disposed in a line parallel to a longitudinal axis of the die. A number of fluidic actuators are disposed in a line parallel to the fluid feed holes. A crack detector trace is routed between each of the plurality of fluid feed holes.

Claims (25)

1. A die for a printhead, comprising:

a plurality of fluid feed holes disposed in a line parallel to a longitudinal axis of the die;

a plurality of fluidic actuators disposed in a line parallel to the plurality of fluid feed holes; and

a crack detector trace routed between and alongside each of the plurality of fluid feed holes, wherein parts of the crack detector trace between the fluid feed holes are brittle and parts of the crack detector trace alongside the fluid feed holes are not brittle.

2. The die of claim 1 , wherein the plurality of fluid feed holes is etched through a silicon substrate of the die.

3. The die of claim 1 , wherein the brittle parts of the crack detector trace comprise polysilicon.

4. The die of claim 1 , wherein the not brittle parts of the crack detector trace comprise metal.

5. The die of claim 1 , wherein the brittle parts of the crack detector trace comprise polysilicon and the not brittle parts of the crack detector trace comprise metal.

6. The die of claim 1 , wherein the crack detector trace is conductively connected to an external sense pad by a sense bus.

7. The die of claim 6 , wherein the sense bus is shared by a thermal sensor, the thermal sensor being separate from the crack detector trace.

8. The die of claim 7 , wherein both the crack detector trace and the thermal sensor are disposed on a same silicon die.

9. A method for forming a crack detector trace on a die for a printhead, comprising:

etching a plurality of fluid feed holes in a line parallel to a longitudinal axis of a substrate; and

forming the crack detector trace in a plurality of layers on the substrate between and alongside each of the plurality of fluid feed holes including forming parts of the crack detector trace between the fluid feed holes from a brittle material and parts of the crack detector trace alongside the fluid feed holes from a non-brittle material.

10. The method of claim 9 , wherein the brittle material comprises polysilicon.

11. The method of claim 9 , wherein the non-brittle material comprises metal.

12. The method of claim 9 , wherein the brittle material comprises polysilicon and the non-brittle material comprises metal.

13. The method of claim 9 , comprising forming layers that conductively connect the crack detector trace to a sense bus shared by a thermal sensor separate from the crack detector trace.

14. A die for a printhead, comprising:

a plurality of fluid feed holes disposed in a line parallel to a longitudinal axis of the die;

a plurality of fluidic actuators disposed in a line parallel to the plurality of fluid feed holes; and

a crack detector trace routed between and alongside each of the plurality of fluid feed holes, wherein parts of the crack detector trace between the fluid feed holes have a first resistance and parts of the crack detector trace alongside each of the fluid feed holes have a second resistance less than the first resistance.

15. The die of claim 14 , wherein the parts of the crack detector trace between the feed holes comprise polysilicon.

16. The die of claim 14 , wherein the parts of the crack detector alongside the feed holes comprise metal.

17. The die of claim 14 , wherein the parts of the crack detector trace between the feed holes comprise polysilicon and the parts of the crack detector trace alongside the feed holes comprise metal.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 22, 2020
From: GARDNER, JAMES M.; FULLER, ANTHONY M.; LINN, SCOTT A.
To: HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.
Reel/Frame 053001/0974 →
Continuity (1)
Related Publication 20210370671A1 · Dec 2, 2021