Magnetic sensor device
A magnetic sensor device includes a conductor that constitutes a coil, and a detection circuit including a plurality of MR elements. The coil includes an upper coil portion. The upper coil portion includes a first conductor portion and a second conductor portion. An average cross-sectional area of the upper coil portion in the first conductor portion of the upper coil portion is smaller than that of the upper coil portion in the second conductor portion. The first conductor portion is located at a position where a first partial magnetic field occurring from the first conductor portion is applied to an MR element.
1. A magnetic sensor device comprising:
a magnetic detection element that detects an external magnetic field; and
a conductor through which a current flows, wherein
the conductor includes a first conductor portion and a second conductor portion that extend continuously when viewed in one direction,
a cross-sectional area of the conductor perpendicular to a direction in which the current flows changes from the first conductor portion to the second conductor portion,
an average cross-sectional area of the conductor in the first conductor portion is smaller than that of the conductor in the second conductor portion,
the first conductor portion is located at a position where a first partial magnetic field occurring from the first conductor portion due to the current is applied to the magnetic detection element, and
the second conductor portion is located at a position where a second partial magnetic field occurring from the second conductor portion due to the current is not applied to the magnetic detection element, or a position where the second partial magnetic field applied to the magnetic detection element has strength lower than that of the first partial magnetic field applied to the magnetic detection element.
2. The magnetic sensor device according to claim 1 , wherein:
the conductor further includes a third conductor portion located on a side opposite to the second conductor portion with respect to the first conductor portion;
the first to third conductor portions extend continuously when viewed in the one direction;
the cross-sectional area of the conductor perpendicular to the direction in which the current flows changes from the first conductor portion to the third conductor portion;
the average cross-sectional area of the conductor in the third conductor portion is greater than that of the conductor in the first conductor portion; and
the third conductor portion is located at a position where a third partial magnetic field occurring from the third conductor portion due to the current is not applied to the magnetic detection element, or a position where the third partial magnetic field applied to the magnetic detection element has strength lower than that of the first partial magnetic field applied to the magnetic detection element.
3. The magnetic sensor device according to claim 1 , wherein the magnetic sensor device is used as a current sensor that detects a current to be detected.
4. The magnetic sensor device according to claim 3 , wherein:
the conductor constitutes a coil for generating a second magnetic field that cancels out a first magnetic field generated by the current to be detected; and
the magnetic detection element detects a composite magnetic field of the first magnetic field and the second magnetic field.
5. The magnetic sensor device according to claim 3 , wherein the magnetic detection element is a magnetoresistive element.
6. The magnetic sensor device according to claim 1 , wherein:
the magnetic detection element is a magnetoresistive element;
the magnetoresistive element includes a magnetization pinned layer having a first magnetization whose direction is fixed, and a free layer having a second magnetization whose direction is variable depending on the external magnetic field; and
the conductor constitutes a coil for generating a magnetic field that sets the direction of the second magnetization of the free layer to a predetermined direction.
7. The magnetic sensor device according to claim 6 , further comprising a support member that supports the magnetic detection element, wherein:
the support member includes a top surface opposed to the magnetic detection element and a bottom surface located opposite to the top surface;
the top surface of the support member includes an inclined portion inclined relative to the bottom surface; and
the magnetic detection element, at least a part of the first conductor portion, and at least a part of the second conductor portion are located on the inclined portion.
8. The magnetic sensor device according to claim 7 , wherein:
a thickness of the conductor in a direction perpendicular to the bottom surface of the support member changes from the first conductor portion to the second conductor portion; and
an average thickness of the conductor in the first conductor portion is smaller than that of the conductor in the second conductor portion.