Multicathode deposition system
A physical vapor deposition (PVD) chamber and a method of operation thereof are disclosed. Chambers and methods are described that provide a chamber comprising one or more of contours that reduce particle defects, temperature control and or measurement and and/or voltage particle traps to reduce processing defects.
1. A physical vapor deposition (PVD) chamber comprising:
a plurality of cathode assemblies;
an upper shield below the plurality of cathode assemblies having a shield hole to expose one of the plurality of cathode assemblies; and
a lower shield below the upper shield, the lower shield having an upper end in contact with the upper shield, a lower end opposite the upper end, and a lower shield wall comprising a height “H” extending from the upper end to the lower end and a lower shield wall inner surface, wherein the lower shield wall inner surface has a substantially straight region extending from the upper end to about 0.8H wherein the substantially straight region has a first bend adjacent the upper end defining a first angle that is not in a range of from about 0.1 degrees to about 120 degrees and the lower shield wall inner surface has a second bend adjacent the lower end defining a second angle, the lower shield wall inner surface having a contour that minimizes accumulation of particles on the lower shield.
2. The PVD chamber of claim 1 , wherein the lower shield is surrounded by a modular chamber body comprising at least two body portions.
3. The PVD chamber of claim 2 , wherein the at least two body portions comprise an intermediate chamber body and a lower chamber body, the intermediate chamber body disposed above the lower chamber body.
4. The PVD chamber of claim 3 , further comprising a top adapter disposed above the intermediate chamber body and surrounding the upper shield and a lower shield liner disposed between a) one or more of the intermediate chamber body and the lower chamber body and b) the lower shield.
5. The PVD chamber of claim 1 , further comprising a heating element adjacent to the lower shield.
6. The PVD chamber of claim 5 , further comprising a plurality of heating elements.
7. The PVD chamber of claim 6 , wherein the plurality of heating elements comprises heating lamps.
8. The PVD chamber of claim 5 , wherein the heating element comprises a ring heater disposed adjacent to the lower end.
9. The PVD chamber of claim 1 , further comprising a cover ring disposed below the lower shield, the cover ring comprising a peripheral lip defining a sidewall that faces away from the upper shield.
10. The PVD chamber of claim 1 , further comprising a voltage particle trap adjacent to the lower shield, the voltage particle trap configured to trap particles.
11. The PVD chamber of claim 1 , further comprising a temperature sensor disposed above the upper shield.
12. The PVD chamber of claim 11 , wherein the temperature sensor comprises an infrared sensor and a shield.
13. A physical vapor deposition (PVD) chamber comprising:
a plurality of cathode assemblies;
an upper shield below the plurality of cathode assemblies having a shield hole to expose one of the plurality of cathode assemblies; and
a lower shield below the upper shield, the lower shield having an upper end in contact with the upper shield, a lower end opposite the upper end, and a lower shield wall comprising a height “H” extending from the upper end to the lower end and a lower shield wall inner surface, wherein the lower shield wall inner surface has a substantially straight region extending from the upper end to a range of 0.85H to 0.90H, wherein the substantially straight region has a first bend adjacent the upper end defining a first angle that is not in a range of from about 0.1 degrees to about 120 degrees and the lower shield wall inner surface has a second bend adjacent the lower end defining a second angle, the lower shield wall inner surface having a contour that minimizes accumulation of particles on the lower shield; and
one or more heating elements adjacent to the lower shield.
14. The PVD chamber of claim 13 , wherein the one or more heating elements comprises a plurality of lamps circumferentially arranged around the lower shield.
15. The PVD chamber of claim 13 , wherein the one or more heating elements comprises a ring heater disposed adjacent to the lower end.
16. The PVD chamber of claim 13 , further comprising a voltage particle trap adjacent to the lower shield configured to trap particles on the lower shield.
17. The PVD chamber of claim 13 , further comprising a temperature sensor disposed above the upper shield, the temperature sensor comprises an infrared sensor and a shield.