IP Library › Granted Patent US 11,387,187
Granted Patent B2
US 11,387,187 · App. 16/021,966 · Granted Jul 12, 2022

Embedded very high density (VHD) layer

Inventors: Andrew Paul Collins (Chandler, AZ); Jianyong Xie (Chandler, AZ); Sujit Sharan (Chandler, AZ); Henning Braunisch (Phoenix, AZ); Aleksandar Aleksov (Chandler, AZ)
Assignee: Intel Corporation
H01L23/5386H01L21/486H01L21/4857H01L21/76802H01L23/481H01L23/49822H01L23/49838H01L23/49894H01L23/528H01L23/5226H01L23/5383H01L25/0655H01L25/072
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Quick Facts
Patent No.
US 11,387,187
App. No.
16/021,966
Granted
Jul 12, 2022
Kind
B2
Abstract

Embodiments may relate to an interposer that has a first layer with a plurality of first layer pads that may couple with a die. The interposer may further include a second layer with a power delivery component. The interposer may further include a very high density (VHD) layer, that has a VHD pad coupled by a first via with the power delivery component and coupled by a second via with a first layer pad. Other embodiments may be described and/or claimed.

Claims (45)

1. An interposer comprising:

a first layer with a plurality of first layer pads, wherein a first first layer pad of the plurality of first layer pads is to couple with a first die;

a second layer with a power delivery component; and

a very high density (VHD) layer, wherein the VHD layer includes a first VHD pad and a second VHD pad of a plurality of VHD pads of the VHD layer, and wherein the first VHD pad is coupled by a first via with the power delivery component and not coupled by a via with the plurality of first layer pads, and the second VHD pad is coupled by a second via with the first first layer pad and not coupled by a via with the power delivery component.

2. The interposer of claim 1 , wherein respective pads of the plurality of VHD pads have a rectangular shape.

3. The interposer of claim 1 , wherein the first via and the second via have walls that are less than five degrees away from vertical.

4. The interposer of claim 1 , further comprising:

a third VHD pad of the plurality of VHD pads, wherein the third VHD pad is coupled with a fourth VHD pad of the plurality of VHD pads by a VHD trace;

a second first layer pad of the plurality of first layer pads, wherein the second first layer pad is coupled with the third VHD pad by a third via, and wherein the second first layer pad is to communicatively couple with the first die; and

a third first layer pad of the plurality of first layer pads, wherein the third first layer pad is coupled with the fourth VHD pad by a fourth via, and wherein the third first layer pad is to communicatively couple with a second die.

5. The interposer of claim 1 , wherein the VHD layer includes an organic dielectric material.

6. The interposer of claim 1 , wherein the VHD layer has a trace density of greater than 100 traces per millimeter.

7. The interposer of claim 1 , wherein the VHD layer is positioned between the first layer and the second layer.

8. A substrate comprising:

a first build-up (BU) layer with a plurality of first layer pads;

a second BU layer with a power delivery component; and

a very high density (VHD) layer with a plurality of VHD pads, the VHD layer positioned between the first BU layer and the second BU layer, wherein the VHD layer includes:

a first VHD pad of the plurality of VHD pads that is communicatively coupled with a first first layer pad of the plurality of first layer pads by a first via, wherein the first VHD pad is not communicatively coupled by a via to the power delivery component; and

a second VHD pad of the plurality of VHD pads that is communicatively coupled with a second first layer pad of the plurality of first layer pads by a second via and is coupled with the first VHD pad by a first VHD trace, and wherein the second VHD pad is not communicatively coupled by a via to the power delivery component.

9. The substrate of claim 8 , wherein the VHD layer includes an organic dielectric material.

10. The substrate of claim 8 , wherein the VHD layer has a trace density of greater than 100 traces per millimeter.

11. The substrate of claim 8 , wherein the first VHD pad is between 2 micrometers and 8 micrometers from the first BU layer.

12. The substrate of claim 8 , wherein the power delivery component of the second BU layer is between 10 micrometers and 40 micrometers from the VHD layer.

13. The substrate of claim 8 , wherein the power delivery component is a first power delivery component, and wherein the VHD layer includes a second power delivery component.

14. The substrate of claim 8 , wherein the VHD layer further comprises a third VHD pad of the plurality of VHD pads, and the third VHD pad is communicatively coupled with the power delivery component of the second BU layer by a third via and is not communicatively coupled by a via to the plurality of first layer pads.

15. The substrate of claim 8 , wherein respective VHD pads of the plurality of VHD pads have a rectangular shape.

16. The substrate of claim 8 , wherein the first via and the second via are lithographically defined.

17. A method of forming an interposer that includes a very high density (VHD) layer, the method comprising:

forming a second build-up (BU) layer with a power delivery component;

forming, on the second BU layer, the VHD layer, wherein the VHD layer includes a plurality of VHD pads and a first VHD pad of the plurality of VHD pads is coupled with a second VHD pad of the plurality of VHD pads by a first VHD trace, wherein the first and second VHD pads are not coupled to the power delivery component; and

forming, on the VHD layer, a first BU layer such that the VHD layer is positioned between the first BU layer and the second BU layer.

18. The method of claim 17 , further comprising lithographically forming a first via between the first BU layer and the VHD layer such that the first VHD pad is coupled with a first first layer pad of a plurality of first layer pads of the first BU layer.

19. The method of claim 17 , further comprising lithographically forming a third via between the second BU layer and the VHD layer such that when the VHD layer is formed a third VHD pad of the plurality of VHD pads is coupled with the power delivery component of the second BU layer.

20. The method of claim 19 , wherein the power delivery component is a ground or a power supply.

21. The method of claim 17 , wherein the VHD layer has a trace density of greater than 100 traces per millimeter.

22. A computing system comprising:

a substrate that includes a first build-up (BU) layer, a second BU layer with a power delivery component, and a very high density (VHD) layer positioned between the first BU layer and the second BU layer;

a first die coupled with a first first layer pad of a plurality of first layer pads of the first BU layer; and

a second die coupled with a second first layer pad of the plurality of first layer pads;

wherein the first first layer pad is coupled with a first VHD pad of a plurality of VHD pads of the VHD layer by a first via and the first VHD pad is not coupled by a via with the power delivery component;

the second first layer pad is coupled with a second VHD pad of the plurality of VHD pads by a second via and the second VHD pad is not coupled by a via to the power delivery component; and

the first VHD pad is coupled with the second VHD pad by a first VHD trace.

23. The computing system of claim 22 , wherein respective pads of the plurality of first layer pads have a rounded shape.

24. The computing system of claim 22 , wherein the VHD layer includes an organic dielectric material.

25. The computing system of claim 22 , wherein the VHD layer further includes a third VHD pad of the plurality of VHD pads coupled to the power delivery component of the second BU layer by a third via and the third VHD pad is not coupled by a via to the plurality of first layer pads of the first BU layer.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 10, 2018
From: COLLINS, ANDREW PAUL; XIE, JIANYONG; SHARAN, SUJIT; BRAUNISCH, HENNING; ALEKSOV, ALEKSANDER
To: INTEL CORPORATION
Reel/Frame 047213/0858 →
Continuity (1)
Related Publication 20200006236A1 · Jan 2, 2020