Encapsulation layers of thin film transistors
Embodiments herein describe techniques for a semiconductor device, which may include a substrate, a metallic encapsulation layer above the substrate, and a gate electrode above the substrate and next to the metallic encapsulation layer. A channel layer may be above the metallic encapsulation layer and the gate electrode, where the channel layer may include a source area and a drain area. In addition, a source electrode may be coupled to the source area, and a drain electrode may be coupled to the drain area. Other embodiments may be described and/or claimed.
1. A semiconductor device, comprising:
a substrate;
a metallic encapsulation layer above the substrate, the metallic encapsulation layer having a lateral width;
a gate electrode above the metallic encapsulation layer;
a channel layer above the gate electrode, wherein the channel layer includes a source area and a drain area, and wherein the channel layer has a lateral width the same as the lateral width of the metallic encapsulation layer; and
a source electrode coupled to the source area, and a drain electrode coupled to the drain area, wherein the metallic encapsulation layer extends laterally beneath the source electrode and the drain electrode.
2. The semiconductor device of claim 1 , further comprising:
an interlayer dielectric (ILD) layer above the substrate and below the metallic encapsulation layer.
3. The semiconductor device of claim 1 , wherein the metallic encapsulation layer is above the gate electrode and the substrate.
4. The semiconductor device of claim 1 , further comprising:
a gate dielectric layer above the gate electrode and below the channel layer, wherein the gate dielectric layer includes silicon and oxygen, silicon and nitrogen, yttrium and oxygen, silicon, oxygen, and nitrogen, aluminum and oxygen, hafnium and oxygen, tantalum and oxygen, or titanium and oxygen.
5. The semiconductor device of claim 1 , wherein the channel layer includes amorphous silicon, zinc oxide, amorphous germanium, polysilicon, poly germanium doped with boron, poly germanium doped with aluminum, poly germanium doped with phosphorous, poly germanium doped with arsenic, indium oxide, tin oxide, gallium oxide, indium gallium zinc oxide (IGZO), copper oxide, nickel oxide, cobalt oxide, indium tin oxide, tungsten disulphide, molybdenum disulphide, molybdenum selenide, black phosphorus, indium antimonide, graphene, graphyne, borophene, germanene, silicene, Si 2 BN, stanene, phosphorene, molybdenite, poly-III-V like InAs, InGaAs, InP, amorphous InGaZnO (a-IGZO), crystal-like InGaZnO (c-IGZO), GaZnON, ZnON, or C-Axis Aligned Crystal (CAAC).
6. The semiconductor device of claim 1 , wherein the metallic encapsulation layer is a part of a word line for a memory array.
7. The semiconductor device of any claim 1 , wherein the metallic encapsulation layer includes titanium (Ti), molybdenum (Mo), gold (Au), platinum (Pt), aluminum (Al), nickel (Ni), copper (Cu), chromium (Cr), or an alloy of Ti, Mo, Au, Pt, Al, Ni, Cu, Cr, TiAlN, HfAlN, or InAlO.
8. The semiconductor device of claim 1 , wherein the substrate includes a silicon substrate, a glass substrate, a metal substrate, or a plastic substrate.
9. The semiconductor device of claim 1 , further comprising: an insulating encapsulation layer above the metallic encapsulation layer, the gate electrode, the channel layer, the source electrode, and the drain electrode, wherein the insulating encapsulation layer conformally covers the metallic encapsulation layer, the gate electrode, the channel layer, the source electrode, and the drain electrode.
10. The semiconductor device of claim 9 , further comprising:
a source contact through the insulating encapsulation layer and in contact with the source electrode; and
a drain contact through the insulating encapsulation layer and in contact with the drain electrode.
11. The semiconductor device of claim 9 , wherein the insulating encapsulation layer includes silicon, nitride, aluminum nitride, aluminum oxide, hafnium oxide, yttrium oxide, tantalum oxide, zirconium oxide, gallium oxide, gallium nitride, or silicon oxide nitride.
12. A computing device comprising:
a circuit board; and
a memory device coupled to the circuit board and including a memory array, wherein the memory array includes a plurality of memory cells, a memory cell of the plurality of memory cells includes a transistor and a storage cell, and wherein the transistor includes:
a substrate;
a metallic encapsulation layer above the substrate, wherein the metallic encapsulation layer is a part of a word line for the memory array, and wherein the metallic encapsulation layer has a lateral width;
a gate electrode above the metallic encapsulation layer;
a channel layer above the gate electrode, wherein the channel layer includes a source area and a drain area, and wherein the channel layer has a lateral width the same as the lateral width of the metallic encapsulation layer; and
a source electrode coupled to the source area, and a drain electrode coupled to the drain area, wherein the metallic encapsulation layer extends laterally beneath the source electrode and the drain electrode; and
the storage cell is coupled to a bit line of the memory array.
13. The computing device of claim 12 , wherein the metallic encapsulation layer is above the gate electrode and the substrate.
14. The computing device of claim 12 , wherein the channel layer includes amorphous silicon, zinc oxide, amorphous germanium, polysilicon, poly germanium doped with boron, poly germanium doped with aluminum, poly germanium doped with phosphorous, poly germanium doped with arsenic, indium oxide, tin oxide, gallium oxide, indium gallium zinc oxide (IGZO), copper oxide, nickel oxide, cobalt oxide, indium tin oxide, tungsten disulphide, molybdenum disulphide, molybdenum selenide, black phosphorus, indium antimonide, graphene, graphyne, borophene, germanene, silicene, Si 2 BN, stanene, phosphorene, molybdenite, poly-III-V like InAs, InGaAs, InP, amorphous InGaZnO (a-IGZO), crystal-like InGaZnO (c-IGZO), Ga 7 nON, ZnON, or C-Axis Aligned Crystal (CAAC).
15. The computing device of claim 12 , wherein the transistor further includes: an insulating encapsulation layer above the metallic encapsulation layer, the gate electrode, the channel layer, the source electrode, and the drain electrode, wherein the insulating encapsulation layer conformally covers the metallic encapsulation layer, the gate electrode, the channel layer, the source electrode, and the drain electrode.
16. The computing device of claim 15 , wherein the insulating encapsulation layer includes silicon, nitride, aluminum nitride, aluminum oxide, hafnium oxide, yttrium oxide, tantalum oxide, zirconium oxide, gallium oxide, gallium nitride, or silicon oxide nitride.
17. The computing device of claim 12 , wherein the computing device is a wearable device or a mobile computing device, the wearable device or the mobile computing device including one or more of an antenna, a touchscreen controller, a battery, an audio codec, a video codec, a power amplifier, a global positioning system (GPS) device, a compass, a Geiger counter, an accelerometer, a gyroscope, a speaker, or a camera coupled with the circuit board.
18. A method for forming a semiconductor device, the method comprising:
forming a metallic encapsulation layer above a substrate, the metallic encapsulation layer having a lateral width;
forming a gate electrode above the metallic encapsulation layer;
forming a channel layer above the gate electrode, wherein the channel layer includes a source area and a drain area, and wherein the channel layer has a lateral width the same as the lateral width of the metallic encapsulation layer; and
forming a source electrode coupled to the source area, and a drain electrode coupled to the drain area, wherein the metallic encapsulation layer extends laterally beneath the source electrode and the drain electrode.
19. The method of claim 18 , further comprising:
forming an insulating encapsulation layer above the metallic encapsulation layer, the gate electrode, the channel layer, the source electrode, and the drain electrode, wherein the insulating encapsulation layer conformally covers the metallic encapsulation layer, the gate electrode, the channel layer, the source electrode, and the drain electrode.
20. The method of claim 19 , further comprising:
forming a source contact through the insulating encapsulation layer and in contact with the source electrode; and
forming a drain contact through the insulating encapsulation layer and in contact with the drain electrode.
21. The method of claim 18 , further comprising:
forming a gate dielectric layer above the gate electrode and below the channel layer, wherein the gate dielectric layer includes silicon and oxygen, silicon and nitrogen, yttrium and oxygen, silicon, oxygen, and nitrogen, aluminum and oxygen, hafnium and oxygen, tantalum and oxygen, or titanium and oxygen.
22. The method of claim 18 , wherein the metallic encapsulation layer is a part of a word line for a memory array.
23. The method of claim 18 , wherein the channel layer includes amorphous silicon, zinc oxide, amorphous germanium, polysilicon, poly germanium doped with boron, poly germanium doped with aluminum, poly germanium doped with phosphorous, poly germanium doped with arsenic, indium oxide, tin oxide, gallium oxide, indium gallium zinc oxide (IGZO), copper oxide, nickel oxide, cobalt oxide, indium tin oxide, tungsten disulphide, molybdenum disulphide, molybdenum selenide, black phosphorus, indium antimonide, graphene, graphyne, borophene, germanene, silicene, Si 2 BN, stanene, phosphorene, molybdenite, poly-III-V like InAs, InGaAs, InP, amorphous InGaZnO (a-IGZO), crystal-like InGaZnO (c-IGZO), GaZnON, ZnON, or C-Axis Aligned Crystal (CAAC).
24. The method of claim 19 , wherein the insulating encapsulation layer includes silicon, nitride, aluminum nitride, aluminum oxide, hafnium oxide, yttrium oxide, tantalum oxide, zirconium oxide, gallium oxide, gallium nitride, or silicon oxide nitride.
25. The method of claim 18 , wherein the metallic encapsulation layer includes titanium (Ti), molybdenum (Mo), gold (Au), platinum (Pt), aluminum (Al), nickel (Ni), copper (Cu), chromium (Cr), or an alloy of Ti, Mo, Au, Pt, Al, Ni, Cu, Cr, TiAlN, HfAlN, or InAlO.