System and method for a MEMS device
According to an embodiment, a microelectromechanical systems MEMS device includes a first membrane attached to a support structure that a first plurality of acoustic vents; a second membrane attached to the support structure that includes a second plurality of acoustic vents, where the first plurality of acoustic vents and the second plurality of acoustic vents do not overlap; and a closing mechanism coupled to the first membrane and the second membrane.
1. A microelectromechanical systems (MEMS) transducer comprising:
a first deflectable membrane attached to a support structure and comprising a first plurality of perforations;
a second deflectable membrane attached to the support structure and comprising a second plurality of perforations, the second plurality of perforations offset from the first plurality of perforations;
a closing mechanism coupled to the first deflectable membrane and the second deflectable membrane, the closing mechanism configured to
close an acoustic path through the first deflectable membrane and the second deflectable membrane by moving the first deflectable membrane and the second deflectable membrane into contact during a first mode, and
open the acoustic path by moving the first deflectable membrane and the second deflectable membrane out of contact during a second mode, wherein the first plurality of perforations are sealed to the second deflectable membrane and the second plurality of perforations are sealed to the first deflectable membrane when the acoustic path is closed; and
an actuating mechanism configured to excite oscillations of the first deflectable membrane and the second deflectable membrane.
2. The MEMS transducer of claim 1 , wherein the oscillations of the first deflectable membrane and the second deflectable membrane have a frequency above 40 kHz.
3. The MEMS transducer of claim 1 , wherein the closing mechanism comprises an electrostatic structure configured to generate an electrostatic force between the first deflectable membrane and the second deflectable membrane during the first mode.
4. The MEMS transducer of claim 1 , wherein the closing mechanism comprises a piezoelectric structure configured to generate a first force on the first deflectable membrane and a second force on the second deflectable membrane during the first mode, the first force and the second force configured to move the first deflectable membrane and the second deflectable membrane into contact.
5. The MEMS transducer of claim 1 , wherein the actuating mechanism comprises a perforated backplate attached to the support structure and configured to generate an electrostatic force between the perforated backplate and the first deflectable membrane and the second deflectable membrane.
6. The MEMS transducer of claim 1 , wherein the actuating mechanism comprises a piezoelectric structure configured to generate a first force on the first deflectable membrane and a second force on the second deflectable membrane.
7. A microelectromechanical systems (MEMS) device comprising:
a first membrane attached to a support structure and comprising a first plurality of acoustic vents;
a second membrane attached to the support structure and comprising a second plurality of acoustic vents, the second plurality of acoustic vents offset from the first plurality of acoustic vents, wherein the first plurality of acoustic vents and the second plurality of acoustic vents do not overlap; and
a closing mechanism coupled to the first membrane and the second membrane, the closing mechanism configured to
close an acoustic path through the first membrane and the second membrane by moving the first membrane and the second membrane into contact during a first mode, wherein the first plurality of acoustic vents are sealed to the second membrane and the second plurality of acoustic vents are sealed to the first membrane when the acoustic path is closed, and
open the acoustic path by moving the first membrane and the second membrane out of contact during a second mode.
8. The MEMS device of claim 7 , further comprising an actuating mechanism configured to excite oscillations of the first membrane or the second membrane.
9. The MEMS device of claim 8 , wherein the first membrane and the second membrane each comprise a deflectable membrane.
10. The MEMS device of claim 9 , wherein the actuating mechanism comprises a perforated backplate attached to the support structure and configured to generate an electrostatic force between the perforated backplate and the first membrane or the second membrane.
11. The MEMS device of claim 9 , wherein the actuating mechanism comprises a piezoelectric structure configured to generate a first force on the first membrane and a second force on the second membrane.
12. The MEMS device of claim 7 , wherein:
the first membrane and the second membrane each comprise a deflectable membrane; and
the closing mechanism comprises a piezoelectric structure configured to generate a first force on the first membrane and a second force on the second membrane during the first mode, the first force and the second force configured to move the first membrane and the second membrane into contact.
13. The MEMS device of claim 7 , wherein the closing mechanism comprises an electrostatic structure configured to generate an electrostatic force between the first membrane and the second membrane during the first mode.
14. A method of operating a MEMS device comprising a first membrane attached to a support structure and including a first plurality of acoustic vents, and a second membrane attached to the support structure and including a second plurality of acoustic vents, wherein the second plurality of acoustic vents are offset from and do not overlap the first plurality of acoustic vents, the method comprising:
closing an acoustic path through the first membrane and the second membrane by moving the first membrane and the second membrane into contact during a first mode, wherein the first plurality of acoustic vents are sealed to the second membrane and the second plurality of acoustic vents are sealed to the first membrane when the acoustic path is closed; and
opening the acoustic path by moving the first membrane and the second membrane out of contact during a second mode.
15. The method of claim 14 , wherein the first membrane and the second membrane each comprise a deflectable membrane.
16. The method of claim 15 , further comprising exciting oscillations of the first membrane and the second membrane.
17. The method of claim 16 , wherein exiting oscillations comprises generating an electrostatic force between a perforated backplate and the first membrane and the second membrane using an actuating mechanism.
18. The method of claim 16 , wherein exiting oscillations comprises using a piezoelectric structure to generate a first force on the first membrane and a second force on the second membrane.
19. The method of claim 15 , wherein closing the acoustic path comprises using a piezoelectric structure to generate a first force on the first membrane and a second force on the second membrane during the first mode, wherein the first force and the second force are configured to move the first membrane and the second membrane into contact.
20. The method of claim 14 , wherein closing the acoustic path comprises generating an electrostatic force between the first membrane and the second membrane during the first mode.