Yttrium fluoride spray material, yttrium oxyfluoride-deposited article, and making methods
An yttrium fluoride spray material contains Y 5 O 4 F 7 and YF 3 , and has an average particle size of 10-60 μm and a bulk density of 1.2-2.5 g/cm 3 . The Y 5 O 4 F 7 and YF 3 in the yttrium fluoride spray material consist of 30 to 90% by weight of Y 5 O 4 F 7 and the balance of YF 3 . A sprayed coating of yttrium oxyfluoride is obtained by atmospheric plasma spraying of the spray material.
1. A yttrium-deposited article comprising a substrate and a coating sprayed thereon, the sprayed coating containing at least one yttrium oxyfluoride selected from the group consisting of YOF, Y 5 O 4 F 7 , and Y 7 O 6 F 9 , the sprayed coating formed by spraying a spray material consisting of 30 to 71% by weight of Y 5 O 4 F 7 and the balance 29 to 70% by weight of YF 3 .
2. The yttrium-deposited article of claim 1 wherein the sprayed coating contains YOF and Y 5 O 4 F 7 .
3. The yttrium-deposited article of claim 1 wherein the substrate is selected from the group consisting of stainless steel, aluminum, aluminum alloys, nickel, nickel alloys, chromium, chromium alloys, zinc, zinc alloys, alumina, aluminum nitride, silicon nitride, silicon carbide, and quartz glass.
4. The yttrium-deposited article of claim 1 wherein the sprayed coating is free of Y 2 O 3 .
5. The yttrium-deposited article of claim 1 wherein the sprayed coating has a thickness of 50 to 500 μm.