IP Library › Granted Patent US 11,391,792
Granted Patent B2
US 11,391,792 · App. 17/183,876 · Granted Jul 19, 2022

Magnetic field measuring device, magnetic field measurement method, and recording medium having recorded thereon magnetic field measurement program

Inventors: Kazuhiro Ishida (Tokyo, JP); Masanori Masuda (Tokyo, JP); Takenobu Nakamura (Tokyo, JP)
Assignee: Asahi Kasei Microdevices Corporation
G01R33/0041G01R33/0029G01R33/093G01R33/098
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Quick Facts
Patent No.
US 11,391,792
App. No.
17/183,876
Granted
Jul 19, 2022
Kind
B2
Abstract

A magnetic field measuring device that can measure a weaker magnetic field is provided. A magnetic field measuring device is provided, the magnetic field measuring device including: a sensor unit that has at least one magnetoresistive element; a reference voltage generating unit that outputs a reference voltage; a magnetic field generating unit that generates a magnetic field to be applied to the sensor unit; a feedback current generating unit that supplies, according to a difference between an output voltage of the sensor unit and the reference voltage, the magnetic field generating unit with a feedback current that generates a feedback magnetic field to diminish an input magnetic field to the sensor unit; a magnetic field measuring unit that outputs a measurement value corresponding to the feedback current; and an adjusting unit that uses the output voltage of the sensor unit to adjust the reference voltage.

Claims (47)

1. A magnetic field measuring device comprising:

a sensor unit that has at least one magnetoresistive element;

a variable resistor;

a magnetic field generating unit that generates a magnetic field to be applied to the sensor unit;

a feedback current generating unit that supplies, based on an output voltage of the sensor unit and a resistance value of the variable resistor, the magnetic field generating unit with a feedback current that generates a feedback magnetic field to diminish an input magnetic field to the sensor unit;

a magnetic field measuring unit that outputs a measurement value corresponding to the feedback current; and

an adjusting unit that uses the output voltage of the sensor unit to adjust the resistance value of the variable resistor.

2. The magnetic field measuring device according to claim 1 , further comprising a reference voltage generating unit that outputs a reference voltage,

wherein the feedback current generating unit supplies the magnetic field generating unit with the feedback current according to a difference between the output voltage of the sensor unit and the reference voltage.

3. The magnetic field measuring device according to claim 1 , wherein

in an adjustment phase, the adjusting unit adjusts the resistance value; and

in a measurement phase, the magnetic field measuring unit outputs a measurement value corresponding to the feedback current generated for a measurement-target magnetic field.

4. The magnetic field measuring device according to claim 3 , wherein

the reference voltage generating unit has the variable resistor, and

the adjusting unit changes the resistance value of the variable resistor to adjust the reference voltage.

5. The magnetic field measuring device according to claim 1 , wherein the adjusting unit adjusts the resistance value based on the feedback current.

6. The magnetic field measuring device according to claim 5 , wherein, upon the sensor unit receiving an adjustment magnetic field, the adjusting unit adjusts the resistance value such that the measurement value falls within a predetermined range as a result of the reception of the adjustment magnetic field.

7. The magnetic field measuring device according to claim 5 , wherein the adjusting unit adjusts the resistance value so as to lower a variance of the feedback current.

8. The magnetic field measuring device according to claim 2 , further comprising a switching unit that switches whether to or not to supply the feedback current to the magnetic field generating unit, wherein

the adjusting unit uses the output voltage of the sensor unit generated while the feedback current is not being supplied to the magnetic field generating unit to adjust the resistance value.

9. The magnetic field measuring device according to claim 8 , wherein, upon the sensor unit receiving an adjustment magnetic field while the feedback current is not being supplied to the magnetic field generating unit, the adjusting unit adjusts the resistance value such that the difference between the output voltage of the sensor unit and the reference voltage falls within a predetermined range as a result of the reception of the adjustment magnetic field.

10. The magnetic field measuring device according to claim 8 , further comprising an adjustment current generating unit that generates an adjustment current, wherein

the switching unit supplies the adjustment current to the magnetic field generating unit if the feedback current is not supplied to the magnetic field generating unit, and

the adjusting unit uses the output voltage of the sensor unit generated while the adjustment current is being supplied to the magnetic field generating unit to adjust the resistance value.

11. The magnetic field measuring device according to claim 10 , wherein the adjusting unit adjusts the resistance value based on a characteristic of the difference between the reference voltage and the output voltage of the sensor unit generated corresponding to the adjustment current.

12. The magnetic field measuring device according to claim 1 , wherein the magnetic field measuring unit integrates measurement values obtained in a predetermined period, and outputs the integrated measurement values.

13. The magnetic field measuring device according to claim 2 , wherein, before measurement of a measurement-target magnetic field performed by the magnetic field measuring unit, the adjusting unit makes the reference voltage generating unit generate the reference voltage that makes the feedback current generating unit generate a reset magnetic field to magnetically saturate the magnetoresistive element.

14. The magnetic field measuring device according to claim 13 , wherein before measurement of a measurement-target magnetic field performed by the magnetic field measuring unit, the adjusting unit:

changes the resistance value to make the reference voltage generating unit generate a reset magnetic field generating voltage that generates the reset magnetic field.

15. The magnetic field measuring device according to claim 14 , wherein the adjusting unit sets the resistance value to ½ to ¼ of a range of an upper reset magnetic field generating resistance value and a lower magnetic field generating resistance value each of which generates the reset magnetic field generating voltage.

16. The magnetic field measuring device according to claim 1 , further comprising a reset current generating unit that supplies, before measurement of a measurement-target magnetic field performed by the magnetic field measuring unit, the magnetic field generating unit with a reset current that generates a reset magnetic field to magnetically saturate the magnetoresistive element.

17. The magnetic field measuring device according to claim 1 , further comprising a high-pass filter that allows passage therethrough of a high-frequency component of a measurement value output by the magnetic field measuring unit.

18. The magnetic field measuring device according to claim 1 , wherein the sensor unit includes a magnetic flux concentrating unit arranged adjacent to the magnetoresistive element, and the feedback current generating unit is formed to surround the magnetoresistive element and the magnetic flux concentrating unit.

19. A magnetic field measuring device comprising:

a magnetoresistive element;

a variable resistor;

a magnetic field generating unit that generates a magnetic field to be applied to the magnetoresistive element;

a feedback current generating unit that supplies, based on a resistance value of the magnetoresistive element and a resistance value of the variable resistor, the magnetic field generating unit with a feedback current that generates a feedback magnetic field to diminish an input magnetic field to the magnetoresistive element;

a magnetic field measuring unit that outputs a measurement value corresponding to the feedback current; and

an adjusting unit that uses the measurement value to adjust the resistance value of the variable resistor.

20. A magnetic field measuring device comprising:

a sensor unit that has at least one magnetoresistive element;

a reference voltage generating unit that outputs a reference voltage;

a magnetic field generating unit that generates a magnetic field to be applied to the sensor unit;

a feedback current generating unit that supplies, based on an output voltage of the sensor unit and the reference voltage, the magnetic field generating unit with a feedback current that generates a feedback magnetic field to diminish an input magnetic field to the sensor unit;

a magnetic field measuring unit that outputs a measurement value corresponding to the feedback current; and

an adjusting unit that uses the output voltage of the sensor unit to adjust the reference voltage.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 24, 2021
From: ISHIDA, KAZUHIRO; MASUDA, MASANORI; NAKAMURA, TAKENOBU
To: ASAHI KASEI MICRODEVICES CORPORATION
Reel/Frame 055392/0550 →
Priority Claims (2)
JP JP2018-126201 · Jul 2, 2018 · national
JP JP2019-093087 · May 16, 2019 · national
Continuity (2)
Continuation 16458211 · Jul 1, 2019
Related Publication 20210181269A1 · Jun 17, 2021