Pressure-sensitive sensor and electronic apparatus
[Object] To provide a technology such as a pressure-sensitive sensor that can sufficiently ensure tolerances. [Solving Means] A pressure-sensitive sensor according to the present technology includes a sensor section, a clearance layer, and a push-in layer. The sensor section includes a sensor electrode layer, a first reference electrode layer, and a first deformable layer that is situated between the sensor electrode layer and the first reference electrode layer. The clearance layer is situated outside of the sensor section to face the first reference electrode layer. The push-in layer is situated between the first reference electrode layer and the clearance layer, and pushes the first reference electrode layer toward the sensor electrode layer in response to an external force to deform the first deformable layer.
1. A pressure-sensitive sensor, comprising:
a sensor section that includes a sensor electrode layer, a first reference electrode layer, and a first deformable layer that is situated between the sensor electrode layer and the first reference electrode layer;
a clearance layer that is situated outside of the sensor section to face the first reference electrode layer; and
a push-in layer that is situated between the first reference electrode layer and the clearance layer, wherein the push-in layer is configured to push the first reference electrode layer toward the sensor electrode layer in response to an external force to deform the first deformable layer.
2. The pressure-sensitive sensor according to claim 1 , wherein
the push-in layer includes a first patterning structure that is situated between the first reference electrode layer and the clearance layer.
3. The pressure-sensitive sensor according to claim 2 , wherein
the first patterning structure includes a plurality of first pillar portions arranged in a direction horizontal to the layers.
4. The pressure-sensitive sensor according to claim 3 , wherein
the first deformable layer includes a second patterning structure that is situated between the sensor electrode layer and the first reference electrode layer.
5. The pressure-sensitive sensor according to claim 4 , wherein
the second patterning structure includes a plurality of second pillar portions arranged in the direction horizontal to the layers.
6. The pressure-sensitive sensor according to claim 5 , wherein
the first deformable layer includes a hollow portion in which there is not the second pillar portion of the plurality of second pillar portions, and
each of the plurality of first pillar portions is arranged at a position that corresponds to the hollow portion in a stacking direction vertical to the layers.
7. The pressure-sensitive sensor according to claim 3 , wherein
the sensor electrode layer includes a sensing portion, and
each of the plurality of first pillar portions is arranged at a position that corresponds to the sensing portion in a stacking direction vertical to the layers.
8. The pressure-sensitive sensor according to claim 1 , wherein
the clearance layer includes plastic foam.
9. The pressure-sensitive sensor according to claim 1 , wherein
the push-in layer is made of a material harder than a material of the clearance layer.
10. The pressure-sensitive sensor according to claim 1 , wherein
the sensor section further includes a second reference electrode layer that is arranged such that the sensor electrode layer is situated between the first reference electrode layer and the second reference electrode layer.
11. The pressure-sensitive sensor according to claim 10 , wherein
the sensor section further includes a second deformable layer that is situated between the sensor electrode layer and the second reference electrode layer.
12. The pressure-sensitive sensor according to claim 11 , wherein
the first deformable layer and the second deformable layer are different from each other in at least one of structure or material.
13. The pressure-sensitive sensor according to claim 12 , wherein
one of the first deformable layer and the second deformable layer includes a patterning structure.
14. The pressure-sensitive sensor according to claim 13 , wherein
the patterning structure includes a plurality of pillar portions arranged in a direction horizontal to the layers.
15. The pressure-sensitive sensor according to claim 13 , wherein
another of the first deformable layer and the second deformable layer includes plastic foam.
16. An electronic apparatus, comprising:
an exterior body; and
a pressure-sensitive sensor configured to detect an external force applied through the exterior body, wherein the pressure-sensitive sensor includes:
a sensor section that includes a sensor electrode layer, a first reference electrode layer, and a first deformable layer that is situated between the sensor electrode layer and the first reference electrode layer,
a clearance layer that is situated outside of the sensor section to face the first reference electrode layer, and
a push-in layer that is situated between the first reference electrode layer and the clearance layer, wherein the push-in layer is configured to push the first reference electrode layer toward the sensor electrode layer in response to the external force to deform the first deformable layer.