Hybrid low resistance metal lines
Disclosed are standard cells and methods for fabricating standard cells used in semiconductor device design and fabrication. Aspects disclosed include a standard cell having a plurality of wide metal lines. The wide metal lines being formed from copper. The standard cell also includes a plurality of narrow metal lines. The narrow metal lines are formed from a material that has a lower resistance than copper for line widths on the order of twelve nanometers or less.
1. A standard cell comprising:
a plurality of wide metal lines, wherein the wide metal lines are formed from copper; and
a plurality of narrow metal lines, wherein the narrow metal lines are formed from a material that has a lower resistance than copper for line widths on an order of twelve nanometers or less,
wherein the plurality of wide metal lines has a height that is greater than a height of the plurality of narrow metal lines.
2. The standard cell of claim 1 , wherein the plurality of narrow metal lines is formed from at least one of rhodium (Rh), Platinum (Pt), iridium (Ir), Niobium (Nb), Nickel (Ni), Aluminum (Al), Ruthenium (Ru), Molybdenum (Mo) and Osmium (Os).
3. The standard cell of claim 1 , wherein a ratio of a width of a wide metal line of the plurality of wide metal lines and a width of a narrow metal line of the plurality of narrow metal lines is on an order of three to one.
4. The standard cell of claim 1 , wherein the plurality of wide metal lines each have a width of on an order of 35 nanometers.
5. The standard cell of claim 4 , wherein the plurality of narrow metal lines each have a width of on an order of 12 nanometers.
6. The standard cell of claim 1 , wherein the plurality of narrow metal lines each have a width of on an order of 12 nanometers.
7. The standard cell of claim 1 , wherein the plurality of wide metal lines has the height that is at least five nanometers greater than the height of the plurality of narrow metal lines.
8. The standard cell of claim 1 , further comprising:
a plurality of barriers, wherein each barrier is formed around side surfaces and a bottom surface of each of the plurality of wide metal lines.
9. The standard cell of claim 8 , wherein each barrier is formed of at least one of tantalum nitride (TaN) combinations including at least one of TaN/Ta, TaN/Co (cobalt) or TaN/Ru (Ruthenium).
10. The standard cell of claim 8 , further comprising:
a dielectric disposed between each of the plurality of narrow metal lines and the plurality of wide metal lines.
11. The standard cell of claim 10 , wherein the dielectric is formed of a low dielectric constant material.
12. The standard cell of claim 11 , wherein the low dielectric constant material is a carbon doped oxide dielectric.
13. The standard cell of claim 10 , further comprising:
an adhesion layer at one end of each of the plurality of narrow metal lines disposed between the plurality of wide metal lines.
14. The standard cell of claim 13 , wherein the adhesion layer is titanium nitride (TiN).
15. The standard cell of claim 1 , wherein the plurality of narrow metal lines are formed by a subtractive etching process.
16. The standard cell of claim 1 , wherein the plurality of wide metal lines are formed by a damascene process.
17. The standard cell of claim 1 , wherein the plurality of narrow metal lines are formed between at least two of the plurality of wide metal lines.
18. The standard cell of claim 17 , wherein the at least two of the plurality of wide metal lines are configured to provide a supply voltage to a given circuit.
19. The standard cell of claim 18 , wherein the plurality of the narrow metal lines are configured to conduct signals of the given circuit.
20. The standard cell of claim 1 , wherein the standard cell is part of a semiconductor device incorporated into at least one of a music player, a video player, an entertainment unit, a navigation device, a communications device, a mobile device, a mobile phone, a smartphone, a personal digital assistant, a fixed location terminal, a tablet computer, a computer, a wearable device, an Internet of things (IoT) device, a laptop computer, a server, or a device in an automotive vehicle.
21. A method for fabricating a standard cell comprising:
fabricating a plurality of wide metal lines, wherein the wide metal lines are formed from copper; and
fabricating a plurality of narrow metal lines, wherein the narrow metal lines are formed from a material that has a lower resistance than copper for line widths on an order of twelve nanometers or less,
wherein the plurality of wide metal lines has a height that is greater than a height of the plurality of narrow metal lines.
22. The method of claim 21 , wherein the plurality of narrow metal lines is formed from at least one of rhodium (Rh), Platinum (Pt), iridium (Ir), Niobium (Nb), Nickel (Ni), Aluminum (Al), Ruthenium (Ru), Molybdenum (Mo) and Osmium (Os).
23. The method of claim 21 , wherein a ratio of a width of a wide metal line of the plurality of wide metal lines and a width of a narrow metal line of the plurality of narrow metal lines is on an order of three to one.
24. The method of claim 21 , wherein the plurality of wide metal lines has the height that is at least five nanometers greater than the height of the plurality of narrow metal lines.
25. The method of claim 21 , wherein the plurality of narrow metal lines are formed by subtractive etching and the plurality of wide metal lines are formed by a damascene process.
26. The method of claim 25 , further comprising:
depositing an adhesion layer; and
depositing a narrow metal line material on the adhesive layer,
wherein fabricating the plurality of narrow metal lines includes patterning and etching the adhesion layer and narrow metal line material.
27. The method of claim 26 , further comprising:
forming a dielectric substantially encapsulating each of the plurality of narrow metal lines; and
patterning and etching portions of the dielectric to form cavities for the plurality of wide metal lines.
28. The method of claim 27 , further comprising:
forming a barrier over the dielectric including in the cavities for the plurality of wide metal lines.
29. The method of claim 28 , further comprising:
depositing a copper layer over the barrier including filling the cavities,
wherein fabricating the plurality of wide metal lines includes using a chemical mechanical polishing/planarization to remove excess copper and barrier portions over the dielectric to form the plurality of wide metal lines from the filled cavities, and
wherein the barrier is formed around side surfaces and a bottom surface of each of the plurality of wide metal lines.
30. The method of claim 27 , wherein the dielectric is formed of a low dielectric constant material.