Epitaxial source or drain structures for advanced integrated circuit structure fabrication
Embodiments of the disclosure are in the field of advanced integrated circuit structure fabrication and, in particular, 10 nanometer node and smaller integrated circuit structure fabrication and the resulting structures. In an example, an integrated circuit structure includes a fin comprising silicon, the fin having a lower fin portion and an upper fin portion. A gate electrode is over the upper fin portion of the fin, the gate electrode having a first side opposite a second side. A first epitaxial source or drain structure is embedded in the fin at the first side of the gate electrode. A second epitaxial source or drain structure is embedded in the fin at the second side of the gate electrode, the first and second epitaxial source or drain structures comprising silicon and germanium and having a match-stick profile.
1. An integrated circuit structure, comprising:
a fin comprising silicon, the fin having a lower fin portion and an upper fin portion;
a gate electrode over the upper fin portion of the fin, the gate electrode having a first side opposite a second side;
a first epitaxial source or drain structure embedded in the fin at the first side of the gate electrode;
a second epitaxial source or drain structure embedded in the fin at the second side of the gate electrode, the first and second epitaxial source or drain structures comprising silicon and germanium and having a match-stick profile, the match-stick profile comprising a lower portion and an upper portion, the lower portion having substantially vertical sidewalls and a first width, and the upper portion having curved sidewalls and a second width, the second width greater than the first width,
a first dielectric spacer continuous along sidewalls of a first portion of the fin and along a lower portion of sidewalls of the first epitaxial source or drain structure; and
a second dielectric spacer continuous along sidewalls of a second portion of the fin and along a lower portion of sidewalls of the second epitaxial source or drain structure.
2. The integrated circuit structure of claim 1 , wherein the first and second epitaxial source or drain structures are weakly faceted.
3. The integrated circuit structure of claim 1 , wherein the first and second epitaxial source or drain structures each have a height of approximately 50 nanometers and each have a width in the range of 30-35 nanometers.
4. The integrated circuit structure of claim 1 , wherein the first and second epitaxial source or drain structures are graded with an approximately 20% germanium concentration at a bottom of the first and second epitaxial source or drain structures to an approximately 45% germanium concentration at a top of the first and second epitaxial source or drain structures.
5. The integrated circuit structure of claim 1 , wherein the first and second epitaxial source or drain structures are doped with boron atoms.
6. The integrated circuit structure of claim 1 , further comprising:
a first conductive electrode on the first epitaxial source or drain structure; and
a second conductive electrode on the second epitaxial source or drain structure.