Method of manufacturing light-emitting device, light-emitting device, and light source device

1. A method of manufacturing a light-emitting device, the method comprising:

providing an intermediate structure having a first surface and a second surface opposite to the first surface, the intermediate structure comprising:

a plurality of layered bodies aligned in a first direction in a light-reflective member, each of the layered bodies comprising:

a pair of electrodes aligned in a second direction intersecting with the first direction, each pair of electrodes being exposed from the light-reflective member at the first surface,

a semiconductor layered body connected to the pair of electrodes, and

a light-transmissive member,

wherein at least one second-surface groove is formed at the second surface in the light-reflective member between two adjacent layered bodies of the plurality of layered bodies;

forming at least one first-surface groove at the first surface in the light-reflective member, the first-surface groove extending in the second direction at a location between the two adjacent layered bodies;

forming at least one electrically conductive film, each disposed on the first surface and inside a respective one of the at least one first-surface groove, wherein a width of each of the at least one first-surface groove is greater than a width of each of the at least one second-surface groove;

exposing a portion of the light-reflective member in an inter-electrode region between the pair of electrodes on the first surface by removing a corresponding portion of the electrically conductive film covering the inter-electrode region;

forming a hole having a width equal to or greater than a width of the at least one first-surface groove and having a depth equal to or greater than a depth of the at least one first-surface groove, so as to remove a portion of each of the at least one electrically conductive film inside a respective one of the at least one first-surface groove at a location between two inter-electrode regions adjacent to each other across the respective one of the at least one first-surface groove; and

cutting the light-reflective member and the at least one electrically conductive film along the at least one first-surface groove to obtain a plurality of light-emitting devices.

2. The method of manufacturing a light-emitting device according to claim 1 , wherein each of the at least one first-surface groove faces a respective one of the at least one second-surface groove.

3. The method of manufacturing a light-emitting device according to claim 1 ,

wherein the at least one second-surface groove comprises a plurality of second-surface grooves; and

wherein each of the at least one first-surface groove is formed at a position facing alternate ones of the plurality of second-surface grooves.

4. The method of manufacturing a light-emitting device according to claim 1 ,

wherein the first surface of the intermediate structure faces an upper surface of a substrate;

wherein a recognition target is formed in a region of the upper surface of the substrate not covered with the light-reflective member;

wherein the at least one second-surface groove is formed with reference to the recognition target; and

wherein the method further comprises, between the step of providing the intermediate structure and the step of forming the at least one first-surface groove, exposing the pair of electrodes by removing the substrate.

5. The method of manufacturing a light-emitting device according to claim 1 , wherein the step of providing an intermediate structure further comprises exposing the light-transmissive member by removing the second surface of the intermediate structure.