Template for imprint and imprint method using template
A template for imprint comprises a main body having a bottom surface, a middle surface on a portion protruding relative to the bottom surface, and a pattern surface on a portion protruding relative to the middle surface, the pattern surface having an uneven pattern, wherein an outer edge of the pattern surface has a jigsaw shape, wherein a light-shielding member having a light transmittance lower than a light transmittance of the main body is disposed on the middle surface to surround the outer edge of the pattern surface in a plan view as viewed from the pattern surface, and wherein an outer edge of light-shielding member defines four sides having a shape in which a center of each side bulges outward with respect to a rectangle surrounding the outer edge of the pattern surface in the plan view, and wherein the shape of each side bulges outwardly in a stepwise manner from the ends of each side to the center of each side.
1. A template for imprinting, the template comprising:
a main body having a bottom surface, a middle surface on a portion protruding relative to the bottom surface, and a pattern surface on a portion protruding relative to the middle surface, the pattern surface having an uneven pattern,
wherein an outer edge of the pattern surface has a jigsaw shape,
wherein a light-shielding member having a light transmittance lower than a light transmittance of the main body is disposed on the middle surface to surround the outer edge of the pattern surface in a plan view as viewed from the pattern surface, and
wherein an outer edge of light-shielding member defines four sides having a shape in which a center of each side bulges outward with respect to a rectangle surrounding the outer edge of the pattern surface in the plan view, and wherein the shape of each side bulges outwardly in a stepwise manner from the ends of each side to the center of each side.
2. The template according to claim 1 , wherein the main body has a held surface opposite to the bottom surface.
3. The template according to claim 1 , wherein a surface of the light-shielding member is at a height between the pattern surface and the middle surface.
4. An imprint method of forming a pattern in a plurality of shot regions of a substrate by repeating a molding operation on the substrate using a template, the imprint method comprising:
preparing the template;
preparing the substrate; and
irradiating a photocurable imprint material on the substrate with light in a state where the template and the imprint material are in contact with each other,
wherein the template includes a main body having a bottom surface, a middle surface on a portion protruding relative to the bottom surface, and a pattern surface on a portion protruding relative to the middle surface, the pattern surface having an uneven pattern,
wherein an outer edge of the pattern surface has a jigsaw shape,
wherein a light-shielding member having a light transmittance lower than a light transmittance of the main body is disposed on the middle surface to surround the outer edge of the pattern surface in a plan view as viewed from the pattern surface,
wherein an outer edge of light-shielding member defines four sides having a shape in which a center of each side bulges outward with respect to a rectangle surrounding the outer edge of the pattern surface in the plan view, and wherein the shape of each side bulges outwardly in a stepwise manner from the ends of each side to the center of each side, and
wherein an irradiation region in the irradiating with the light defines the rectangle surrounding the outer edge of the pattern surface in the plan view.