Sealed package and method of forming same
Various embodiments of a sealed package and a method of forming such package are disclosed. The package can include a non-conductive substrate that includes a cavity disposed in a first major surface. A cover layer can be disposed over the cavity and attached to the first major surface of the non-conductive substrate to form a sealed enclosure. The sealed package can also include a feedthrough that includes a via between a recessed surface of the cavity and a second major surface of the substrate, and a conductive material disposed in the via. An external contact can be disposed over the via on the second major surface of the non-conductive substrate, where the external contact is electrically connected to the conductive material disposed in the via. The sealed package can also include an electronic device disposed within the sealed enclosure that is electrically connected to the external contact.
1. A method of forming a hermetically-sealed package, comprising:
disposing an electronic device at least partially within a cavity of a non-conductive substrate, wherein the non-conductive substrate comprises a first major surface and a second major surface, and further wherein the cavity is disposed in the first major surface of the non-conductive substrate;
disposing a cover layer over the cavity; and
attaching the cover layer to the first major surface of the non-conductive substrate to form a hermetically-sealed enclosure, wherein the electronic device is disposed within the hermetically-sealed enclosure, and further wherein attaching the cover layer comprises laser bonding the cover layer to the first major surface of the non-conductive substrate by forming a bond line at an interface between the first major surface of the substrate and the cover layer.
2. The method of claim 1 , further comprising:
disposing a power source at least partially within the cavity of the non-conductive substrate prior to attaching the cover layer to the first major surface of the non-conductive substrate; and
electrically connecting the power source to the electronic device.
3. The method of claim 1 , further comprising forming a via between a recessed surface of the cavity and the second major surface of the non-conductive substrate.
4. The method of claim 3 , further comprising forming an external contact over the via on the second major surface of the non-conductive substrate.
5. The method of claim 4 , wherein forming the external contact comprises:
disposing a conductive layer on the second major surface over the via; and
removing a portion of the conductive layer to form the external contact over the via.
6. The method of claim 5 , further comprising attaching the conductive layer to the second major surface of the non-conductive substrate prior to removing the portion of the conductive layer.
7. The method of claim 6 , wherein attaching the conductive layer to the second major surface of the non-conductive substrate comprises directing electromagnetic radiation through one or both of the first major surface of the non-conductive substrate and the recessed surface at an interface of the conductive layer and the second major surface of the non-conductive substrate to form one or more bonds between the conductive layer and the second major surface.
8. The method of claim 4 , further comprising electrically connecting the external contact to the electronic device.
9. The method of claim 4 , wherein the external contact is adapted to provide an electrical signal to tissue of a patient.
10. The method of claim 1 , further comprising forming an antenna on at least one of the first major surface or second major surface of the non-conductive substrate.
11. The method of claim 10 , further comprising electrically connecting the antenna to the electronic device.
12. The method of claim 1 , wherein disposing the electronic device comprises disposing the electronic device entirely within the cavity of the non-conductive substrate.
13. The method of claim 1 , further comprising forming the cavity in the first major surface of the non-conductive substrate prior to disposing the electronic device at least partially within the cavity.
14. The method of claim 13 , wherein forming the cavity comprises etching the first major surface of the non-conductive substrate.
15. The method of claim 13 , wherein forming the cavity comprises ablating the first major surface of the non-conductive substrate.
16. The method of claim 13 , further comprising polishing at least one of the first major surface or second major surface of the non-conductive substrate prior to forming the cavity in the first major surface of the non-conductive substrate.
17. The method of claim 1 , further comprising forming an internal contact on a recessed surface of the cavity.
18. The method of claim 17 , further comprising electrically connecting the electronic device to the internal contact.
19. The method of claim 1 , further comprising disposing an insulative material within the hermetically-sealed enclosure.
20. The method of claim 1 , wherein the laser bond line surrounds the cavity of the non-conductive substrate.