Display apparatus and method of manufacturing the same
Provided is a display apparatus including a plurality of subpixels and configured to emit light based on each of the plurality of subpixels, the display apparatus including a substrate, a driving layer provided on the substrate and including a driving element which is configured to apply current to the display apparatus, a first electrode electrically connected to the driving layer, a first semiconductor layer provided on the first electrode, an active layer provided on the first semiconductor layer, a second semiconductor layer provided on the active layer, a second electrode provided on the second semiconductor layer, and a reflective layer provided on the second semiconductor layer, wherein light emitted from the active layer resonates between the first electrode and the reflective layer.
1. A display apparatus comprising a plurality of subpixels and configured to emit light based on each of the plurality of subpixels, the display apparatus comprising:
a substrate;
a driving layer provided on the substrate and comprising a driving element which is configured to apply current to the display apparatus;
a first electrode electrically connected to the driving layer;
a first semiconductor layer provided on the first electrode;
an active layer provided on the first semiconductor layer;
a second semiconductor layer provided on the active layer;
a second electrode provided on the second semiconductor layer;
a reflective layer provided on the second electrode opposite to the second semiconductor layer;
an isolation structure isolating the active layer based on each of the plurality of subpixels; and
a current blocking layer provided in the driving layer and corresponding to the isolation structure,
wherein light emitted from the active layer resonates between the first electrode and the reflective layer, and
wherein the reflective layer comprises a distributed Bragg reflector.
2. The display apparatus of claim 1 , wherein the distributed Bragg reflector comprises first layers having a first refractive index and second layers having a second refractive index that are alternately provided, and the first and second layers are provided in two to five pairs.
3. The display apparatus of claim 1 , further comprising a coupling layer provided between the substrate and the driving layer.
4. The display apparatus of claim 1 , wherein the substrate comprises a silicon substrate, a glass substrate, a sapphire substrate, or a silicon substrate coated with silicon oxide.
5. The display apparatus of claim 1 , wherein the driving element comprises a transistor, a thin-film transistor, or a high-electron-mobility transistor (HEMT).
6. The display apparatus of claim 1 , wherein the isolation structure comprises an ion-implanted region.
7. The display apparatus of claim 1 , further comprising a current spreading layer provided between the second semiconductor layer and the reflective layer and between the reflective layer and the second electrode.
8. The display apparatus of claim 1 , further comprising a current spreading layer provided between the second semiconductor layer and the reflective layer and between the second semiconductor layer and the second electrode.
9. The display apparatus of claim 1 , wherein the second electrode comprises a window region in a region facing the active layer, and a width of the active layer is less than a width of the window region.
10. The display apparatus of claim 1 , further comprising a plurality of color conversion layers configured to convert light emitted from the active layer into light having different colors.
11. The display apparatus of claim 1 , wherein the second electrode is transparent and covers the second semiconductor layer.
12. The display apparatus of claim 1 , wherein the second electrode is opaque and comprises a window region configured to transmit light emitted from the active layer.
13. The display apparatus of claim 1 , wherein the substrate and the driving layer form a complementary metal-oxide semiconductor (CMOS) backplane.
14. A method of manufacturing a display apparatus, the method comprising:
forming a first semiconductor layer on an epitaxial substrate;
forming an active layer on the first semiconductor layer;
forming a second semiconductor layer on the active layer;
isolating the active layer based on each of a plurality of subpixels;
forming a first electrode on the second semiconductor layer based on each of the plurality of subpixels;
forming a driving layer which comprises a driving element electrically connected to the first electrode;
removing the epitaxial substrate;
forming a second electrode on the first semiconductor layer;
forming a reflective layer on the second electrode opposite to the first semiconductor layer;
forming an isolation structure isolating the active layer based on each of the plurality of subpixels; and
forming a current blocking layer provided in the driving layer and corresponding to the isolation structure,
wherein the reflective layer comprises a distributed Bragg reflector.
15. The method of claim 14 , wherein the isolation structure comprises an ion-implanted region.
16. The method of claim 14 , wherein the first electrode comprises a reflective material configured to reflect light.
17. The method of claim 14 , further comprising bonding the driving layer to a second substrate by a fusion bonding method or a direct bonding method.
18. The method of claim 17 , wherein the second substrate and the driving layer are formed through a complementary metal-oxide semiconductor (CMOS) backplane manufacturing process, and the driving layer and the first electrode are coupled to each other by a copper damascene method.
19. The method of claim 14 , wherein the second electrode is transparent and covers the first semiconductor layer.
20. The method of claim 14 , wherein the second electrode is opaque, and a window region is formed in the second electrode to transmit light emitted from the active layer.
21. The method of claim 20 , wherein a width of the active layer is less than a width of the window region.
22. The method of claim 14 , further comprising forming a plurality of color conversion layers based on each of the plurality of subpixels, the plurality of color conversion layers being configured to convert light emitted from the active layer into light having different colors.
23. The method of claim 14 , wherein the first electrode faces the active layer.
24. The method of claim 14 , further comprising forming a current spreading layer between the first semiconductor layer and the reflective layer and between the reflective layer and the second electrode.
25. The method of claim 14 , further comprising forming a current spreading layer between the first semiconductor layer and the reflective layer and between the first semiconductor layer and the second electrode.
26. A display apparatus comprising a plurality of subpixels and configured to emit light based on each of the plurality of subpixels, the display apparatus comprising:
a substrate;
a driving layer provided on the substrate and comprising a driving element which is configured to apply current to the display apparatus;
a first electrode electrically connected to the driving layer;
a first semiconductor layer provided on the first electrode;
an active layer provided on the first semiconductor layer;
a second semiconductor layer provided on the active layer;
a second electrode provided on the second semiconductor layer;
a reflective layer provided on the second electrode opposite to the second semiconductor layer;
an isolation structure isolating the active layer based on each of the plurality of subpixels;
a current blocking layer provided in the driving layer and corresponding to the isolation structure; and
a current spreading layer provided between the second semiconductor layer and the reflective layer and between the reflective layer and the second electrode,
wherein light emitted from the active layer resonates between the first electrode and the reflective layer, and
wherein the reflective layer comprises a distributed Bragg reflector.