Enhancement of yield of functional microelectronic devices
Described herein are techniques related to a semiconductor fabrication process that facilitates the enhancement of systemic conformities of patterns of the fabricated semiconductor wafer. A semiconductor wafer with maximized systemic conformities of patterns will maximize the electrical properties and/or functionality of the electronic devices formed as part of the fabricated semiconductor wafer. This Abstract is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.
1. A method that facilitates yield of functional microelectronic devices in coordination with semiconductor fabrication, wherein semiconductor fabrication includes forming a collection of microelectronic devices from layers of a semiconductor wafer, the method comprising:
gathering fabrication metrology data of the semiconductor wafer, wherein the fabrication metrology data includes measurements of one or more characteristics of the wafer formed in the semiconductor fabrication and each measurement being associated with a spatial location of the wafer from where such measurement is made;
generating a wafer scale model of the semiconductor wafer based on the gathered fabrication metrology data of the semiconductor wafer;
based on the generated wafer scale model, detecting non-conformities across all of the semiconductor wafer based on the gathered fabrication metrology data;
identifying a non-conforming region of the semiconductor wafer, wherein the non-conforming region includes an aggregation of neighboring non-conformities; and
determining the systemic impact on the non-conformities in the non-conforming regions on the functionality of the microelectronic devices formed at least in part in the non-conforming region.
2. The method of claim 1 , wherein the gathering of fabrication metrology data includes:
measurements from multiple semiconductor wafers using a common stack of patterns of materials as the layers of the semiconductors being fabricated;
measuring and/or calculating fabrication metrology data selected from a group consisting of edge placement error (EPE); grid critical dimension (CD) measurements; block line width roughness (LWR) measurements; grid LWR measurements; block CD measurements; profile; cross-section; selective deposition; electrical properties of the formed microelectronic devices; contact hole CD; contact hole roughness; CER and ellipticity; short trenches tip-to-tip distance; line tip-to-tip distance; layer-to-layer displacement data; overlay data; film thicknesses and uniformities; measurements that occur after actions of a single tool; measurements that occur after all of the tools of a single layer; measurements that occur after multiple layers; and a combination thereof.
3. The method of claim 1 , wherein a non-conformity is an area of an active layer with characteristics that are capable of being measured and/or where such measurements fall outside a defined range and/or threshold.
4. The method of claim 1 further comprising forming a visualization of the gathered fabrication metrology data of the semiconductor wafer.
5. The method of claim 4 , wherein the formation of the visualization includes producing an image of the wafer with particular colors and/or shading that corresponds to particular locations of the wafer associated with measured and/or calculated range of fabrication metrology data.
6. The method of claim 4 , wherein the formation of the visualization includes producing an image of the wafer with particular colors and/or shading that corresponds to particular locations of the wafer associated with the non-conforming region.
7. A non-transitory computer-readable storage medium comprising instructions that when executed cause a processor of a computing device to perform operations in coordination with semiconductor fabrication by forming a collection of microelectronic devices from layers of a semiconductor wafer, the operations comprising:
gathering fabrication metrology data of the semiconductor wafer, wherein the fabrication metrology data includes measurements of one or more characteristics of the wafer formed in the semiconductor fabrication and each measurement being associated with a spatial location of the wafer from where such measurement is made;
generating a wafer scale model of the semiconductor wafer based on the gathered fabrication metrology data of the semiconductor wafer;
based on the generated wafer scale model, detecting non-conformities across all of the semiconductor wafer based on the gathered fabrication metrology data;
identifying a non-conforming region of the semiconductor wafer, wherein the non-conforming region includes an aggregation of neighboring non-conformities; and
determining the systemic impact on the non-conformities in the non-conforming regions on the functionality of the microelectronic devices formed at least in part by the non-conforming region.
8. The non-transitory computer-readable storage medium of claim 7 further comprising forming a visualization of the gathered fabrication metrology data of the semiconductor wafer.
9. The non-transitory computer-readable storage medium of claim 8 , wherein the formation of the visualization includes producing an image of the wafer with particular colors and/or shading that corresponds to particular locations of the wafer associated with measured and/or calculated range of fabrication metrology data.
10. The non-transitory computer-readable storage medium of claim 8 , wherein the formation of the visualization includes producing an image of the wafer with particular colors and/or shading that corresponds to particular locations of the wafer associated with the non-conforming region.
11. A method comprising:
gathering fabrication metrology data of a semiconductor wafer, wherein the fabrication metrology data includes measurements of one or more characteristics of the wafer formed during fabrication and each measurement being associated with a spatial location of the wafer from where such measurement is made;
generating a model of the semiconductor wafer based on the gathered fabrication metrology data of the semiconductor wafer;
based on the generated model, detecting non-conformities of the semiconductor wafer based on the gathered fabrication metrology data;
forming a fingerprint for the entire semiconductor wafer, the fingerprint being a visualization of the gathered fabrication metrology data of the semiconductor wafer;
identifying a non-conforming region of the semiconductor wafer based on the fingerprint, wherein the non-conforming region includes an aggregation of neighboring non-conformities; and
determining the systemic impact on the non-conformities in the non-conforming regions on the functionality of microelectronic devices formed at least in part by the non-conforming region.
12. The method of claim 11 , wherein the formation of the fingerprint includes producing an image of the wafer with particular colors and/or shading that corresponds to particular locations of the wafer associated with measured and/or calculated range of fabrication metrology data.
13. The method of claim 11 , wherein the formation of the fingerprint includes producing an image of the wafer with particular colors and/or shading that corresponds to particular locations of the wafer associated with the non-conforming region.
14. The method of claim 11 , wherein the gathering of fabrication metrology data includes:
measurements from multiple semiconductor wafers using a common stack of patterns of materials as the layers of the semiconductors being fabricated;
measuring and/or calculating fabrication metrology data selected from a group consisting of edge placement error (EPE); grid critical dimension (CD) measurements; block line width roughness (LWR) measurements; grid LWR measurements; block CD measurements; profile; cross-section; selective deposition; electrical properties of the formed microelectronic devices; contact hole CD; contact hole roughness; CER and ellipticity; short trenches tip-to-tip distance; line tip-to-tip distance; layer-to-layer displacement data; overlay data; film thicknesses and uniformities; measurements that occur after actions of a single tool; measurements that occur after all of the tools of a single layer; measurements that occur after multiple layers; and a combination thereof.
15. The method of claim 11 , wherein a non-conformity is an area of an active layer with characteristics that are capable of being measured and/or where such measurements fall outside a defined range and/or threshold.
16. The method of claim 11 , further comprising:
performing a systemic amelioration of the non-conformities in the non-conforming regions based on determining the systemic impact, the systemic amelioration comprising changing an operation in the semiconductor fabrication performed by a semiconductor tool and simulating a semiconductor wafer to be fabricated with the changed operation to determine whether the changes reduce the non-conformities.
17. The method of claim 1 , further comprising:
performing a systemic amelioration of the non-conformities in the non-conforming regions based on determining the systemic impact, the systemic amelioration comprising changing an operation in the semiconductor fabrication performed by a semiconductor tool and simulating a semiconductor wafer to be fabricated with the changed operation to determine whether the changes reduce the non-conformities.
18. The non-transitory computer-readable storage medium of claim 7 , the operations further comprising:
performing a systemic amelioration of the non-conformities in the non-conforming regions based on determining the systemic impact, the systemic amelioration comprising changing an operation in the semiconductor fabrication performed by a semiconductor tool and simulating a semiconductor wafer to be fabricated with the changed operation to determine whether the changes reduce the non-conformities.