Compact emitter design for a vertical-cavity surface-emitting laser
A surface emitting laser may include an isolation layer including a first center portion and a first plurality of outer portions extending from the first center portion, and a metal layer including a second center portion and a second plurality of outer portions extending from the second center portion. The metal layer may be formed on the isolation layer such that a first outer portion, of the second plurality of outer portions, is formed over one of the first plurality of outer portions. The surface emitting laser may include a passivation layer including a plurality of openings. An opening may be formed over the first outer portion. The surface emitting laser may include a plurality of oxidation trenches. An oxidation trench may be positioned at least partially between the first outer portion and a second outer portion of the second plurality of outer portions.
1. A vertical cavity surface emitting laser (VCSEL), comprising:
an isolation layer including a plurality of extended portions along an outer perimeter of the isolation layer;
a dielectric via opening formed on a dielectric layer; and
an oxidation trench being:
positioned along a portion of the outer perimeter of the isolation layer, and
positioned at least partially between a first extended portion of the plurality of extended portions and a second extended portion of the plurality of extended portions.
2. The VCSEL of claim 1 , wherein the oxidation trench is interdigitized with the plurality of extended portions.
3. The VCSEL of claim 1 , wherein the oxidation trench is not shared with a different VCSEL.
4. The VCSEL of claim 1 , wherein the dielectric via opening includes a plurality of connected dielectric via opening portions.
5. The VCSEL of claim 4 , wherein the plurality of connected dielectric via opening portions are connected via at least one arcuate segment between two or more oxidation trenches.
6. The VCSEL of claim 4 , wherein the plurality of connected dielectric via opening portions form a full ring-shape.
7. The VCSEL of claim 4 , wherein the plurality of connected dielectric via opening portions form a partial ring-shape.
8. The VCSEL of claim 1 , wherein the plurality of extended portions along the outer perimeter of the isolation layer are shaped as a cog wheel shape.
9. The VCSEL of claim 1 , further comprising a metal layer formed on the isolation layer.
10. The VCSEL of claim 9 , wherein a radius, associated with the isolation layer, is less than or equal to a radius associated with the metal layer.
11. The VCSEL of claim 1 , further comprising:
an optical aperture to emit a laser beam; and
an oxidation aperture formed by an oxidation layer.
12. The VCSEL of claim 11 , wherein the oxidation layer is located below the optical aperture.
13. The VCSEL of claim 11 , wherein the oxidation trench includes one or more openings that allow oxygen to access an epitaxial layer from which the oxidation layer is formed.
14. The VCSEL of claim 1 , further comprising:
a passivation layer that includes a plurality of openings,
wherein a metal layer is located in each of the plurality of openings.
15. The VCSEL of claim 1 , where the oxidation trench is formed in an irregular shape.
16. The VCSEL of claim 1 , wherein the VCSEL is one of a plurality of VCSELs and the plurality of VCSELs are part of a laser array.
17. The VCSEL of claim 16 , wherein the laser array is a non-grid VCSEL array.