Adhesive layer of seed crystal, method for preparing a laminate using the same, and method for preparing a wafer
An adhesive layer of seed crystal includes a graphitized adhesive layer, wherein the graphitized adhesive layer is prepared by heat-treating a pre-carbonized adhesive layer, and wherein the adhesive layer has Vr value of 28%/mm 3 or more, and the Vr value is represented by Equation 1 below: Vr = { Sq ( V 1 - V 2 ) } × 1 0 3 [ Equation 1 ] where Sg (%) is represented by Equation 2 below, V1 is a volume (mm 3 ) of the pre-carbonized adhesive layer, and V2 is a volume (mm 3 ) of the graphitized adhesive layer, Sg = { 1 - ( A 2 A 1 ) } × 1 0 0 % [ Equation 2 ] where A1 is an area (mm 2 ) of the pre-carbonized adhesive layer, and A2 is an area (mm 2 ) of the graphitized adhesive layer.
1. An adhesive layer comprising a graphitized adhesive layer,
wherein the graphitized adhesive layer is prepared by heat-treating a pre-carbonized adhesive layer,
wherein the adhesive layer has Vr value of 28%/mm 3 or more, and the Vr value is represented by Equation 1 below:
Vr
=
{
Sg
(
V
1
-
V
2
)
}
×
10
3
[
Equation
1
]
where Sg (%) is represented by Equation 2 below, V1 is a volume (mm 3 ) of the pre-carbonized adhesive layer, and V2 is a volume (mm 3 ) of the graphitized adhesive layer,
Sg
=
{
1
-
(
A
2
A
1
)
}
×
100
%
[
Equation
2
]
where A1 is an area (mm 2 ) of the pre-carbonized adhesive layer, and A2 is an area (mm 2 ) of the graphitized adhesive layer, and
wherein the adhesive layer has Vg value of 56% or more, and the Vg value is represented by Equation 3 below:
Vg
=
{
1
-
(
V
2
V
1
)
}
×
100
%
[
Equation
3
]
where V1 is a volume (mm 3 ) of the pre-carbonized adhesive layer, and V2 is a volume (mm 3 ) of the graphitized adhesive layer.
2. The adhesive layer of claim 1 , wherein the Sg value is 8.5% or more.
3. The adhesive layer of claim 1 , wherein the pre-carbonized adhesive layer supports a weight of 1.69 g/cm 2 or more.
4. The adhesive layer of claim 1 , the graphitized adhesive layer supports a weight of 1.97 g/cm 2 or more.
5. The adhesive layer of claim 1 , wherein the pre-carbonized adhesive layer is a coating layer or a film layer having a thickness of 3 μm or more.
6. The adhesive layer of claim 1 , comprising at least one selected from the group consisting of an adhesive resin and a filler.
7. The adhesive layer of claim 6 , wherein the adhesive resin has an actual carbon ratio of 5 to 50 wt %.
8. The adhesive layer of claim 1 , a surface of the pre-carbonized adhesive layer has an area of 7.85×10 3 mm 2 or more, and a surface of the graphitized adhesive layer has an area of 5.50×10 3 mm 2 or more.