Connection between source/drain and gate
A semiconductor device according to the present disclosure includes a gate extension structure, a first source/drain feature and a second source/drain feature, a vertical stack of channel members extending between the first source/drain feature and the second source/drain feature along a direction, and a gate structure wrapping around each of the vertical stack of channel members. The gate extension structure is in direct contact with the first source/drain feature.
1. A semiconductor device, comprising:
a gate extension structure comprising a work function layer and a metal fill layer;
a first source/drain feature and a second source/drain feature disposed over a substrate;
a vertical stack of channel members disposed over the substrate and extending between the first source/drain feature and the second source/drain feature along a direction;
a gate structure wrapping around each of the vertical stack of channel members; and
an isolation structure extending along a sidewall of the gate extension structure,
wherein the isolation structure comprises a fin spacer layer and a dielectric feature disposed over the fin spacer layer,
wherein a portion of the fin spacer layer extends along a sidewall of the dielectric feature,
wherein the work function layer in the gate extension structure is in direct contact with the first source/drain feature and the substrate.
2. The semiconductor device of claim 1 , where the gate extension structure partially extends into the first source/drain feature along the direction.
3. The semiconductor device of claim 1 , further comprising a plurality of inner spacer features disposed on surfaces of the first source/drain feature, wherein the plurality of inner spacer features comprise silicon nitride, silicon oxycarbonitride, silicon carbonitride, silicon oxide, silicon oxycarbide, silicon carbide, or silicon oxynitride.
4. The semiconductor device of claim 3 , wherein the gate extension structure is in direct contact with the plurality of inner spacer features.
5. The semiconductor device of claim 3 , wherein the first source/drain feature comprises an inner layer and an outer layer in direct contact with the inner layer, wherein the gate extension structure is in direct contact with the outer layer, wherein the gate extension structure is spaced apart from the inner layer by the outer layer and the plurality of inner spacer features.
6. The semiconductor device of claim 1 , wherein the gate extension structure is disposed between the first source/drain feature and the isolation structure.
7. The semiconductor device of claim 1 , wherein the fin spacer layer comprises silicon nitride, silicon oxynitride, silicon oxycarbonitride, or silicon carbonitride, wherein the dielectric feature comprises silicon oxide.
8. The semiconductor device of claim 1 , wherein the gate extension structure is in contact with the fin spacer layer, wherein the gate extension structure is spaced apart from the dielectric feature.
9. A static random access memory (SRAM) cell, comprising:
a first pull-up multi-bridge-channel (MBC) transistor and a first pull-down MBC transistor coupled together to form a first inverter;
a second pull-up MBC transistor and a second pull-down MBC transistor coupled together to form a second inverter;
a first pass-gate MBC transistor coupled to an output of the first inverter and an input of the second inverter; and
a second pass-gate MBC transistor coupled to an output of the second inverter and an input of the first inverter,
wherein a first gate electrode of the first pull-down MBC transistor is in direct contact with a first source/drain feature of the second pull-up MBC transistor,
wherein a second gate electrode of the second pull-down MBC transistor is in direct contact with a second source/drain feature of the first pull-up MBC transistor.
10. The SRAM cell of claim 9 , where the first gate electrode of the first pull-down MBC transistor partially extends into the first source/drain feature of the second pull-up MBC transistor.
11. The SRAM cell of claim 9 , wherein the second pull-up MBC transistor further comprises a plurality of inner spacer features disposed on surfaces of the first source/drain feature of the second pull-up MBC transistor.
12. The SRAM cell of claim 11 , wherein the first gate electrode of the first pull-down MBC transistor is in direct contact with the plurality of inner spacer features.
13. The SRAM cell of claim 11 ,
wherein the first source/drain feature of the second pull-up MBC transistor comprises an inner layer and an outer layer,
wherein the first gate electrode of the first pull-down MBC transistor is in direct contact with the outer layer,
wherein the first gate electrode of the first pull-down MBC transistor is spaced apart from the inner layer by the outer layer and the plurality of inner spacer features.
14. The SRAM cell of claim 11 , further comprising:
an isolation structure extending along a sidewall of the first gate electrode,
wherein the first gate electrode is disposed between the first source/drain feature and the isolation structure.
15. A semiconductor structure, comprising:
a plurality of nanostructures;
a source/drain feature adjacent the plurality of nanostructures;
a gate structure wrapping around each of the plurality of nanostructures and extending along a first direction; and
a gate extension structure aligned with the gate structure along the first direction,
wherein the gate structure comprises an interfacial layer, a gate dielectric layer over the interfacial layer, a work function layer over the gate dielectric layer, and a metal fill layer over the work function layer,
wherein the gate extension structure shares the work function layer and the metal fill layer with the gate structure,
wherein the work function layer in the gate extension structure is in direct contact with the source/drain feature such that the gate extension structure is electrically coupled to the source/drain feature.
16. The semiconductor structure of claim 15 , wherein the interfacial layer and the gate dielectric layer do not extend into the gate extension structure.
17. The semiconductor structure of claim 15 , wherein the source/drain feature comprises an inner layer and an outer layer, wherein the gate extension structure is in direct contact with the outer layer but is spaced apart from the inner layer.
18. The semiconductor structure of claim 17 , further comprising:
a plurality of inner spacer features disposed between the source/drain feature and the gate extension structure along a second direction perpendicular to the first direction,
wherein the gate extension structure is spaced apart from the inner layer by the plurality of inner spacer features.
19. The semiconductor structure of claim 15 , wherein the work function layer comprises titanium nitride (TiN), titanium aluminum (TiAl), titanium aluminum nitride (TiAlN), tantalum nitride (TaN), tantalum aluminum (TaAl), tantalum aluminum nitride (TaAlN), tantalum aluminum carbide (TaAlC), tantalum carbonitride (TaCN), or tantalum carbide (TaC).