Pellicle for reflective mask
A pellicle for a reflective mask includes a pellicle body, a pellicle frame below the pellicle body to support the pellicle body, and a pattern structure in at least a part of a surface of the pellicle body, wherein the pattern structure includes a plurality of patterns.
1. A pellicle for a reflective mask, the pellicle comprising:
a pellicle body;
a pellicle frame to support the pellicle body; and
a pattern structure in at least a part of a surface of the pellicle body, the pattern structure being integral to and of a same body as the pellicle body,
wherein the pattern structure comprises a plurality of patterns.
2. The pellicle of claim 1 , wherein the plurality of patterns are over the entire surface of the pellicle body.
3. The pellicle of claim 1 , wherein the plurality of patterns comprise penetration patterns spaced apart from each other and penetrate the pellicle body.
4. The pellicle of claim 1 , wherein the plurality of patterns comprise non-penetration patterns spaced apart from each other and do not penetrate the pellicle body.
5. The pellicle of claim 1 , wherein the plurality of patterns comprise concavo-convex patterns having a plurality of concave patterns and a plurality of convex patterns.
6. The pellicle of claim 5 , wherein the pattern structure further comprises at least one ventilation penetration pattern that penetrates the pellicle body inside the plurality of patterns.
7. The pellicle of claim 5 , wherein the pattern structure further comprises a planarization layer on the concave patterns and the convex patterns while burying the concave patterns.
8. The pellicle of claim 5 , wherein the pattern structure further comprises a curved layer on the concave patterns and the convex patterns and is curved along the concave patterns and the convex patterns.
9. The pellicle of claim 1 , wherein the plurality of patterns comprise at least one type of patterns from among circular patterns, elliptical patterns, and polygonal patterns in a plan view.
10. The pellicle of claim 1 , wherein the plurality of patterns include at least a first pattern and a second pattern, different from one another.
11. A pellicle for a reflective mask, the pellicle comprising:
a pellicle body;
a pellicle frame to support the pellicle body; and
a first pattern structure and a second pattern structure spaced apart from each other on a surface of the pellicle body the first and second pattern structures being integral to and of a same body as the pellicle body,
wherein the first pattern structure comprises a plurality of first patterns spaced apart from each other, and the second pattern structure comprises a plurality of second patterns spaced apart from each other.
12. The pellicle of claim 11 , wherein the plurality of first patterns have different shapes from the plurality of second patterns in a plan view.
13. The pellicle of claim 11 , wherein the plurality of first patterns and the plurality of second patterns comprise at least one type of penetration patterns which penetrate the pellicle body and non-penetration patterns which do not penetrate the pellicle body.
14. The pellicle of claim 13 , wherein the at least one type of penetration patterns are arranged along an edge of the pellicle body, and the non-penetration patterns are placed at a central portion of the pellicle body.
15. The pellicle of claim 11 , wherein the plurality of first and second patterns comprise at least one type of patterns from among circular patterns, elliptical patterns, and polygonal patterns.
16. A pellicle for a reflective mask, the pellicle comprising:
a pellicle body;
a pellicle frame at a periphery of the pellicle body to support the pellicle body and including an upper portion which supports the pellicle body, wherein a width of the upper portion of the pellicle frame is greater than a width of a lower portion of the pellicle frame; and
a pattern structure including a plurality of patterns on the entire surface of the pellicle body,
wherein the plurality of patterns comprise concavo-convex patterns which are configured in the same body as the pellicle body and include a plurality of concave patterns and a plurality of convex patterns.
17. The pellicle of claim 16 , wherein the pattern structure further comprises at least one ventilation penetration pattern penetrating the pellicle body inside the plurality of patterns.
18. The pellicle of claim 16 , wherein the pattern structure further comprises a planarization layer on the concave patterns and the convex patterns.
19. The pellicle of claim 16 , wherein the pattern structure further comprises a curved layer on the concave pattern and the convex patterns.
20. The pellicle of claim 16 , wherein the concavo-convex patterns are configured as sawtooth patterns, ladder patterns, or peak patterns.