Strain gauge and sensor module
The present strain gauge includes a substrate having flexibility; a resistor formed from a material containing at least one of chromium and nickel, on the substrate; a pair of wiring patterns formed on the substrate and electrically connected to both ends of the resistor; and a pair of electrodes formed on the substrate and electrically connected to the pair of wiring patterns, respectively. The wiring patterns include a first layer extending from the resistor, and a second layer having a lower resistance than the first layer and layered on the first layer. On the substrate, an electronic component mounting area is demarcated, on which an electronic component electrically connected to the electrodes is mounted.
1. A strain gauge comprising:
a substrate formed of resin and having flexibility;
a functional layer formed from a metal, an alloy, or a metal compound, the functional layer being situated directly on one surface of the substrate;
a resistor formed from a material containing at least one of chromium and nickel, the resistor being situated on one surface of the functional layer;
a pair of line patterns formed on the one surface of the functional layer and electrically connected to both ends of the resistor; and
a pair of electrodes formed on the one surface of the functional layer, electrodes in the pair of electrodes being electrically connected to line patterns in the pair of line patterns, respectively,
wherein the line patterns include
a first layer extending from the resistor, and
a second layer having a lower resistance than the first layer and layered on the first layer,
wherein on the substrate, an electronic component mounting area is demarcated, on which an electronic component electrically connected to the electrodes is mounted, and
wherein the functional layer is patterned into a same planar shape as the resister.
2. A strain gauge comprising:
a substrate formed of resin and having flexibility;
a functional layer formed from a metal, an alloy, or a metal compound, directly on one surface of the substrate;
a resistor formed as a film that contains Cr, CrN, and Cr 2 N and into which an element contained in the functional layer is diffused, the resistor being situated on one surface of the functional layer;
a pair of line patterns formed on the one surface of the functional layer and electrically connected to both ends of the resistor; and
a pair of electrodes formed on the one surface of the functional layer and electrically connected to the pair of line patterns, respectively,
wherein a gauge factor of the strain gauge is greater than or equal to 10,
wherein the line patterns include
a first layer extending from the resistor, and
a second layer having a lower resistance than the first layer and layered on the first layer,
wherein on the substrate, an electronic component mounting area is demarcated, on which an electronic component electrically connected to the electrodes is mounted, and
wherein the functional layer is patterned into a same planar shape as the resister.
3. A strain gauge comprising:
a substrate formed of resin and having flexibility;
a functional layer formed from a metal, an alloy, or a metal compound, directly on one surface of the substrate;
a resistor formed as a film containing Cr, CrN, and Cr 2 N, on one surface of the functional layer;
a pair of line patterns formed on the one surface of the functional layer and electrically connected to both ends of the resistor; and
a pair of electrodes formed on the one surface of the functional layer and electrically connected to the pair of line patterns, respectively,
wherein the line patterns include
a first layer extending from the resistor, and
a second layer having a lower resistance than the first layer and layered on the first layer,
wherein on the substrate, an electronic component mounting area is demarcated, on which an electronic component electrically connected to the electrodes is mounted, and
wherein the functional layer is patterned into a same planar shape as the resister.
4. The strain gauge as claimed in claim 2 wherein the functional layer contains one or more species of metals selected from among a group consisting of Cr, Ti, V, Nb, Ta, Ni, Y, Zr, Hf, Si, C, Zn, Cu, Bi, Fe, Mo, W, Ru, Rh, Re, Os, Ir, Pt, Pd, Ag, Au, Co, Mn, and Al; an alloy of any of the metals in the group; or a compound of any of the metals in the group.
5. The strain gauge as claimed in claim 2 , wherein the functional layer contains one or more species of metals selected from among a group consisting of Cr, V, Nb, Ta, Ni, Y, Hf, C, Zn, Bi, Fe, Mo, W, Ru, Rh, Re, Os, Ir, Pt, Pd, Ag, Au, Co, and Mn; an alloy of any of the metals in the group; or a compound of any of the metals in the group.
6. The strain gauge as claimed in claim 4 , wherein the functional layer further contains one species of metal compound selected from among a group consisting of TiN, TaN, Si 3 N 4 , TiO 2 , Ta 2 O 5 , and SiO 2 .
7. The strain gauge as claimed in claim 6 , wherein the functional layer further contains one species of metal compound selected from among a group consisting of TiN, TaN, Si 3 N 4 , and Ta 2 O 5 .
8. The strain gauge as claimed in claim 4 , wherein the functional layer further contains one species of alloy selected from among a group consisting of FeCr, TiAl, FeNi, NiCr, and CrCu.
9. The strain gauge as claimed in claim 2 , wherein the functional layer has a function of preventing oxidation of the resistor; a function of controlling movement of oxygen and water contained the substrate toward the resister; and a function of improving adhesion between the substrate and the resistor.
10. The strain gauge as claimed in claim 2 , wherein a thickness of the functional layer is 1 nm to 100 nm.
11. A sensor module comprising:
the strain gauge as claimed in claim 1 ; and
a strain generator provided on another surface side of the substrate.