Optical modulator
An optical modulator is provided with an optical waveguide, an electrode provided opposite to the optical waveguide, and a buffer layer provided between the optical waveguide and the electrode. A main material of the buffer layer is lanthanum fluoride.
1. An optical modulator comprising:
an optical waveguide;
an electrode provided on the optical waveguide; and
a buffer layer provided between the optical waveguide and the electrode,
wherein a main material of the buffer layer is lanthanum fluoride, and
wherein a thickness of the buffer layer is 0.3 μm or more and 3 μm or less.
2. The optical modulator as claimed in claim 1 , wherein the optical waveguide is made of lithium niobate.
3. The optical modulator as claimed in claim 1 , wherein the optical waveguide includes a Mach-Zehnder optical waveguide.
4. The optical modulator, wherein the thickness of the buffer layer is more than 1.0 μm and 3 μm or less.
5. The optical modulator, wherein the thickness of the buffer layer is more than 1.5 μm and 3 μm or less.
6. The optical modulator, wherein the thickness of the buffer layer is more than 2.5 μm and 3 μm or less.