Dual side de-bonding in component carriers using photoablation

1. A system comprising:

a component carrier having a first side, and a second side opposite the first side; and

a light source to couple light into the carrier, wherein the carrier is to propagate, through internal reflection, at least a portion the light to both the first and second sides of the carrier, the portion of light sufficient to release a first component and second component affixed to the first and second sides of the carrier via a first photosensitive layer and second photosensitive layer, respectively.

2. The system of claim 1 , wherein the carrier is transmissive of the light and has a refractive index larger than that of the first and second photosensitive layer.

3. The system of claim 1 , wherein the first photosensitive layer comprises one of:

a photosensitive bond layer to attach the first component to the carrier; or

a layer attached between a transmissive bond layer and the first component, wherein the transmissive bond layer is attached to the carrier.

4. The system of claim 1 , wherein the carrier is transmissive of the light, and the internal reflection is sustained by a refractive index contrast between: a surface of the carrier, and the first and second photosensitive layers.

5. The system of claim 1 , wherein the carrier comprises a glass transmissive of at least a portion of the light from the light source.

6. The system of claim 1 , wherein light source comprises a laser, and is to convey a beam of the light into an edge of the carrier at an angle of incidence sufficient to launch the internal reflection.

7. The system of claim 6 , wherein the carrier comprises an edge bevel, which causes an initial refraction of the light, such that the angle of incidence at a boundary between the carrier and a surface of the first photosensitive layer is sufficient to launch the internal reflection.

8. The system of claim 1 , wherein the light source comprises a laser, and is to convey a beam of the light at a first angle of incidence into a feature at a perimeter of the carrier, the feature to refract the beam from the first angle of incidence into the carrier at a second angle of incidence that supports the internal reflection.

9. The system of claim 1 , wherein the carrier comprises one or more material discontinuities to induce refraction or reflection of the light.

10. The system of claim 9 , wherein individual ones of the material discontinuities comprise fillers in a feature having a different refractive index than the carrier.

11. The system of claim 9 , wherein individual ones of the material discontinuities comprise one or more vias filled with a reflective or refractive material.

12. The system of claim 1 , further comprising at least one:

a rotatable stage to turn the carrier while the light source irradiates a spot on an edge of the carrier;

an array of light emitters to scan the spot along a path that follows the edge of the carrier; or

a plurality of light emitters arrayed to converge upon the edge of the carrier from multiple directions.

13. The system of claim 1 , wherein the light source is to modulate an angle of incidence of the light as a function of time to vary one or more characteristics of the internal reflection.

14. An apparatus comprising:

a carrier having a first side, and a second side opposite the first side;

a first bond layer between a first component and the first side of the carrier; and

a second bond layer between a second component and the second side of the carrier, wherein:

the first and second bond layers comprise a photosensitive material;

the carrier is to propagate light, through internal reflection to both the first and second sides of the carrier; and

the first and second bond layers are to release the first and second components from the carrier subsequent to exposure to the light.

15. The apparatus of claim 14 , wherein the carrier comprises at least one of:

one or more material discontinuities to induce refraction or reflection of the light;

one or more vias filled with a reflective or refractive material; or

a prism to induce refraction or reflection of the light.

16. An apparatus comprising:

a carrier comprising transmissive material, the carrier having a first side, and a second side opposite the first side;

a first photosensitive material on the first side; and

a second photosensitive material on the second side, and

wherein the carrier is to receive light, and propagate, through internal reflection, at least a portion the light to both the first and second sides of the carrier, the portion of light sufficient to release a first component affixed to the carrier by the first photosensitive material and release a second component affixed to the carrier by the second photosensitive material.

17. The apparatus of claim 16 , wherein the carrier has a refractive index larger than that of each of the first and second photosensitive layers.

18. A method comprising:

receiving a first component and a second component attached to respectively a first side and a second side of a component carrier via a first photosensitive layer and a second photosensitive layer, respectively; and

projecting light on the component carrier such that at least a portion of the light is propagated, through internal reflection, to both the first and second sides of the component carrier, to cause a photoablation process in the first and second photosensitive layers.

19. The method of claim 18 , further comprising

de-bonding of the first and second components from the carrier.

20. The method of claim 18 , further comprising processing the first and second components, wherein processing the first and second components comprises forming a first and second semiconductor packages.