Semiconductor device with stacked wirings having respective pitches and ratios therebetween
A semiconductor device is provided. The semiconductor device includes a first-direction plurality of wirings extending in a first direction, and a second-direction plurality of wiring extending in a second direction intersecting the first direction. The first-direction plurality of wirings that extend in the first direction includes gate wirings spaced apart from each other in the second direction by a gate pitch, first wirings above the gate wirings spaced apart from each other in the second direction by a first pitch, second wirings above the first wirings spaced apart from each other in the second direction by a second pitch, and third wirings above the second wirings spaced apart from each other in the second direction by a third pitch. A ratio between the gate pitch and the second pitch is 6:5.
1. A semiconductor device comprising:
a first-direction plurality of wirings extending in a first direction; and
a second-direction plurality of wirings extending in a second direction intersecting the first direction,
the first-direction plurality of wirings that extend in the first direction including,
gate wirings spaced apart from each other in the second direction by a gate pitch,
first wirings above the gate wirings and above a VDD power supply wiring, the first wirings spaced apart from each other in the second direction by a first pitch,
second wirings above the first wirings spaced apart from each other in the second direction by a second pitch, and
third wirings above the second wirings spaced apart from each other in the second direction by a third pitch,
a ratio between the gate pitch, the first pitch, the second pitch, and the third pitch is 6:4:5:9, the ratio based on a least common multiple of the gate pitch, the first pitch, the second pitch, and the third pitch,
the second-direction plurality of wirings including,
the VDD power supply wiring in an interlayer insulating layer,
a connection wiring in the interlayer insulating layer and directly connected to a gate via that is directly connected to one of the gate wirings, and
a VSS power supply wiring in the interlayer insulating layer,
the VDD power supply wiring, the VSS power supply wiring, and the connection wiring placed at a same level in the semiconductor device.
2. The semiconductor device of claim 1 , wherein the second-direction plurality of wirings includes,
fourth wirings spaced apart from each other in the first direction by a fourth pitch, and
fifth wirings above the fourth wirings spaced apart from each other in the first direction by a fifth pitch,
the fourth wirings are above the gate wiring and below the first wiring,
the fifth wirings are above the first wirings and below the second wirings, and
a ratio between the fourth pitch and the fifth pitch is 5:4.
3. The semiconductor device of claim 2 , wherein the second-direction plurality of wirings further includes
sixth wirings above the fifth wirings spaced apart from each other in the first direction by a sixth pitch,
the sixth wirings are above the second wirings and below the third wirings, and
a ratio between the fourth pitch, the fifth pitch, and the sixth pitch is 5:4:6.
4. The semiconductor device of claim 3 , wherein the second-direction plurality of wirings further includes
seventh wires above the sixth wirings spaced apart from each other in the first direction by a seventh pitch,
the seventh wirings are above the third wirings, and
a ratio between the fourth pitch, the fifth pitch, the sixth pitch, and the seventh pitch is 5:4:6:10.
5. The semiconductor device of claim 1 , wherein the second-direction plurality of wirings includes
fourth wirings spaced apart from each other in the first direction by a fourth pitch,
fifth wirings on the fourth wirings spaced apart from each other in the first direction by a fifth pitch, and
sixth wirings above the fifth wirings spaced apart from each other in the first direction by a sixth pitch,
the fourth wirings are above the gate wirings and below the first wirings,
the fifth wirings are above the first wirings and below the second wirings,
the sixth wirings are above the second wirings and below the third wirings, and
a ratio between the fifth pitch and the sixth pitch is 4:6.
6. The semiconductor device of claim 5 , wherein the second-direction plurality of wirings includes
seventh wirings above the sixth wirings spaced apart from each other in the first direction by a seventh pitch,
the seventh wirings are above the third wirings, and
a ratio between the fifth pitch, the sixth pitch, and the seventh pitch is 4:6:10.
7. The semiconductor device of claim 1 , wherein the second-direction plurality of wirings includes,
fourth wirings placed spaced apart from each other in the first direction by a fourth pitch
fifth wirings above the fourth wirings spaced apart from each other in the first direction by a fifth pitch,
sixth wirings above the fifth wirings spaced apart from each other in the first direction by a sixth pitch in the first direction,
seventh wirings above the sixth wirings spaced apart from each other in the first direction by a seventh pitch,
the fourth wirings are above the gate wirings and below the first wirings,
the fifth wirings are above the first wirings and below the second wirings,
the sixth wirings are above the second wirings and below the third wirings,
the seventh wirings are above the third wirings, and
a ratio between the sixth pitch and the seventh pitch is 6:10.
8. The semiconductor device of claim 1 , wherein the VDD power supply wiring, the VSS power supply wiring, and the connection wiring each include a barrier film on bottom surfaces and sidewall surfaces thereof.
9. The semiconductor device of claim 1 , wherein a width in the first direction of the VDD power supply is greater than a width in the first direction of the connection wiring.
10. The semiconductor device of claim 1 , further comprising:
a plurality of active patterns extending in the second direction;
a plurality of source/drain contacts extending in the first direction, at least one of the plurality of source/drain contacts directly contacting at least one of the plurality of active patterns; and
a plurality of source/drain vias, at least one of the plurality of source/drain vias directly contacting the at least one of the plurality of source/drain contacts, wherein
the VDD power supply wiring directly contacts the at least one of the plurality of source/drain vias.
11. The semiconductor device of claim 10 , wherein
at least another one of the plurality of source/drain contacts directly contacts at least another one of the plurality of active patterns,
at least another one of the plurality of source/drain vias directly contacts at least another one of the plurality of source/drain contacts, and
the VSS power supply wiring directly contacts the at least another one of the plurality of source/drain vias.
12. A semiconductor device comprising:
a first-direction plurality of wirings extending in a first direction and including gate wirings; and
a second-direction plurality of wirings extending in a second direction intersecting the first direction,
wherein the second-direction plurality of wirings that extend in the second direction includes,
fourth wirings spaced apart from each other in the first direction by a fourth pitch and in an interlayer insulating layer, at least one of the fourth wirings directly connected to a gate via that is directly connected to one of the gate wirings,
a VDD power supply wiring in the interlayer insulating layer,
a VSS power supply wiring in the interlayer insulating layer,
fifth wirings above the fourth wirings spaced apart from each other in the first direction by a fifth pitch,
sixth wirings above the fifth wirings spaced apart from each other in the first direction by a sixth pitch, and
seventh wirings above the sixth wirings spaced apart from each other in the first direction by a seventh pitch, wherein
a ratio between the fourth pitch, the fifth pitch, the sixth pitch, and the seventh pitch is 5:4:6:10, the ratio based on a least common multiple of the fourth pitch, the fifth pitch, the sixth pitch, and the seventh pitch, and
the VDD power supply wiring, the VSS power supply wiring, and the at least one of the fourth wirings are placed at a same level in the semiconductor device, the same level between the gate wirings and a next-lowest level among levels of the first-direction plurality of wirings.
13. The semiconductor device of claim 12 , wherein the first-direction plurality of wirings includes,
gate wirings spaced apart from each other in the second direction by a gate pitch, and
first wirings above the gate wirings spaced apart from each other in the second direction by a first pitch,
the gate wirings are below the fourth wirings,
the first wirings are above the fourth wirings and placed below the fifth wirings, and
a ratio between the gate pitch and the first pitch is 6:4.
14. The semiconductor device of claim 13 , wherein the first-direction plurality of wirings further includes
second wirings above the first wirings spaced apart from each other in the second direction by a second pitch,
the second wirings are above the fifth wirings and below the sixth wirings, and
a ratio between the gate pitch, the first pitch, and the second pitch is 6:4:5.
15. The semiconductor device of claim 14 , wherein the first-direction plurality of wirings further includes,
third wirings above the second wirings spaced apart from each other in the second direction by a third pitch,
the third wirings are above the sixth wirings and are below the seventh wirings, and
a ratio between the gate pitch, the first pitch, the second pitch, and the third pitch is 6:4:5:9.
16. The semiconductor device of claim 12 , wherein the first-direction plurality of wirings includes
gate wirings spaced apart from each other in the second direction by a gate pitch,
first wirings above the gate wirings spaced apart from each other in the second direction by a first pitch and
second wirings on the first wirings spaced apart from each other in the second direction by a second pitch,
the gate wirings are below the fourth wirings,
the first wirings are above the fourth wirings and below the fifth wirings,
the second wirings are above the fifth wirings and below the sixth wirings, and
a ratio between the first pitch and the second pitch is 4:5.
17. The semiconductor device of claim 16 , wherein the first-direction plurality of wirings further comprises
third wirings above the second wirings spaced apart from each other in the second direction by a third pitch,
the third wirings are above the sixth wirings and are below the seventh wirings, and
a ratio between the first pitch, the second pitch, and the third pitch is 4:5:9.
18. A semiconductor device comprising:
a first-direction plurality of wirings extending in a first direction; and
a second-direction plurality of wirings extending in a second direction that intersects the first direction,
the first-direction plurality of wirings including,
gate wirings spaced apart from each other in the second direction by a gate pitch,
first wirings above the gate wirings spaced apart from each other in the second direction by a first pitch,
second wirings above the first wirings spaced apart from each other in the second direction by a second pitch, and
third wirings above the second wirings spaced apart from each other in the second direction by a third pitch,
the second direction plurality of wirings including,
fourth wirings above the gate wirings and below the first wirings and spaced apart from each other in the first direction by a fourth pitch and in an interlayer insulating layer, at least one of the fourth wirings directly connected to a gate via that is directly connected to one of the gate wirings,
a VDD power supply wiring in the interlayer insulating layer,
a VSS power supply wiring in the interlayer insulating layer,
fifth wirings above the first wirings and spaced apart from each other in the first direction by a fifth pitch,
sixth wirings above the fifth wirings and spaced apart from each other in the first direction by a sixth pitch, and
seventh wirings above the sixth wirings and spaced apart from each other in the first direction by a seventh pitch, wherein
a first ratio between the gate pitch and the first pitch is 6:4, the first ratio based on a least common multiple of the gate pitch, the first pitch, the second pitch, and the third pitch,
a second ratio between the fourth pitch and the fifth pitch is 5:4, the second ratio based on a least common multiple of the fourth pitch, the fifth pitch, the sixth pitch, and the seventh pitch, and
the VDD power supply wiring, the VSS power supply wiring, and the fourth wirings are placed at a same level in the semiconductor device, the same level between the gate wirings and the first wirings.