Hybrid optical phase array and MEMS beamsteering for chip-scale Lidar system

1. A method of detecting an object, comprising:

directing a transmitted light beam generated by a laser along a first direction within a first plane using an optical phase array, wherein the optical phase array oscillates the transmitted light beam through a first angle within the first plane at a first oscillation rate;

receiving the transmitted light beam from the optical phase array at a mirror; and

directing the transmitted light beam along a second direction within a second plane using the mirror, wherein the mirror oscillates the transmitted light beam through a second angle within the second plane at a second oscillation rate that is faster than the first oscillation rate.

2. The method of claim 1 , further comprising

receiving a reflected light beam at the mirror, the reflected light beam being a reflection of the transmitted light beam from the object; and

directing the reflected light beam to the optical phase array via the mirror.

3. The method of claim 2 , wherein the transmitted light beam exits a photonic chip via an aperture and the reflected light beam enters the photonic chip at the aperture.

4. The method of claim 3 , further comprising

directing the reflected light beam at the photonic chip to one or more photodetectors via a circulator; and

detecting a parameter of the object from the reflected light beam at the one or more photodetectors.

5. The method of claim 1 , wherein the mirror is a component of a microelectromechanical (MEMS) scanner, further comprising rotating the mirror about a single axis of rotation to direct the transmitting light beam into the second plane.

6. A Lidar system, comprising:

an optical phase array operable to direct a transmitted light beam generated by a laser along a first direction within a first plane, wherein the optical phase array is configured to oscillate the transmitted light beam through a first angle within the first plane at a first oscillation rate; and

a mirror configured to receive the transmitted light beam from the optical phase array and direct the transmitted light beam along a second direction within a second plane, wherein mirror is configured to oscillate the transmitted light beam through a second angle within the second plane at a second oscillation rate that is faster than the first oscillation rate.

7. The Lidar system of claim 6 , wherein the mirror receives a reflected light beam that is a reflection of the transmitted light beam from an object and directs the reflected light beam to the optical phase array.

8. The Lidar system of claim 7 , further comprising:

one or more photodetectors configured to detect a parameter of the object from the reflected light beam; and

a circulator configured to the direct the reflected light beam to the one or more photodetectors.

9. The Lidar system of claim 6 , wherein the optical phase array is located at an aperture of a photonic chip that includes the laser.

10. The Lidar system of claim 6 , wherein the mirror is a component of a microelectromechanical (MEMS) scanner and rotates about a single axis of rotation to direct the transmitting light beam into the second plane.

11. A vehicle, comprising:

a Lidar system for measuring a parameter of an object, the Lidar system including:

an optical phase array operable to direct a transmitted light beam generated by a laser along a first direction within a first plane, wherein the optical phase array oscillates the transmitted light beam through a first angle within the first plane at a first oscillation rate; and

a mirror configured to receive the transmitted light beam from the optical phase array and direct the transmitted light beam along a second direction within a second plane, wherein the mirror oscillates the transmitted light beam through a second angle within the second plane at a second oscillation rate that is faster than the first oscillation rate.

12. The vehicle of claim 11 , wherein the mirror receives a reflected light beam that is a reflection of the transmitted light beam from the object and directs the reflected light beam to the optical phase array.

13. The vehicle of claim 12 , wherein the Lidar system further comprises:

one or more photodetectors configured to detect the parameter of the object from the reflected light beam; and

a circulator configured to the direct the reflected light beam to the one or more photodetectors.

14. The vehicle claim 11 , wherein the optical phase array is located at an aperture of a photonic chip that includes the laser.

15. The vehicle of claim 11 , wherein the mirror is a component of a microelectromechanical (MEMS) scanner and rotates about a single axis of rotation to direct the transmitting light beam into the second plane.