Treatment liquid, method of manufacturing treatment liquid, pattern forming method, and method of manufacturing electronic device
An object of the present invention is to provide a treatment liquid for manufacturing a semiconductor with which the occurrence of defects is suppressed such that a fine resist pattern or a fine semiconductor element can be manufactured. A treatment liquid for manufacturing a semiconductor according to an embodiment of the present invention includes: one compound (A) or two or more compounds (A) that satisfy the following requirement (a); one compound (B) or two or more compounds (B) that satisfy the following requirement (b); and one compound (C) or two or more compounds (C) selected from the group consisting of an Al compound and an NOx compound. In the treatment liquid, a total content of the compound (A) in the treatment liquid is 70.0 to 99.9999999 mass %, a total content of the compounds (B) is 10 −10 to 0.1 mass %, and a ratio P of the compound (C) to the compound (B) represented by the following Expression I is 10 3 to 10 −6 . Requirement (a): a compound that is selected from the group consisting of an amide compound, an imide compound, and a sulfoxide compound and of which a content in the treatment liquid is 5.0 to 99.9999999 mass % Requirement (b): a compound that is selected from the group consisting of an amide compound having 6 or more carbon atoms, an imide compound, and a sulfoxide compound and of which a content in the treatment liquid is 10 −1 to 0.1 mass % P =[Total Mass of Compound ( C )]/[Total Mass of Compound ( B )] (Expression I)
1. A treatment liquid comprising:
one compound (A) or two or more compounds (A) that satisfy the following requirement (a);
one compound (B) or two or more compounds (B) that satisfy the following requirement (b); and
one compound (C) or two or more compounds (C) selected from the group consisting of an Al compound and an NOx compound,
wherein the total content of the compound (A) in the treatment liquid is 70.0 to 99.9999999 mass %,
the total content of the compound (B) in the treatment liquid is 10 0 to 0.1 mass %,
the ratio P of the compound (C) to the compound (B) represented by the following Expression I is 10 3 to 10 −6 , and
the treatment liquid contains, as the compound (C) or one of the compounds (C), at least an NO 2 compound,
the requirement (a): a compound that is selected from the group consisting of a first amide compound, a first imide compound, and a first sulfoxide compound and of which the content in the treatment liquid is 5.0 to 99.9999999 mass %, provided that if the treatment liquid comprises only one compound (A), the content in the treatment liquid is 70.0 to 99.9999999 mass %,
the requirement (b): a compound that is selected from the group consisting of a second amide compound, said second amide compound being an amide compound having 6 or more carbon atoms, a second imide compound, and a second sulfoxide compound and of which the content in the treatment liquid is 10 −11 to 0.1 mass %, and
P =[Total Mass of Compound ( C )]/[Total Mass of Compound ( B )] Expression I,
wherein the first amide compound is different from the second amide compound, the first imide compound is different from the second imide compound, and the first sulfoxide compound is different from the second sulfoxide compound.
2. The treatment liquid according to claim 1 ,
wherein the content of the one compound (C) or each of the two or more compounds (C) in the treatment liquid is 0.01 mass ppt to 100 mass ppb.
3. The treatment liquid according to claim 1 ,
wherein the treatment liquid further comprises Na, Ca, and Fe, and
the content of each of Na, Ca, and Fe is 0.01 mass ppt to 1000 mass ppb.
4. The treatment liquid according to claim 1 ,
wherein the total content of metal particles measured by a SNP-ICP-MS method is 0.01 mass ppt to 100 mass ppb.
5. The treatment liquid according to claim 1 ,
wherein the total content of metal particles measured by a SNP-ICP-MS method is 1 to 100 mass ppt.
6. The treatment liquid according to claim 1 ,
wherein the total content of metal particles measured by a SNP-ICP-MS method is 1 to 30 mass ppt.
7. The treatment liquid according to claim 1 ,
wherein the total content of metal particles measured by a SNP-ICP-MS method is 3 to 10 mass ppt.
8. The treatment liquid according to claim 1 ,
wherein the ratio Q of the compound (A) to the compound (B) represented by the following Expression II is 10 4 to 10 10 ,
Q =[Total Mass of Compound ( A )]/[Total Mass of Compound ( B )] Expression II.
9. A treatment liquid comprising:
two or more treatment liquids among the treatment liquids according to claim 1 .
10. A treatment liquid comprising:
at least one treatment liquid among the treatment liquids according to claim 1 ; and
at least one organic solvent selected from the group consisting of propylene glycol monomethyl ether acetate, cyclohexanone, and butyl acetate.
11. The treatment liquid according to claim 1 ,
wherein the treatment liquid is a peeling liquid.
12. The treatment liquid according to claim 1 ,
wherein the treatment liquid is a developer.
13. The treatment liquid according to claim 1 ,
wherein the treatment liquid is a rinsing liquid.
14. The treatment liquid according to claim 1 ,
wherein the treatment liquid is a pre-wet liquid.
15. A method of manufacturing the treatment liquid according to claim 1 , the method comprising:
obtaining a crude liquid including the compound (A) by causing one raw material or two or more raw materials to react with each other in the presence of a catalyst so as to synthesize the compound (A); and
purifying the crude liquid.
16. A pattern forming method comprising:
a step of applying an actinic ray-sensitive or radiation-sensitive resin composition to a substrate to form an actinic ray-sensitive or radiation-sensitive film;
a step of exposing the actinic ray-sensitive or radiation-sensitive film; and
a step of treating the substrate or the actinic ray-sensitive or radiation-sensitive film using the treatment liquid according to claim 1 .
17. The pattern forming method according to claim 16 ,
wherein the pattern forming method comprises at least a step of developing the actinic ray-sensitive or radiation-sensitive film by using the treatment liquid as a developer as the step of treating the substrate or the actinic ray-sensitive or radiation-sensitive film using the treatment liquid.
18. The pattern forming method according to claim 16 ,
wherein the pattern forming method comprises at least a step of cleaning the actinic ray-sensitive or radiation-sensitive film by using the treatment liquid as a rinsing liquid as the step of treating the substrate or the actinic ray-sensitive or radiation-sensitive film using the treatment liquid.
19. The pattern forming method according to claim 16 ,
wherein the pattern forming method comprises at least a step of treating the substrate by using the treatment liquid as a pre-wet liquid as the step of treating the substrate or the actinic ray-sensitive or radiation-sensitive film using the treatment liquid.
20. The pattern forming method according to claim 16 ,
wherein the treatment liquid dissolves the exposed actinic ray-sensitive or radiation-sensitive film, dipped in the treatment liquid, at a dissolution rate of 0.0016 to 3.33 nm/sec at 23° C.
21. A method of manufacturing an electronic device comprising:
the pattern forming method according to claim 16 .
22. A method of manufacturing an electronic device comprising:
a step of applying an actinic ray-sensitive or radiation-sensitive resin composition to a substrate to form an actinic ray-sensitive or radiation-sensitive film;
a step of exposing the actinic ray-sensitive or radiation-sensitive film;
a step of developing the exposed actinic ray-sensitive or radiation-sensitive film to form a pattern;
a step of etching the substrate by using the pattern as a mask; and
a step of peeling the pattern by using the treatment liquid according to claim 1 as a peeling liquid.
23. The treatment liquid according to claim 1 , wherein the compound (C) is an NO 2 compound.
24. The treatment liquid according to claim 1 , wherein there are at least two compounds (C), and, in addition to at least one being an NO 2 compound, at least one is an Al compound.
25. A treatment liquid comprising:
one compound (A) or two or more compounds (A) that satisfy the following requirement (a);
one compound (B) or two or more compounds (B) that satisfy the following requirement (b); and
one compound (C) or two or more compounds (C) selected from the group consisting of an Al compound and an NOx compound,
wherein the total content of the compound (A) in the treatment liquid is 70.0 to 99.9999999 mass %,
the total content of the compound (B) in the treatment liquid is 10 −10 to 0.1 mass %, provided that if the treatment liquid comprises only one compound (B), the total content of the compound (B) in the treatment liquid is 10 −10 to 10 −5 mass %, and
the ratio P of the compound (C) to the compound (B) represented by the following Expression I is 10 3 to 10 −6 ,
the requirement (a): a compound that is selected from the group consisting of a first amide compound, a first imide compound, and a first sulfoxide compound and of which the content in the treatment liquid is 5.0 to 99.9999999 mass %, provided that if the treatment liquid comprises only one compound (A), the content in the treatment liquid is 70.0 to 99.9999999 mass %,
the requirement (b): a compound that is selected from the group consisting of a second amide compound, a second imide compound, and a second sulfoxide compound and of which the content in the treatment liquid is 10 −10 to 10 −5 mass %, and
P =[Total Mass of Compound ( C )]/[Total Mass of Compound ( B )] Expression I,
wherein the first amide compound is different from the second amide compound, the first imide compound is different from the second imide compound, and the first sulfoxide compound is different from the second sulfoxide compound.
26. The treatment liquid according to claim 25 , wherein the second amide compound is an amide compound having 6 or more carbon atoms.
27. The treatment liquid according to claim 25 , wherein the treatment liquid comprises, as the compound (C), at least an NO 2 compound.
28. The treatment liquid according to claim 25 , wherein the compound (A) is dimethyl sulfoxide or N-methylpyrrolidone.
29. A treatment liquid comprising:
one compound (A) or two compounds (A) that satisfy the following requirement (a);
one compound (B) or two or more compounds (B) that satisfy the following requirement (b); and
one compound (C) or two or more compounds (C) selected from the group consisting of an Al compound and an NOx compound, wherein the total content of the compound (A) in the treatment liquid is 70.0 to 99.9999999 mass %,
the total content of the compound (B) in the treatment liquid is 10 −10 to 0.1 mass %,
the ratio P of the compound (C) to the compound (B) represented by the following Expression I is 10 3 to 10 −6 , and
the treatment liquid contains, as the compound (C) or one of the compounds (C), at least an NO 2 compound,
the requirement (a): a compound that is selected from the group consisting of a first amide compound which is N-methylpyrrolidone and a first sulfoxide compound which is dimethyl sulfoxide and of which the content in the treatment liquid is 5.0 to 99.9999999 mass %, provided that if the treatment liquid comprises only one compound (A), the content in the treatment liquid is 70.0 to 99.9999999 mass %,
the requirement (b): a compound that is selected from the group consisting of a second amide compound, an imide compound, and a second sulfoxide compound and of which the content in the treatment liquid is 10 −11 to 0.1 mass %, and
P =[Total Mass of Compound ( C )]/[Total Mass of Compound ( B )] Expression I,
wherein the first amide compound N-methylpyrrolidone is different from the second amide compound, and the first sulfoxide compound dimethyl sulfoxide is different from the second sulfoxide compound.