Photo-detecting apparatus with subpixels
A photo-detecting apparatus is provided. The photo-detecting apparatus includes at least one pixel, and each pixel includes N subpixels, wherein each of the subpixels comprises a detection region, two first conductive contacts, wherein the detection region is between the two first conductive contacts, wherein N is a positive integer and is ≥2.
1. A photo-detecting apparatus, comprises:
a pixel comprising:
N subpixels, wherein each of the subpixels comprises a detection region and two first conductive contacts, wherein the detection region is between the two first conductive contacts, and
wherein N is a positive integer and is ≥2; and
an isolation region surrounding the detection regions of the N subpixels,
wherein, in cross-section through the pixel, a minimum width between the first conductive contacts of two adjacent subpixels is less than a width of the isolation region.
2. The photo-detecting apparatus according to claim 1 , wherein each of the subpixels further comprises two second conductive contacts, wherein the detection region is between the two second conductive contacts.
3. The photo-detecting apparatus according to claim 2 , wherein each of the subpixels further includes two first doped regions under the respective first conductive contact.
4. The photo-detecting apparatus according to claim 3 , wherein each of the subpixels further includes two second doped regions under the respective two second conductive contact, and each of the second doped regions is of a second conductivity type different from a first conductivity type of each of the first doped regions.
5. The photo-detecting apparatus according to claim 1 , wherein the pixel further includes an absorption region, wherein the detection regions of the N subpixels are in the same absorption region.
6. The photo-detecting apparatus according to claim 5 , wherein a minimum width between the first conductive contacts of the two adjacent subpixels is less than a width of the absorption region from a cross-sectional view of the photo-detecting apparatus.
7. The photo-detecting apparatus according to claim 4 , wherein the pixel further includes an absorption region, wherein the first doped regions and the second doped regions of the N subpixels are in the same absorption region.
8. The photo-detecting apparatus according to claim 7 , wherein the pixel further comprises a blocking layer surrounding the absorption region, wherein the blocking layer is of a conductivity type different from a first conductivity type of each of the first doped regions.
9. The photo-detecting apparatus according to claim 1 , wherein the isolation region is outside of the absorption region and physically separated from the absorption region.
10. The photo-detecting apparatus according to claim 3 , wherein the pixel further comprises a third doped region between two adjacent subpixels of the N subpixels, and the third doped region is separated from the first doped regions of the two adjacent subpixels, wherein the third doped region is of a conductivity type different from the first conductivity type.
11. The photo-detecting apparatus according to claim 4 , wherein one of the subpixels further comprise a counter-doped region overlapped with a portion of one of the first doped regions of the subpixel, wherein the counter-doped region is of a conductivity type different from the first conductivity type.
12. The photo-detecting apparatus according to claim 2 , wherein the pixel comprises 2N readout circuits and 2N control signals, two of the readout circuits are electrically coupled to the respective first conductive contact of one of the subpixels, and two of the control signals circuits are electrically coupled to the respective second conductive contacts of one of the subpixels.
13. The photo-detecting apparatus according to claim 1 , wherein the pixel comprises a common readout circuit electrically to one of the first conductive contacts of one of the subpixels and one of the first conductive contacts of another one of the subpixels.
14. The photo-detecting apparatus according to claim 2 , wherein the pixel comprises a common control signal electrically to one of the second conductive contacts of one of the subpixels and one of the second conductive contacts of another one of the subpixels.
15. The photo-detecting apparatus according to claim 1 , wherein the photo-detecting apparatus further comprises multiple optical elements over the respective subpixel.
16. A photo-detecting apparatus, comprising:
a first pixel and a second pixel adjacent to the first pixel, wherein each of the first pixel and the second pixel comprises:
N detection regions;
2N first conductive contacts each coupled to one of the detection regions; and
2N second conductive contacts each coupled to one of the detection regions,
wherein N is a positive integer and is ≥2; and
an isolation region between the first pixel and the second pixel,
wherein, in cross-section through the photo-detecting apparatus, a minimum width between one of the 2N first conductive contacts of the first pixel and one of the 2N first conductive contacts of the second pixel is less than a width of the isolation region.
17. An imaging system comprising:
a transmitter unit configured to emit light; and
a receiver unit comprising an image sensor comprising:
a photo-detecting apparatus, comprising:
a plurality of pixels, wherein each of the pixels comprises:
N subpixels, wherein each of the subpixels comprises a detection region and two first conductive contacts, wherein the detection region is between the two first conductive contacts and the detection region is configured to absorb photons having a wavelength, and to generate photo-carriers from the absorbed photons, wherein N is a positive integer and is ≥2; and
an isolation region surrounding the detection regions of the N subpixels,
wherein, in cross-section through the pixel, a minimum width between the first conductive contacts of the two adjacent subpixels is less than a width of the isolation region.
18. The imaging system of claim 17 , further comprising a processing unit capable of processing the photo-carriers generated by the receiver unit.