IP Library › Granted Patent US 1,148,718
Granted Patent S1
US 1,148,718 · App. 29/865,404 · Granted Sep 22, 2026

Vented susceptor

Inventors: Uday Kiran Rokkam (San Diego, CA); Sam Kim (Chandler, AZ); Saket Rathi (Tempe, AZ); Dakai Bian (Tempe, CA)
Assignee: ASM IP Holding B.V.
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Quick Facts
Patent No.
US 1,148,718
App. No.
29/865,404
Granted
Sep 22, 2026
Kind
S1
Claims (1)

The ornamental design for a vented susceptor, as shown and described.

Continuity (2)
Division 29782159 · May 4, 2021
Division 29677173 · Jan 17, 2019
References Cited (191)
US 3407783A · Capita · 1968 [cited by applicant]
US 3549847A · Clark et al. · 1970 [cited by applicant]
US 3641974A · Yamada et al. · 1972 [cited by applicant]
US 3796182A · Rosler · 1974 [cited by applicant]
US 4499354A · Hill et al. · 1985 [cited by applicant]
US 4522149A · Garbis et al. · 1985 [cited by applicant]
US 4560420A · Lord · 1985 [cited by applicant]
US 4710428A · Tamamizu et al. · 1987 [cited by applicant]
US 4821674A · deBoer et al. · 1989 [cited by applicant]
US 4958061A · Wakabayashi et al. · 1990 [cited by applicant]
US 4978567A · Miller · 1990 [cited by applicant]
US 4986215A · Yamada et al. · 1991 [cited by applicant]
US 4990374A · Keeley et al. · 1991 [cited by applicant]
US 5033407A · Mizuno et al. · 1991 [cited by applicant]
US 5044943A · Bowman et al. · 1991 [cited by applicant]
US 5071670A · Kelly · 1991 [cited by applicant]
US 5074017A · Toya et al. · 1991 [cited by applicant]
US 5098198A · Nulman et al. · 1992 [cited by applicant]
US 5108792A · Anderson et al. · 1992 [cited by applicant]
US 5119540A · Kong et al. · 1992 [cited by applicant]
US 5119541A · Ohmi et al. · 1992 [cited by applicant]
US 5121531A · Severns et al. · 1992 [cited by applicant]
US 5156820A · Wong et al. · 1992 [cited by applicant]
US 5188501A · Tomita et al. · 1993 [cited by applicant]
US 5199483A · Bahng · 1993 [cited by applicant]
US 5200157A · Toya et al. · 1993 [cited by applicant]
US 5242501A · McDiarmid · 1993 [cited by applicant]
US 5292554A · Sinha et al. · 1994 [cited by applicant]
US 5298465A · Levy · 1994 [cited by applicant]
US 5304248A · Cheng et al. · 1994 [cited by applicant]
US 5306699A · Eddy · 1994 [cited by applicant]
US 5308645A · Zachman et al. · 1994 [cited by applicant]
US 5332442A · Kubodera et al. · 1994 [cited by applicant]
US 5343938A · Schmidt · 1994 [cited by applicant]
US 5354715A · Wang et al. · 1994 [cited by applicant]
US 5356486A · Sugarman et al. · 1994 [cited by applicant]
US 5370739A · Foster et al. · 1994 [cited by applicant]
US 5383971A · Selbrede · 1995 [cited by applicant]
US 5393349A · Ohkase · 1995 [cited by applicant]
US 5403401A · Haafkens et al. · 1995 [cited by applicant]
US 5421893A · Perlov · 1995 [cited by applicant]
US 5427620A · deBoer et al. · 1995 [cited by applicant]
US 5444217A · Moore et al. · 1995 [cited by applicant]
US 5455069A · Lee · 1995 [cited by applicant]
US 5456757A · Aruga et al. · 1995 [cited by applicant]
US 5461214A · Peck et al. · 1995 [cited by applicant]
US 5467220A · Xu · 1995 [cited by applicant]
US 5492566A · Sumnitsch · 1996 [cited by applicant]
US 5514439A · Sibley · 1996 [cited by applicant]
US 5516367A · Lei et al. · 1996 [cited by applicant]
US 5527393A · Sato et al. · 1996 [cited by applicant]
US 5549756A · Sorensen et al. · 1996 [cited by applicant]
US 5551985A · Brors et al. · 1996 [cited by applicant]
US 5558717A · Zhao et al. · 1996 [cited by applicant]
US 5584936A · Pickering et al. · 1996 [cited by applicant]
US 5588827A · Muka · 1996 [cited by applicant]
US 5620525A · van de Ven et al. · 1997 [cited by applicant]
US 5645646A · Beinglass et al. · 1997 [cited by applicant]
US 5656093A · Burkhart et al. · 1997 [cited by applicant]
US 5683518A · Moore et al. · 1997 [cited by applicant]
US 5690742A · Ogata et al. · 1997 [cited by applicant]
US 5700725A · Hower et al. · 1997 [cited by applicant]
US 5738165A · Imai · 1998 [cited by applicant]
US 5761023A · Lue et al. · 1998 [cited by applicant]
US 5800622A · Takemi et al. · 1998 [cited by applicant]
US 5803977A · Tepman et al. · 1998 [cited by applicant]
US 5834737A · Hirose et al. · 1998 [cited by applicant]
US D404370S · Kimura · 1999 [cited by applicant]
US 5895530A · Shrotriya et al. · 1999 [cited by applicant]
US 5938850A · Arami et al. · 1999 [cited by applicant]
US 5960159A · Ikeda et al. · 1999 [cited by applicant]
US 6001183A · Gurary et al. · 1999 [cited by applicant]
US 6020212A · Mathis · 2000 [cited by applicant]
US 6068441A · Raaijmakers et al. · 2000 [cited by applicant]
US 6077357A · Rossman et al. · 2000 [cited by applicant]
US 6086680A · Foster et al. · 2000 [cited by applicant]
US 6090212A · Mahawili · 2000 [cited by applicant]
US 6093252A · Wengert et al. · 2000 [cited by applicant]
US 6167834B1 · Wang et al. · 2001 [cited by applicant]
US 6293749B1 · Raaijmakers et al. · 2001 [cited by applicant]
US 6325858B1 · Wengert et al. · 2001 [cited by applicant]
US 6331023B1 · Goodwin et al. · 2001 [cited by applicant]
US 6343183B1 · Halpin et al. · 2002 [cited by applicant]
US 6394797B1 · Sugaya et al. · 2002 [cited by applicant]
US 6402850B1 · Beinglass et al. · 2002 [cited by applicant]
US 6464790B1 · Sherstinsky et al. · 2002 [cited by applicant]
US 6608287B2 · Halpin et al. · 2003 [cited by applicant]
US 6634882B2 · Goodman · 2003 [cited by applicant]
US 6709267B1 · Hawkins et al. · 2004 [cited by applicant]
US D496008S · Takahashi et al. · 2004 [cited by applicant]
US 6893507B2 · Goodman et al. · 2005 [cited by applicant]
US 7033445B2 · Keeton et al. · 2006 [cited by applicant]
US D525127S · Cogley et al. · 2006 [cited by applicant]
US D600223S · Aggarwal et al. · 2009 [cited by applicant]
US 7601224B2 · Foree · 2009 [cited by applicant]
US 7602224B2 · Foree · 2009 [cited by applicant]
US 7648579B2 · Goodman et al. · 2010 [cited by applicant]
US 7722441B2 · Goela et al. · 2010 [cited by applicant]
US 7740703B2 · Hasegawa et al. · 2010 [cited by applicant]
US 8088225B2 · Goodman et al. · 2012 [cited by applicant]
US 8287648B2 · Reed et al. · 2012 [cited by applicant]
US 8366830B2 · Nakamura et al. · 2013 [cited by applicant]
US 8394229B2 · Aggarwal et al. · 2013 [cited by applicant]
US 8801857B2 · Aggarwal et al. · 2014 [cited by applicant]
US D743357S · Vyne · 2015 [cited by applicant]
US 9558985B2 · Wang et al. · 2017 [cited by applicant]
US D784276S · Tiner et al. · 2017 [cited by applicant]
US 9633889B2 · Cuvalci et al. · 2017 [cited by applicant]
US 10068791B2 · Parsey, Jr. et al. · 2018 [cited by applicant]
US D830981S · Jeong · 2018 [cited by examiner]
US 10242890B2 · Volfovski et al. · 2019 [cited by applicant]
US 10269614B2 · Chu et al. · 2019 [cited by applicant]
US 10376916B2 · Ranish et al. · 2019 [cited by applicant]
US D864134S · Watarai et al. · 2019 [cited by applicant]
US D914620S · Rokkam et al. · 2021 [cited by applicant]
US 11018047B2 · Rokkam et al. · 2021 [cited by applicant]
US D920936S · Rokkam et al. · 2021 [cited by applicant]
US 11261525B2 · Yudovsky et al. · 2022 [cited by applicant]
US D958764S · Rokkam · 2022 [cited by examiner]
US 11530480B2 · Yudovsky et al. · 2022 [cited by applicant]
US 11764101B2 · Rathi · 2023 [cited by examiner]
US 11961756B2 · Rokkam · 2024 [cited by examiner]
US D1030687S · Huang · 2024 [cited by examiner]
US D1052547S · Suzuki · 2024 [cited by examiner]
US D1067204S · Huang · 2025 [cited by examiner]
US 12278129B2 · Ganguli · 2025 [cited by examiner]
US 20020011211A1 · Halpin · 2002 [cited by applicant]
US 20020043337A1 · Goodman et al. · 2002 [cited by applicant]
US 20030000472A1 · Lim et al. · 2003 [cited by applicant]
US 20030049580A1 · Goodman · 2003 [cited by applicant]
US 20040040632A1 · Oosterlaken · 2004 [cited by examiner]
US 20040060512A1 · Waldhauer et al. · 2004 [cited by applicant]
US 20040229002A1 · Davis et al. · 2004 [cited by applicant]
US 20050092439A1 · Keeton et al. · 2005 [cited by applicant]
US 20050284372A1 · Murugesh et al. · 2005 [cited by applicant]
US 20060057826A1 · De Boer · 2006 [cited by applicant]
US 20090280248A1 · Goodman et al. · 2009 [cited by applicant]
US 20100031884A1 · Aggarwal et al. · 2010 [cited by applicant]
US 20100107974A1 · Givens et al. · 2010 [cited by applicant]
US 20130109192A1 · Hawkins · 2013 [cited by examiner]
US 20140251542A1 · Parsey, Jr. · 2014 [cited by examiner]
US 20160002778A1 · Ravi et al. · 2016 [cited by applicant]
US 20160068996A1 · Lau et al. · 2016 [cited by applicant]
US 20160133504A1 · Chu et al. · 2016 [cited by applicant]
US 20160369398A1 · Yudovsky et al. · 2016 [cited by applicant]
US 20170175265A1 · Shah et al. · 2017 [cited by applicant]
US 20180094350A1 · Verghese et al. · 2018 [cited by applicant]
US 20190355612A1 · Sakurai · 2019 [cited by applicant]
US 20200234996A1 · Rokkam et al. · 2020 [cited by applicant]
US 20200373187A1 · Singu et al. · 2020 [cited by applicant]
US 20210125853A1 · Rathi et al. · 2021 [cited by applicant]
US 20220162748A1 · Yudovsky et al. · 2022 [cited by applicant]
CN 102308362 · 2012 [cited by applicant]
CN 103733327 · 2014 [cited by applicant]
CN 106463365 · 2017 [cited by applicant]
EP 0339279 · 1989 [cited by applicant]
EP 0448346 · 1991 [cited by applicant]
EP 0445596 · 1991 [cited by applicant]
EP 0634785 · 1995 [cited by applicant]
EP 0669640 · 1995 [cited by applicant]
EP 0766289 · 1997 [cited by applicant]
EP 0840358 · 1998 [cited by applicant]
GB 2181458 · 1987 [cited by applicant]
JP 758039 · 1995 [cited by applicant]
JP 2000269310 · 2000 [cited by applicant]
JP 2002184843 · 2002 [cited by applicant]
JP 2002526915 · 2002 [cited by applicant]
JP 2003124167 · 2003 [cited by applicant]
JP 2006228802 · 2006 [cited by applicant]
JP 2007502022 · 2007 [cited by applicant]
JP D1422195 · 2014 [cited by applicant]
JP D1547357 · 2016 [cited by applicant]
JP D1570747 · 2018 [cited by applicant]
JP D1570748 · 2018 [cited by applicant]
KR 1019990069084 · 1999 [cited by applicant]
KR 19990069091 · 1999 [cited by applicant]
KR 100460338 · 2005 [cited by applicant]
KR 1020070098025 · 2007 [cited by applicant]
KR 1020170054447A · 2017 [cited by applicant]
KR 1020170085548A · 2017 [cited by applicant]
KR 1020180010331A · 2018 [cited by applicant]
KR 3020190032451 · 2020 [cited by examiner]
TW D111900 · 2006 [cited by applicant]
TW D136587 · 2010 [cited by applicant]
TW D184695 · 2017 [cited by applicant]
TW D191199 · 2018 [cited by applicant]
WO WO199630713 · 1996 [cited by applicant]
WO WO199708743 · 1997 [cited by applicant]
WO WO2010016964 · 2010 [cited by applicant]
TaC Coated LED epi susceptor,https://www.semixlab.com/Cvd-tantalum-carbide-tac-coating/tac-coated-led-epi-susceptor,2025. ( Year: 2025). [cited by examiner]
“Shaping the Future in Semiconductor Processing.” Advertisement for Morton International, Inc., Ceramic Solutions. Vol. 73, No. 7, Jul. 1994: advertisements (circa 1993). [cited by applicant]