Patterned anodes for lithium-based energy storage devices

1. A method of making an anode for use in an energy storage device, the method comprising:

providing a current collector comprising a metal layer and a metal oxide layer provided in a first pattern overlaying the metal layer; and

selectively forming by chemical vapor deposition, a continuous porous lithium storage layer overlaying the first pattern of metal oxide, wherein the chemical vapor deposition includes exposing the current collector to at least one lithium storage material precursor gas.

2. The method of claim 1 wherein the lithium storage material precursor gas comprises silane or germane, and the continuous porous lithium storage layer has a total content of silicon, germanium or a combination thereof of at least 40 atomic %.

3. The method of claim 1 , wherein the metal layer comprises stainless steel, titanium, nickel, or copper, or a combination thereof.

4. The method of claim 1 , wherein the metal oxide layer comprises an oxide of nickel, an oxide of copper, an oxide of titanium, or a combination thereof.

5. The method of claim 1 , wherein the metal oxide layer has an average thickness of at least 0.02 μm.

6. The method of claim 1 , further comprising forming by chemical vapor deposition, lithium storage nanowires over the metal layer in one or more areas not occupied by the first pattern of metal oxide, wherein the lithium storage nanowires comprise a metal silicide and amorphous silicon.

7. The method of claim 6 , wherein the lithium storage nanowires are formed in a common step with formation of the continuous porous lithium storage layer.

8. The method of claim 1 , further comprising depositing a functional composition over the metal layer in one or more areas not occupied by the first pattern of metal oxide.

9. The method of claim 8 , wherein the functional composition is further deposited over the continuous porous lithium storage layer.

10. The method of claim 8 , wherein the functional composition is deposited by screen printing, inkjet printing, gravure printing, offset printing, flexographic printing, curtain coating, spray coating, spin coating, or slot die coating.

11. The method of claim 8 , wherein the functional composition comprises silicon-containing particles in a binder matrix.

12. The method of claim 8 , wherein the functional composition comprises an electrically conductive material comprising metal nanowires, metal particles, a conductive polymer, a conductive metal oxide, or combinations thereof.

13. The method of claim 1 , further comprising:

providing an electrically conductive current collector precursor comprising a metal layer; and

forming the first pattern of a first metal oxide layer overlaying the metal layer, thereby forming the current collector.

14. The method of claim 13 , wherein forming the first pattern of a metal oxide comprises oxidation of a surface portion of the metal layer.

15. The method of claim 14 , further comprising: i) forming a patterned resist over a non-patterned metal oxide; ii) etching or dissolving areas of metal oxide not covered by the patterned resist; and iii) and removing the patterned resist.

16. The method of claim 14 , further comprising applying a pattern of an oxidation resistant material prior to oxidation.

17. The method of claim 13 , wherein forming the first pattern of metal oxide comprises depositing a metal oxide or metal oxide precursor over the current collector precursor.

18. The method of claim 17 , further comprising depositing vaporized metal oxide through a shadow mask.

19. The method of claim 17 , further comprising printing the metal oxide precursor over the current collector precursor and treating the printed metal oxide precursor to form the first pattern of metal oxide.

20. The method of claim 17 , further comprising: i) forming a patterned resist over a non-patterned metal oxide; ii) etching or dissolving areas of the metal oxide not covered by the patterned resist; and iii) and removing the patterned resist.