IP Library › Granted Patent US 11,495,724
Granted Patent B2
US 11,495,724 · App. 16/935,078 · Granted Nov 8, 2022

Superconducting structure and device surface termination with alloy

Inventors: Benjamin Wymore (Cortlandt Manor, NY); Christian Lavoie (Pleasantville, NY); Markus Brink (White Plains, NY)
Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
H01L39/025G06N10/00H01L39/125H01L39/223H01L39/2493
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Quick Facts
Patent No.
US 11,495,724
App. No.
16/935,078
Granted
Nov 8, 2022
Kind
B2
Abstract

A method of fabricating a superconductor device includes providing a first metal layer on top of the substrate. An oxidation of a top surface of the first metal layer is rejected. A second metal layer is deposited on top of the second metal layer. A superconducting alloy of the first metal layer and the second metal layer is created between the first metal layer and the second metal layer. There is no oxide layer between the superconducting alloy and the first metal layer.

Claims (51)

1. A superconductor device, comprising:

a substrate;

a first metal layer on top of the substrate;

a second metal layer on top of the first metal layer;

an electrode on top of the second metal layer; and

a superconducting alloy of the first metal layer and the second metal layer between the first metal layer and the second metal layer,

wherein there is no oxide layer between the superconducting alloy and the first metal layer.

2. A superconductor device, comprising:

a substrate;

a first metal layer on top of the substrate;

a second metal layer on top of the first metal layer; and

a superconducting alloy of the first metal layer and the second metal layer between the first metal layer and the second metal layer, wherein:

there is no oxide layer between the superconducting alloy and the first metal layer;

the first metal layer is Niobium (Nb);

the second metal layer is Aluminum (Al); and

the superconducting alloy is Al 3 Nb.

3. The superconductor device of claim 2 , wherein an orientation of crystal grains of the superconducting alloy is substantially aligned with a (002) plane parallel to a surface of the substrate.

4. The superconductor device of claim 1 , wherein the electrode is an electrode of a Josephson Junction.

5. The superconductor device of claim 1 , wherein the superconducting alloy is operative to protect the first metal layer from oxidation or contamination that could affect a performance of the superconductor device.

6. A method of fabricating a superconductor device, comprising:

providing a substrate;

providing a first metal layer on top of the substrate;

rejecting an oxidation of a top surface of the first metal layer;

depositing a second metal layer on top of the first metal layer;

depositing an electrode on top of the second metal layer; and

creating a superconducting alloy of the first metal layer and the second metal layer between the first metal layer and the second metal layer, wherein there is no oxide layer between the superconducting alloy and the first metal layer.

7. The method of claim 6 , further comprising etching away the second metal layer after the creation of the superconducting alloy.

8. The method of claim 6 , wherein the creation of the superconducting alloy comprises annealing the first metal layer and the second superconductor metal at a predetermined temperature.

9. The method of claim 6 , wherein the superconducting alloy creates an electrical path from the first metal layer to the second metal layer.

10. The method of claim 6 , wherein:

the first metal layer is Niobium (Nb);

the second metal layer is Aluminum (Al); and

the superconducting alloy is Al 3 Nb.

11. The method of claim 10 , wherein an orientation of a lattice of the superconducting alloy is (002), (112), or (101), depending on a temperature of an anneal of the first metal layer and the second metal layer.

12. The method of claim 6 , wherein the electrode is an electrode of a Josephson Junction.

13. The method of claim 6 , further comprising:

removing the second metal layer; and

depositing an electrode on top of the superconducting alloy.

14. A method of fabricating a superconductor device, comprising:

providing a substrate;

providing a first metal layer on top of the substrate;

providing an initial oxide layer on a top surface of the first metal layer;

depositing a second metal layer on top of the second metal layer;

creating a superconducting alloy of the first metal layer and the second metal layer between the first metal layer and the second metal layer; and

moving the initial oxide layer to a top surface of the superconducting alloy during the creation of the superconducting alloy, wherein:

the first metal layer is Niobium (Nb);

the second metal layer is Aluminum (Al); and

the superconducting alloy is Al 3 Nb.

15. The method of claim 14 , further comprising:

removing the initial oxide on the top surface of the superconducting alloy and the second metal layer; and

depositing an electrode on top of the superconducting alloy.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 21, 2020
From: WYMORE, BENJAMIN; LAVOIE, CHRISTIAN; BRINK, MARKUS
To: INTERNATIONAL BUSINESS MACHINES CORPORATION
Reel/Frame 053272/0051 →
Continuity (1)
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