Ultrasonic inspection system
An ultrasonic inspection system includes: an ultrasonic sensor including a piezoelectric element and a calibration piece interposed between the piezoelectric element and a subject; and a control device that computes a thickness of the subject, on the basis of a difference between an ultrasonic propagation time of one round trip in the calibration piece and the subject and an ultrasonic propagation time of one round trip in the calibration piece. The calibration piece includes: a propagation portion extending along a surface of the subject, the propagation portion having the piezoelectric element adhering to an end face on one side in a direction in which the propagation portion extends; and a propagation-direction turn portion formed on another side in the direction in which the propagation portion extends, the propagation-direction turn portion having a bottom face in contact with the surface of the subject through a contact medium and an inclined face inclining with respect to a direction vertical to the surface of the subject.
1. An ultrasonic inspection system comprising:
an ultrasonic sensor including: a piezoelectric element configured to perform ultrasonic transmission and reception; and a calibration piece interposed between the piezoelectric element and a subject; and
a control device configured to compute a thickness of the subject, based on a difference between an ultrasonic propagation time of one round trip in the calibration piece and the subject and an ultrasonic propagation time of one round trip in the calibration piece, wherein
the calibration piece includes:
a propagation portion extending along a surface of the subject, the propagation portion having the piezoelectric element adhering to an end face on one side in a direction in which the propagation portion extends; and
a propagation-direction turn portion formed on another side in the direction in which the propagation portion extends, the propagation-direction turn portion having a bottom face in contact with the surface of the subject through a contact medium and an inclined face inclining with respect to a direction vertical to the surface of the subject,
an ultrasonic wave having propagating from the piezoelectric element to the propagation-direction turn portion through the propagation portion, reflects off the inclined face to propagate to the bottom face, and
from the ultrasonic wave having reached the bottom face, a partial ultrasonic wave having reflected off the bottom face and a partial ultrasonic wave having made one round trip in the subject through the bottom face, reflect off the inclined face to propagate to the propagation portion,
the calibration piece is provided such that the ultrasonic propagation time of one round trip in the calibration piece is longer than an ultrasonic propagation time of one round trip in the subject.
2. An ultrasonic inspection system comprising:
an ultrasonic sensor including: a piezoelectric element configured to perform ultrasonic transmission and reception; and a calibration piece interposed between the piezoelectric element and a subject; and
a control device configured to compute a thickness of the subject, based on a difference between an ultrasonic propagation time of one round trip in the calibration piece and the subject and an ultrasonic propagation time of one round trip in the calibration piece, wherein
the calibration piece includes:
a propagation portion extending along a surface of the subject, the propagation portion having the piezoelectric element adhering to an end face on one side in a direction in which the propagation portion extends; and
a propagation-direction turn portion formed on another side in the direction in which the propagation portion extends, the propagation-direction turn portion having a bottom face in contact with the surface of the subject through a contact medium and an inclined face inclining with respect to a direction vertical to the surface of the subject,
an ultrasonic wave having propagating from the piezoelectric element to the propagation-direction turn portion through the propagation portion, reflects off the inclined face to propagate to the bottom face, and
from the ultrasonic wave having reached the bottom face, a partial ultrasonic wave having reflected off the bottom face and a partial ultrasonic wave having made one round trip in the subject through the bottom face, reflect off the inclined face to propagate to the propagation portion,
a plurality of the ultrasonic sensors is provided, and
the respective calibration pieces of the plurality of the ultrasonic sensors are different in the ultrasonic propagation time of one round trip in the calibration piece.