Solid-state imaging device and electronic apparatus
The present technology relates to a solid-state imaging device and an electronic apparatus capable of improving sensitivity while suppressing deterioration of color mixing. The solid-state imaging device includes a substrate, a first photoelectric conversion region in the substrate, a second photoelectric conversion region in the substrate, a trench between the first photoelectric conversion region and the second photoelectric conversion region and penetrates through the substrate, a first concave portion region that has a plurality of concave portions provided on a light receiving surface side of the substrate, above the first photoelectric conversion regions, and a second concave portion region that has a plurality of concave portions provided on the light receiving surface side of the substrate, above the second photoelectric conversion region. The technology of the present disclosure can be applied to, for example, a backside illumination solid-state imaging device and the like.
1. A solid-state imaging device, comprising:
a substrate;
a first photoelectric conversion region in the substrate;
a second photoelectric conversion region adjacent to the first photoelectric conversion region in a cross-sectional view;
a trench between the first photoelectric conversion region and the second photoelectric conversion region, wherein the trench penetrates through the substrate;
a first concave portion region that has a plurality of concave portions on a light receiving surface side of the substrate, above the first photoelectric conversion region;
a second concave portion region that has a plurality of concave portions on the light receiving surface side of the substrate, above the second photoelectric conversion region; and
a pinning layer on the first concave portion region and the second concave portion region, wherein the pinning layer is not disposed in the trench.
2. The solid-state imaging device according to claim 1 , wherein an insulating film is in the trench.
3. The solid-state imaging device according to claim 1 , wherein the trench is filled with a metal material.
4. The solid-state imaging device according to claim 2 , wherein the pinning layer is stacked between the substrate and the insulating film.
5. The solid-state imaging device according to claim 2 , wherein an antireflection film is stacked between the substrate and the insulating film.
6. The solid-state imaging device according to claim 1 , wherein
the first concave portion region is at a central portion of a first pixel, the central portion of the first pixel is a region of a specific ratio to a first pixel region.
7. The solid-state imaging device according to claim 1 , wherein
the first concave portion region is at a central portion of a first pixel, the central portion of the first pixel is a region of 80% of a first pixel region.
8. The solid-state imaging device according to claim 1 , wherein a flat portion of a specific width, in which each of the first concave portion region and the second concave portion region is not formed, is between pixels on the light receiving surface side.
9. An electronic apparatus, comprising:
a solid-state imaging device including:
a substrate;
a first photoelectric conversion region in the substrate;
a second photoelectric conversion region adjacent to the first photoelectric conversion region in a cross-sectional view;
a trench between the first photoelectric conversion region and the second photoelectric conversion region, wherein the trench penetrates through the substrate;
a first concave portion region that has a plurality of concave portions on a light receiving surface side of the substrate, above the first photoelectric conversion region;
a second concave portion region that has a plurality of concave portions on the light receiving surface side of the substrate, above the second photoelectric conversion region; and
a pinning layer on the first concave portion region and the second concave portion region, wherein the pinning layer is not disposed in the trench.