Resonance device
A resonance device with improved precision of temperature control. The resonance device includes a platform; a resonator including a vibrator and one or more holding arms that connect the vibrator and the platform to each other such that a first groove is provided around the vibrator. Moreover, the resonance device includes a sensor with a measurement portion that measures temperature and a heater formed on the platform. A second groove is provided between the measurement portion and the heater.
1. A resonance device comprising:
a platform;
a resonator including a vibrator and at least one first holding arm that connects the vibrator to the platform such that a first groove extends around the vibrator;
a sensor including a measurement portion configured to measure temperature; and
at least one heater disposed on the platform,
wherein a second groove extends between the measurement portion and the at least one heater,
wherein the resonator is disposed adjacent to the measurement portion of the sensor, such that the resonator does not overlap the sensor of the measurement portion in a direction normal to a main surface of the vibrator.
2. The resonance device according to claim 1 , wherein the sensor further includes at least one second holding arm that connects the measurement portion to the platform such that the second groove extends around the measurement portion.
3. The resonance device according to claim 2 , wherein the at least one first holding arm and the at least one second holding arm are disposed adjacent to the heater.
4. The resonance device according to claim 2 , wherein the at least one first holding arm and the at least one second holding arm comprise a same number of respective holding arms as each other.
5. The resonance device according to claim 2 , wherein the vibrator and the at least one first holding arm collectively have a shape that is analogous to a collective shape of the measurement portion and the at least one second holding arm.
6. The resonance device according to claim 2 , wherein the vibrator and the at least one first holding arm collectively have a shape that is congruent to a collective shape of the measurement portion and the at least one second holding arm.
7. The resonance device according to claim 1 , wherein the resonator has an identical thermal time constant as the sensor.
8. The resonance device according to claim 1 , wherein the resonator has an identical thermal capacity and thermal resistance as the sensor.
9. The resonance device according to claim 1 , wherein the first groove is disposed between the resonator and the platform to form a gap therebetween, such that the first groove completely surrounds the resonator except where the at least one first holding arm connects the resonator to the platform.
10. The resonance device according to claim 9 , wherein the second groove is disposed between the measurement portion and the platform to form a gap therebetween, such that the second groove completely surrounds the measurement portion except where the at least one second holding arm connects the measurement portion to the platform.
11. The resonance device according to claim 1 , wherein the measurement portion is a region extending around a thin-film resistance and has a rectangular contour that extends in a width and length direction of the platform.
12. The resonance device according to claim 1 , wherein the platform comprises a rectangular shape and the at least one heater comprises a pair of heaters extending parallel to respective opposing sides of the platform.
13. The resonance device according to claim 12 , wherein the resonator and the sensor are symmetrically disposed relative to each other and between the pair of heaters.
14. The resonance device according to claim 12 , wherein the at least one first holding arm extends in a direction perpendicular to a lengthwise direction of the pair of heaters.
15. A resonance device comprising:
a platform;
a resonator including a vibrator and a pair of first holding arms that connect the vibrator to the platform with a first groove extending around the vibrator;
a temperature sensor including a pair of second holding arms that connect the temperature sensor to the platform with a second groove extending around the temperature sensor; and
at least one heater disposed on the platform,
wherein the second groove is disposed between the temperature sensor and the at least one heater to reduce heat conductance to the temperature sensor,
wherein the resonator is disposed adjacent to the temperature sensor, such that the resonator does not overlap the temperature sensor in a direction normal to a main surface of the vibrator.
16. The resonance device according to claim 15 , wherein the vibrator and the pair of first holding arms collectively have a shape that is analogous to a collective shape of the temperature sensor and the pair of second holding arms.
17. The resonance device according to claim 15 , wherein the vibrator and the pair of first holding arms collectively have a shape that is congruent to a collective shape of the temperature sensor and the pair of second holding arms.
18. The resonance device according to claim 15 , wherein the resonator has an identical thermal time constant as the temperature sensor.
19. The resonance device according to claim 15 , wherein the resonator has an identical thermal capacity and thermal resistance as the temperature sensor.
20. The resonance device according to claim 15 , wherein the temperature sensor comprises a measurement portion that is a region extending around a thin-film resistance and has a rectangular contour that extends in a width and length direction of the platform.