Pivotable substrate retaining ring
A carrier head includes a base assembly, a substrate mounting surface connected to the base assembly, and a plurality of segments disposed circumferentially around the substrate mounting surface to provide a retaining ring to surround a substrate mounted on the substrate mounting surface. An inner surface of each of the plurality of segments is configured to engage the substrate, and each segment of the plurality of segments of the retaining ring is pivotally connected to the base assembly such that a lower portion of each segment of the retaining ring is swingable toward and away from the substrate.
1. A carrier head, comprising:
a base assembly;
a substrate mounting surface connected to the base assembly; and
a plurality of segments disposed circumferentially around the substrate mounting surface to provide a retaining ring to surround a substrate mounted on the substrate mounting surface, wherein an inner surface of each of the plurality of segments is configured to engage the substrate, and wherein each segment of the plurality of segments of the retaining ring is independently pivotally connected to the base assembly such that a lower portion of each segment of the retaining ring is swingable toward and away from the substrate, wherein each segment of the plurality of segments of the retaining ring is pivotally connected by a pivot pin that extends collinearly with an axis of rotation of the segment.
2. The carrier head of claim 1 , wherein the retaining ring includes four to twenty segments.
3. The carrier head of claim 1 , comprising an actuator to cause the segments of the retaining ring to pivot.
4. The carrier head of claim 3 , wherein the actuator is a motor, piston, hydraulic arm, spring, bellow or bladder.
5. The carrier head of claim 1 , wherein pivot pins extend from side walls of the segment into receiving recesses in the base assembly.
6. The carrier head of claim 1 , wherein pivot pins extend from receiving recesses in the base assembly into side walls of the segment.
7. A carrier head, comprising:
a base assembly;
a substrate mounting surface connected to the base assembly;
a plurality of segments disposed circumferentially around the substrate mounting surface to provide a retaining ring to surround a substrate mounted on the substrate mounting surface, wherein an inner surface of each of the plurality of segments is configured to engage the substrate, and wherein each segment of the plurality of segments of the retaining ring is independently pivotally connected to the base assembly such that a lower portion of each segment of the retaining ring is swingable toward and away from the substrate; and
an actuator to cause the segments of the retaining ring to pivot, wherein the actuator is configured to engage outer surfaces of the segments of retaining ring.
8. The carrier head of claim 7 , wherein the actuator is configured to apply a lateral force on the outer surfaces of the segments of the retaining.
9. The carrier head of claim 1 , wherein the segments of the retaining ring are spring-loaded to be held in an unclamped position.