Condenser and semiconductor processing machine
A condenser and semiconductor processing machine, relating to the art of semiconductor equipment. The condenser 100 includes a sealed cavity; wherein, a gas passage is provided in the sealed cavity; cooling liquid is filled around the gas passage; a gas inlet, a gas outlet, and a liquid outlet are provided on the sealed cavity, the gas inlet is communicated with the inlet of the gas passage, the gas outlet is communicated with the outlet of the gas passage, and the liquid outlet is communicated with the gas passage; the gas passage is a Tesla valve structure passage.
1. A condenser, comprising:
a sealed cavity;
a gas passage provided inside the sealed cavity, cooling liquid is filled around the gas passage; and
a gas inlet, a gas outlet and a liquid outlet provided on the sealed cavity,
the gas inlet is connected to an inlet of the gas passage, the gas outlet is connected to an outlet of the gas passage, and the liquid outlet is connected to the gas passage; wherein:
the gas passage is a Tesla valve structure passage,
the sealed cavity comprises a first cavity and a second cavity hermetically connected,
a plurality of protrusions are arranged at intervals in the first cavity,
a holding chamber is provided in the second cavity, and
the plurality of protrusions are embedded in the holding chamber to form the Tesla valve structure passage.
2. A condenser according to claim 1 , wherein the plurality of protrusions are staggered on both sides of a centerline of the Tesla valve structure passage.
3. A condenser according to claim 1 , wherein the protrusions comprise a first end and a second end;
a longitudinal cross-sectional area of the first end is smaller than a longitudinal cross-sectional area of the second end;
the first end is disposed toward the outlet of the Tesla valve structure passage.
4. A condenser according to claim 1 , wherein the protrusions are filled with the cooling liquid.
5. A condenser according to claim 1 , wherein the second cavity further comprises a housing, the holding chamber is provided in the housing, and the cooling liquid is filled between walls of the holding chamber and the housing.
6. A condenser according to claim 1 , wherein the first and second cavities are each provided with a cooling water inlet and a cooling water outlet.
7. A condenser according to claim 1 , wherein
the first cavity is an upper cavity, and the second cavity is a lower cavity;
the gas inlet and the gas outlet are provided on the first cavity;
the liquid outlet is provided on the second cavity.
8. A condenser according to claim 1 , wherein the protrusions are hermetically connected to a bottom wall of the holding chamber.
9. A semiconductor processing machine, comprising a photoresist vapor outlet, an exhaust gas outlet, a reservoir, and a condenser according to claim 1 ;
the photoresist vapor outlet is connected to an gas inlet of the condenser;
the exhaust gas outlet is connected to the gas outlet of the condenser;
the liquid outlet of the condenser is connected to the reservoir.