Force sensor
The present invention provides a force sensor that is capable of detecting plastic deformation of a strain element. The force sensor detects components, in a plurality of directions, of a force exerted on the strain element. The force sensor includes: inspection strain gauges disposed in stress concentration areas of the strain element; and an inspection bridge circuit that includes the inspection strain gauges and that is configured to detect a component, in a specific direction, of a stress that occurs in the strain element.
1. A force sensor for detecting components, in a plurality of directions, of a force exerted on a strain element, the force sensor comprising:
an inspection circuit that includes inspection strain sensing elements disposed in stress concentration areas of the strain element and that is configured to detect a component, in a specific direction, of a stress that occurs in the strain element; and
a circuit or a processor configured to determine whether or not there is plastic deformation of the strain element by comparing (i) a threshold corresponding to a stress that causes plastic deformation to occur in any one or more of the stress concentration areas when an external force in the specific direction is applied to the strain element and (ii) the component of the stress detected by the inspection circuit.
2. The force sensor according to claim 1 , wherein the stress concentration areas, where the inspection strain sensing elements are disposed, are each constituted by (i) an area where a stress that occurs in the strain element when an external force in any of the plurality of directions is applied to the strain element is maximum and (ii) a vicinity of the area.
3. The force sensor according to claim 1 , further comprising a circuit or a processor, the circuit or the processor being configured to determine whether or not there is plastic deformation of the strain element by comparing the component of the stress detected by the inspection circuit and a predetermined threshold, the predetermined threshold corresponding to a stress that occurs in the specific direction in any one or more of the stress concentration areas when a predetermined force is applied to the strain element in its normal state.
4. The force sensor according to claim 1 , wherein the plurality of directions are the following six directions: directions parallel to respective three orthogonal axes; and directions of rotation about the respective three orthogonal axes.
5. The force sensor according to claim 1 , wherein the strain element includes: a core portion configured to receive a force; a frame portion fixed to the core portion; an arm portion that connects the core portion and the frame portion; and a flexure that resides between the frame portion and the arm portion.