Method of manufacturing semiconductor devices and corresponding semiconductor device
Semiconductor dice are arranged on a substrate such as a leadframe. Each semiconductor die is provided with electrically-conductive protrusions (such as electroplated pillars or bumps) protruding from the semiconductor die opposite the substrate. Laser direct structuring material is molded onto the substrate to cover the semiconductor dice arranged thereon, with the molding operation leaving a distal end of the electrically-conductive protrusion to be optically detectable at the surface of the laser direct structuring material. Laser beam processing the laser direct structuring material is then performed with laser beam energy applied at positions of the surface of the laser direct structuring material which are located by using the electrically-conductive protrusions optically detectable at the surface of the laser direct structuring material as a spatial reference.
1. A method, comprising:
arranging at least one semiconductor die on a substrate wherein the at least one semiconductor die is provided with at least one electrically-conductive protrusion protruding from the at least one semiconductor die opposite said substrate;
molding a laser direct structuring material onto the substrate having the at least one semiconductor die arranged thereon with the at least one semiconductor die having said at least one electrically-conductive protrusion protruding therefrom opposite said substrate, wherein said molding leaves a distal end of said at least one electrically-conductive protrusion optically detectable at a surface of the laser direct structuring material; and
laser beam processing the laser direct structuring material molded onto the substrate having at least one semiconductor die arranged thereon to provide electrically conductive formations for the at least one semiconductor die arranged on said substrate, wherein said laser beam processing comprises:
optically detecting said distal end of said at least one electrically-conductive protrusion; and
applying laser beam energy to the surface of said laser direct structuring material at spatial positions located as a function of the optically detected distal end of said at least one electrically-conductive protrusion in order to produce said electrically conductive formations at said spatial positions;
wherein applying laser beam energy comprises displacing and operating a laser guided by the optically detected distal end of said at least one electrically-conductive protrusion to produce the electrically conductive formations.
2. The method of claim 1 , wherein said at least one electrically-conductive protrusion protruding from the at least one semiconductor die opposite said substrate comprises an electrically-conductive pillar.
3. The method of claim 1 , wherein said at least one electrically-conductive protrusion protruding from the at least one semiconductor die opposite said substrate comprises an electrically-conductive bump.
4. The method of claim 1 , wherein said at least one electrically-conductive protrusion protruding from the at least one semiconductor die opposite said substrate comprises an electroplated protrusion.
5. The method of claim 1 , wherein said at least one electrically-conductive protrusion comprises copper material.
6. The method of claim 1 , wherein molding further comprises forming a holding layer to retain said distal end of said at least one electrically-conductive protrusion.
7. The method of claim 1 , further comprising directing laser beam energy towards said distal end of said at least one electrically-conductive protrusion to provide electrical coupling thereof to said electrically conductive formations for the at least one semiconductor die arranged on said substrate.
8. The method of claim 1 , wherein said laser beam processing comprises applying electrically-conductive material onto said spatial positions where said laser beam energy is applied.
9. The method of claim 1 , further comprising providing a plurality of said electrically-conductive protrusions protruding from the at least one semiconductor die opposite said substrate.
10. The method of claim 1 , wherein the substrate is a leadframe.
11. A method, comprising:
arranging at least one semiconductor die on a substrate wherein the at least one semiconductor die is provided with at least one electrically-conductive protrusion protruding from the at least one semiconductor die opposite said substrate;
molding a laser direct structuring material onto the substrate having the at least one semiconductor die arranged thereon with the at least one semiconductor die having said at least one electrically-conductive protrusion protruding therefrom opposite said substrate, wherein said molding leaves a distal end of said at least one electrically-conductive protrusion optically detectable at a surface of the laser direct structuring material; and
laser beam processing the laser direct structuring material molded onto the substrate having at least one semiconductor die arranged thereon to provide electrically conductive formations for the at least one semiconductor die arranged on said substrate, wherein said laser beam processing comprises:
optically detecting said distal end of said at least one electrically-conductive protrusion; and
applying laser beam energy to the surface of said laser direct structuring material at spatial positions located as a function of the optically detected distal end of said at least one electrically-conductive protrusion in order to produce said electrically conductive formations at said spatial positions;
wherein molding further comprises forming a holding layer to retain said distal end of said at least one electrically-conductive protrusion; and
wherein forming the holding layer comprises applying compression molding film material onto said distal end.
12. The method of claim 11 , wherein said at least one electrically-conductive protrusion protruding from the at least one semiconductor die opposite said substrate comprises a structure selected from a group consisting of: an electrically-conductive pillar, an electrically-conductive bump, and an electroplated protrusion.
13. The method of claim 11 , wherein the substrate is a leadframe.
14. A method, comprising:
forming an electrically-conductive protrusion extending from a top surface of a semiconductor die;
mounting a bottom surface of the semiconductor die on a leadframe;
molding a laser direct structuring material onto the leadframe to encapsulate the semiconductor and a portion of the electrically-conductive protrusion such that a distal end of said electrically-conductive protrusion extends above a top surface of the molded laser direct structuring material;
optically detecting said distal end of said electrically-conductive protrusion; and
laser beam processing the laser direct structuring material at spatial positions located as a function of the optically detected distal end of said electrically-conductive protrusion in order to produce electrically conductive formations at said spatial positions;
wherein laser beam processing comprises displacing and operating a laser guided by the optically detected distal end of said electrically-conductive protrusion to produce the electrically conductive formations.
15. The method of claim 14 , wherein forming the electrically-conductive protrusion comprises producing the electrically-conductive protrusion as an electrically-conductive pillar.
16. The method of claim 14 , wherein forming the electrically-conductive protrusion comprises producing the electrically-conductive protrusion as an electrically-conductive bump.
17. The method of claim 14 , wherein forming the electrically-conductive protrusion comprises producing the electrically-conductive protrusion as an electroplated protrusion.
18. The method of claim 14 , wherein said electrically-conductive protrusion is made of copper.
19. The method of claim 14 , wherein molding comprises forming a holding layer configured to retain said distal end of said electrically-conductive protrusion.
20. The method of claim 14 , further comprising directing laser beam energy towards said distal end of said electrically-conductive protrusion to provide electrical coupling of the electrically-conductive protrusion to said electrically conductive formations.
21. The method of claim 14 , further comprising directing laser beam energy towards said spatial positions and applying electrically-conductive material onto said spatial positions where said laser beam energy is directed.
22. A method, comprising:
forming an electrically-conductive protrusion extending from a top surface of a semiconductor die;
mounting a bottom surface of the semiconductor die on a leadframe;
molding a laser direct structuring material onto the leadframe to encapsulate the semiconductor and a portion of the electrically-conductive protrusion such that a distal end of said electrically-conductive protrusion extends above a top surface of the molded laser direct structuring material;
optically detecting said distal end of said electrically-conductive protrusion; and
laser beam processing the laser direct structuring material at spatial positions located as a function of the optically detected distal end of said electrically-conductive protrusion in order to produce electrically conductive formations at said spatial positions;
wherein molding comprises forming a holding layer configured to retain said distal end of said electrically-conductive protrusion; and
wherein the holding layer is a compression molding film.
23. The method of claim 22 , wherein said at least one electrically-conductive protrusion protruding from the at least one semiconductor die opposite said substrate comprises a structure selected from a group consisting of: an electrically-conductive pillar, an electrically-conductive bump, and an electroplated protrusion.