IP Library › Granted Patent US 11,527,454
Granted Patent B2
US 11,527,454 · App. 17/362,185 · Granted Dec 13, 2022

Package structures and methods of forming the same

Inventors: Chen-Hua Yu (Hsinchu, TW); Wen-Hsin Wei (Hsinchu, TW); Chi-Hsi Wu (Hsinchu, TW); Shang-Yun Hou (Jubei, TW); Jing-Cheng Lin (Hsinchu, TW); Hsien-Pin Hu (Zhubei, TW); Ying-Ching Shih (Hsinchu, TW); Szu-Wei Lu (Hsinchu, TW)
Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
H01L23/3114H01L21/486H01L21/561H01L21/563H01L23/147H01L23/16H01L23/481H01L23/49827H01L23/562H01L24/05H01L24/14H01L24/16H01L24/32H01L24/73H01L24/94H01L24/97H01L25/03H01L25/065H01L25/0652H01L25/0655H01L25/0657H01L23/3128H01L23/5389H01L24/13H01L24/29H01L2224/0401H01L2224/13124H01L2224/13144H01L2224/13147H01L2224/13155H01L2224/13164H01L2224/1403H01L2224/14181H01L2224/16145H01L2224/16225H01L2224/16227H01L2224/2919H01L2224/32145H01L2224/32225H01L2224/73204H01L2224/73253H01L2224/81191H01L2224/81192H01L2224/92125H01L2224/92225H01L2224/94H01L2224/97H01L2225/06513H01L2225/06517H01L2225/06541H01L2225/06565H01L2225/06568H01L2225/06586H01L2924/10271H01L2924/1203H01L2924/1304H01L2924/1431H01L2924/1436H01L2924/15311H01L2924/18161H01L2924/3511
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Quick Facts
Patent No.
US 11,527,454
App. No.
17/362,185
Granted
Dec 13, 2022
Kind
B2
Abstract

An embodiment is a method including: attaching a first die to a first side of a first component using first electrical connectors, attaching a first side of a second die to first side of the first component using second electrical connectors, attaching a dummy die to the first side of the first component in a scribe line region of the first component, adhering a cover structure to a second side of the second die, and singulating the first component and the dummy die to form a package structure.

Claims (41)

1. A semiconductor package comprising:

a substrate having a first surface and a second surface opposing the first surface;

a plurality of first pads disposed on the first surface of the substrate and a plurality of second pads disposed on the second surface of the substrate and electrically connected to the plurality of first pads;

a semiconductor chip disposed on the first surface of the substrate and connected to the plurality of first pads;

a dummy chip having a side surface facing one side surface of the semiconductor chip, disposed on the first surface of the substrate spaced apart from the semiconductor chip, the dummy chip having a different height than the semiconductor chip;

an underfill disposed between the semiconductor chip and the first surface of the substrate, and having an extension portion extended along the facing side surfaces of the semiconductor chip and the dummy chip in a direction perpendicular to the first surface of the substrate, an upper end of the extension portion being disposed to be lower than an upper surface of the semiconductor chip; and

an encapsulant material disposed on the first surface of the substrate and on the semiconductor chip and the dummy chip.

2. The semiconductor package according to claim 1 , wherein a bottom surface of the dummy chip is lower than a bottom surface of the semiconductor chip.

3. The semiconductor package according to claim 1 , wherein an adhesive layer is disposed between a bottom surface of the dummy chip and the first surface of the substrate.

4. The semiconductor package according to claim 1 , wherein the encapsulant material covers the extension portion of the underfill.

5. The semiconductor package according to claim 4 , wherein the dummy chip has a thermal expansion coefficient lower than a thermal expansion coefficient of the encapsulant material.

6. The semiconductor package according to claim 1 , wherein the extension portion of the underfill contacts the semiconductor chip.

7. The semiconductor package according to claim 1 , wherein the upper end of the extension portion of the underfill further extends to cover at least a portion of an upper surface of the dummy chip.

8. The semiconductor package according to claim 1 , wherein the encapsulant material covers an upper surface of the dummy chip.

9. The semiconductor package according to claim 1 , wherein the encapsulant material has an upper surface coplanar with upper surfaces of the dummy chip and the semiconductor chip.

10. A semiconductor package comprising:

a substrate having a first surface and a second surface opposing the first surface;

a plurality of first pads disposed on the first surface of the substrate and a plurality of second pads disposed on the second surface of the substrate and electrically connected to the plurality of first pads;

a logic chip disposed on the first surface of the substrate and connected to a first portion of the plurality of first pads;

a memory chip disposed on the first surface of the substrate spaced apart from the logic chip and connected to a second portion of the plurality of first pads, different from the first portion of the plurality of first pads;

a dummy chip disposed on the first surface of the substrate to at least have a side surface facing one side surface of the logic chip, and the dummy chip having a different height than an the logic chip;

an underfill disposed between the logic and memory chips and the first surface of the substrate, and having an extension portion extended along the facing side surfaces of the logic chip and the dummy chip in a direction perpendicular to the first surface of the substrate, an upper end of the extension portion being disposed to be lower than upper surface of the logic chip; and

an encapsulant material disposed on the first surface of the substrate and on the logic chip, the memory chip, and the dummy chip.

11. The semiconductor package according to claim 10 , wherein an adhesive layer is disposed between a bottom surface of the dummy chip and the first surface of the substrate.

12. The semiconductor package according to claim 10 , wherein the logic chip and the memory chip have different heights.

13. The semiconductor package according to claim 10 , wherein the encapsulant material covers an upper surface of the dummy chip.

14. The semiconductor package according to claim 10 , wherein the encapsulant material has an upper surface coplanar with upper surfaces of the dummy chip and the logic chip.

15. The semiconductor package according to claim 10 further comprising:

a cover structure disposed on upper surfaces of the logic chip, the memory chip, and the dummy chip.

16. The semiconductor package according to claim 10 , wherein a level of the extension portion of the underfill contacting the logic chip is lower than an upper surface of the logic chip.

17. The semiconductor package according to claim 10 , wherein the extension portion of the underfill between the logic chip and the memory chip is covered by the encapsulant material.

18. A semiconductor package comprising:

a substrate having a first surface and a second surface opposing the first surface;

a plurality of first pads disposed on the first surface of the substrate and a plurality of second pads disposed on the second surface of the substrate and electrically connected to the plurality of first pads;

a semiconductor chip disposed on the first surface of the substrate and connected to the plurality of first pads;

a plurality of a dummy chips disposed on the first surface of the substrate and surrounding the semiconductor chip, the dummy chips having a different heights than the semiconductor chip;

an underfill disposed between the semiconductor chip and the first surface of the substrate, and having an extension portion extended along facing side surfaces of the semiconductor chip and the dummy chip in a direction perpendicular to the first surface of the substrate, an upper end of the extension portion being disposed to be lower than an upper surface of the semiconductor chip; and

an encapsulant material disposed on the first surface of the substrate and on sealing the semiconductor chip and the dummy chip.

19. The semiconductor package according to claim 18 , wherein the extension portion of the underfill contacts the semiconductor chip.

20. The semiconductor package accordingly to claim 18 further comprising:

a cover structure adhered to an upper surface of the semiconductor chip, the encapsulant material contacting the cover structure.

Continuity (5)
Continuation 17012299 · Sep 4, 2020
Continuation 16215048 · Dec 10, 2018
Continuation 15712987 · Sep 22, 2017
Provisional Application 62242787 · Nov 14, 2016
Related Publication 20210327778A1 · Oct 21, 2021