Diffractive optical element, projection device, and measurement device

1. A diffractive optical element comprising:

a substrate;

a protrusion and recess portion that is formed on one surface of the substrate and imposes predetermined diffraction on incident light; and

an antireflection layer provided between the substrate and the protrusion and recess portion, wherein:

an effective refractive index difference Δn in a wavelength range of the incident light between a first medium constituting a protrusion of the protrusion and recess portion and a second medium constituting a recess of the protrusion and recess portion is 0.70 or more;

an exit angle range θ out of diffraction light exiting from the protrusion and recess portion when the incident light enters the substrate from a normal direction of the substrate is 60° or more; and

total efficiency of diffraction light exiting from the protrusion and recess portion in the exit angle range with respect to a quantity of entire light entering the protrusion and recess portion in the wavelength range of the incident light is 65% or more.

2. The diffractive optical element according to claim 1 , wherein:

the second medium is air; and

an effective refractive index of the first medium in the wavelength range of the incident light is 1.70 or more.

3. The diffractive optical element according to claim 1 , wherein:

the first medium is a multilayer film comprising two or more layers made of two or more materials having different refractive indexes; and

a topmost layer of the protrusion is made of a low-refractive index material among the materials constituting the multilayer film.

4. The diffractive optical element according to claim 1 , wherein the Δn and the θ out satisfy a relationship of Δn/sin(θ out /2)≥1.0.

5. The diffractive optical element according to claim 1 , wherein 0th-order efficiency of the protrusion and recess portion in the wavelength range of the incident light is lower than 3.0%.

6. The diffractive optical element according to claim 5 , wherein a ratio of a light quantity of 0th-order light to a quantity of entire light exiting from the protrusion and recess portion in the wavelength range of the incident light is lower than 1.0%.

7. The diffractive optical element according to claim 1 , wherein:

the exit angle range is smaller than 140°;

0th-order efficiency of the protrusion and recess portion in the wavelength range of the incident light is 0.5% or lower; and

the total efficiency of the diffraction light exiting from the protrusion and recess portion in the exit angle range with respect to the quantity of the entire light entering the protrusion and recess portion in the wavelength range of the incident light is 70% or more.

8. The diffractive optical element according to claim 1 , wherein the first medium is entirely made of an inorganic material.

9. The diffractive optical element according to claim 1 , further comprising, at least between the recess and the antireflection layer, a base portion made of same material as a bottommost layer of the protrusion.

10. The diffractive optical element according to claim 1 , wherein:

the antireflection layer is a dielectric multilayer film; and

reflectance of the antireflection layer for at least particular polarized light in the wavelength range of the incident light, exiting from the element at an angle being ¼ of the exit angle range with respect to a normal direction of the substrate, is 0.5% or less.

11. The diffractive optical element according to claim 1 , wherein reflectance of the antireflection layer for at least particular polarized light in the wavelength range of the incident light, incident on the antireflection layer at 40° or less with respect to a normal direction of the substrate, is 0.5% or less.

12. The diffractive optical element according to claim 1 , wherein:

the incident light is light in at least a part of a wavelength range of 700 nm to 1,200 nm; and

reflectance of the antireflection layer for at least particular polarized light in a wavelength range of 360 nm to 370 nm, incident on the antireflection layer at 20° or less with respect to a normal direction of the substrate, is 1.0% or less.

13. The diffractive optical element according to claim 1 , further comprising a second antireflection layer on a surface of the substrate opposite to the surface on which the protrusion and recess portion is formed.

14. The diffractive optical element according to claim 13 , wherein reflectance of the second antireflection layer for at least particular polarized light in the wavelength range of the incident light, exiting from the element at an angle being ¼ of the exit angle range with respect to a normal direction of the substrate, is 0.5% or less.

15. A projection device comprising:

a light source; and

the diffractive optical element according to claim 1 ,

wherein a ratio of a light quantity of light irradiating a predetermined projection surface to a light quantity of light emitted from the light source is 50% or more.

16. A measurement device comprising:

a projection unit configured to emit inspection light; and

a detection unit configured to detect scattering light generated as a result of irradiation of the inspection light emitted from the projection unit to a measurement target object,

wherein the projection device according to claim 15 is provided as the projection unit.