Fluid control apparatus
A fluid control apparatus includes a block elongated in a longitudinal direction and having a predetermined width, an internal flow channel formed inside the block so as to extend in the longitudinal direction, a first control valve mounted on the block, a second control valve mounted on the block at a position downstream of the first control valve. In the fluid control apparatus, the internal flow channel has a first outflow channel connected to a first outlet of the first control valve through which a fluid flows out thereof and also has a second inflow channel connected to a second inlet of the second control valve through which the fluid flows thereinto. In addition, the first outflow channel and the second inflow channel are disposed so as to overlap each other at one point as viewed in the width direction through the block.
1. A fluid control apparatus, comprising:
a block elongated in a longitudinal direction and having a predetermined width;
an internal flow channel formed inside the block so as to extend in the longitudinal direction;
a first control valve mounted on the block;
a second control valve mounted on the block at a position downstream of the first control valve, wherein
the internal flow channel has
a first outflow channel connected to a first outlet of the first control valve through which a fluid flows out thereof, and
a second inflow channel connected to a second inlet of the second control valve through which the fluid flows thereinto, and
the first outflow channel and the second inflow channel are disposed so as to overlap each other at one point as viewed in the width direction through the block.
2. The fluid control apparatus according to claim 1 , wherein
the block has
a mounting surface on which fluid control instruments are mounted, and
a protrusion protruding to a predetermined extent from the mounting surface, and
one of the first control valve and the second control valve is mounted on the mounting surface.
3. The fluid control apparatus according to claim 2 , wherein
the second control valve is disposed at the protrusion.
4. The fluid control apparatus according to claim 1 , wherein
the first control valve further has a first valve block having a first contact surface to be in contact with a surface of the block and a first inlet through which the fluid flows into the first valve block, wherein the first inlet and the first outlet through which the fluid flows out of the first valve block are open at the first contact surface,
the second control valve further has a second valve block having a second contact surface to be in contact with the surface of the block and a second outlet through which the fluid flows out of the second valve block, wherein the second outlet and the second inlet through which the fluid flows into the second valve block are open at the second contact surface.
5. The fluid control apparatus according to claim 1 , wherein
the first control valve and the second control valve have a width equal to that of the block.
6. The fluid control apparatus according to claim 1 , wherein
the internal flow channel has
a confluent channel through which the fluid coming out of the first control valve and the second control valve flows, and
a second outflow channel that connects between the confluent channel and a second outlet of the second control valve through which the fluid flows out thereof,
a downstream portion of the first outflow channel is connected to the confluent channel,
the fluid control apparatus further comprises
a flow rate sensor that measures a flow rate of the fluid flowing through the confluent channel, and
a fluid controller that controls at least one of the first control valve and the second control valve in response at least to the flow rate measured by the flow rate sensor.
7. The fluid control apparatus according to claim 6 , wherein
the fluid controller has
an opening control unit that controls an opening of one of the first control valve and the second control valve so as to cause the fluid to flow at a target-share flow rate that is determined by dividing a set flow rate by a predetermined number of times, and
a flow rate feedback control unit that controls the other one of the first control valve and the second control valve so as to decrease a deviation between the set flow rate and the flow rate measured by the flow rate sensor.
8. The fluid control apparatus according to claim 7 , wherein
the opening control unit has
a target opening calculation unit that calculates a target opening corresponding to the target-share flow rate on a basis of a pressure of the fluid measured at a position upstream of the first control valve, and
a voltage control unit that applies a voltage corresponding to the target opening to the one of the first control valve and the second control valve.
9. The fluid control apparatus according to claim 7 , wherein
the target-share flow rate is set to be one-half of the set flow rate.
10. The fluid control apparatus according to claim 6 , wherein
the fluid controller has a synchronization control unit that controls an opening of the first control valve and an opening of the second control valve in synchronization with each other.
11. The fluid control apparatus according to claim 10 , wherein
the first control valve and the second control valve are of a same type, and
the synchronization control unit applies an identical voltage to the first control valve and to the second control valve so as to decrease a deviation between a set flow rate and the flow rate measured by the flow rate sensor.
12. The fluid control apparatus according to claim 6 , wherein
the fluid controller has
a flow rate feedback control unit that controls one of the first control valve and the second control valve so as to decrease a deviation between a set flow rate and the flow rate measured by the flow rate sensor,
a valve-abnormality detection unit configured to detect an abnormality in the first control valve and the second control valve, and
a valve-control switching unit that causes the flow rate feedback control unit to control the other one of the first control valve and the second control valve when the valve-abnormality detection unit detects an abnormality in the one of the first control valve and the second control valve that is being controlled by the flow rate feedback control unit.
13. The fluid control apparatus according to claim 12 , wherein
the flow rate feedback control unit initially controls the second control valve, and
the valve-control switching unit causes the flow rate feedback control unit to control the first control valve when the valve-abnormality detection unit detects an abnormality in the second control valve.
14. The fluid control apparatus according to claim 12 , wherein
the valve-abnormality detection unit is configured to detect an abnormality of insulation of the first control valve and the second control valve on a basis of a voltage applied thereto.
15. The fluid control apparatus according to claim 12 , wherein
the valve-abnormality detection unit is configured to detect an abnormality in the first control valve and the second control valve on a basis of an absolute value of a deviation between the set flow rate and the flow rate measured by the flow rate sensor.
16. The fluid control apparatus according to claim 1 , wherein
the internal flow channel has
a first inflow channel connected to a first inlet of the first control valve through which the fluid flows thereinto, and
a before-branch flow channel of which a downstream portion is connected to the first inflow channel and the second inflow channel,
the fluid control apparatus further comprises
a flow rate sensor that measures a flow rate of the fluid flowing through the before-branch flow channel, and
a fluid controller that controls at least one of the first control valve and the second control valve in response at least to the flow rate measured by the flow rate sensor.