Integration of III-V transistors in a silicon CMOS stack
Embodiments disclosed herein include semiconductor devices and methods of forming such devices. In an embodiment the semiconductor device comprises a first semiconductor layer, where first transistors are fabricated in the first semiconductor layer, and a back end stack over the first transistors. In an embodiment the back end stack comprises conductive traces and vias electrically coupled to the first transistors. In an embodiment, the semiconductor device further comprises a second semiconductor layer over the back end stack, where the second semiconductor layer is a different semiconductor than the first semiconductor layer. In an embodiment, second transistors are fabricated in the second semiconductor layer.
1. A semiconductor device, comprising:
a first semiconductor layer, wherein first transistors are fabricated in the first semiconductor layer;
a back end stack over the first transistors, wherein the back end stack comprises a plurality of alternating dielectric layers and layers of conductive traces, and the back end stack comprising conductive vias electrically coupled to the first transistors; and
a second semiconductor layer over the back end stack, wherein the second semiconductor layer is a different semiconductor than the first semiconductor layer, and wherein second transistors are fabricated in the second semiconductor layer, wherein the back end stack is vertically between the first transistors and the second semiconductor layer.
2. The semiconductor device of claim 1 , wherein the first semiconductor layer comprises silicon, and wherein the second semiconductor layer comprises a III-V, III-nitride semiconductor, or antimonide material.
3. The semiconductor device of claim 1 , wherein the second semiconductor layer has a thickness between 10 nm and 50 nm.
4. The semiconductor device of claim 1 , wherein the second transistors are planar transistors.
5. The semiconductor device of claim 1 , further comprising:
a redistribution layer over the second semiconductor layer.
6. The semiconductor device of claim 5 , further comprising:
vias from the redistribution layer to the back end stack, wherein the vias pass through the second semiconductor layer.
7. The semiconductor device of claim 5 , further comprising:
a package substrate coupled to the passivation layer.
8. The semiconductor device of claim 1 , wherein the second transistors are non-planar transistors.
9. The semiconductor device of claim 8 , wherein the second transistors are tri-gate transistors.
10. The semiconductor device of claim 8 , wherein the second transistors are nano-wire transistors.
11. The semiconductor device of claim 1 , wherein second semiconductor layer is bonded to the back end stack by an oxide layer.
12. The semiconductor device of claim 11 , wherein the second semiconductor layer has a footprint that is substantially equal to a footprint of the first semiconductor layer.
13. The semiconductor device of claim 12 , wherein the second semiconductor layer is a layer transferred layer.
14. A computing device, comprising:
a motherboard;
an integrated circuit die coupled to the motherboard, wherein the integrated circuit die, comprises:
a first semiconductor layer, wherein first transistors are fabricated in the first semiconductor layer;
a back end stack over the first transistors, wherein the back end stack comprises a plurality of alternating dielectric layers and layers of conductive traces, and the back end stack comprising conductive vias electrically coupled to the first transistors; and
a second semiconductor layer over the back end stack, wherein the second semiconductor layer is a different semiconductor than the first semiconductor layer, and wherein second transistors are fabricated in the second semiconductor layer, wherein the back end stack is vertically between the first transistors and the second semiconductor layer.
15. The computing device of claim 14 , wherein the computing device is a laptop, a netbook, a notebook, an ultrabook, a smartphone, a tablet, a personal digital assistant (PDA), an ultra mobile PC, a mobile phone, a desktop computer, a server, a printer, a scanner, a monitor, a set-top box, an entertainment control unit, a digital camera, a portable music player, or a digital video recorder.