Solar cell, method for manufacturing solar cell, and solar cell module
A solar cell is provided with: a semiconductor substrate having a light-receiving surface and a non-light-receiving surface; a PN junction section formed on the semiconductor substrate; a passivation layer formed on the light-receiving surface and/or the non-light-receiving surface; and power extraction electrodes formed on the light-receiving surface and the non-light-receiving surface. The solar cell is characterized in that the passivation layer includes an aluminum oxide film having a thickness of 40 nm or less. As a result of forming a aluminum oxide film having a predetermined thickness on the surface of the substrate, it is possible to achieve excellent passivation performance and excellent electrical contact between silicon and the electrode by merely firing the conductive paste, which is conventional technology. Furthermore, an annealing step, which has been necessary to achieve the passivation effects of the aluminum oxide film in the past, can be eliminated, thus dramatically reducing costs.
1. A method of manufacturing a solar cell comprising steps of:
forming an n-type layer on a light receiving surface of a silicon crystal substrate of a p-type;
forming a passivation layer consisting essentially of amorphous aluminum oxide in contact with a p type surface on a non-light receiving surface of the silicon crystal substrate, the passivation layer having a thickness of 1 to 20 nm;
forming a first dielectric film on the passivation layer, a material of which is different from aluminum oxide;
forming a second dielectric film in direct contact with the n type layer in the light receiving surface of the silicon crystal substrate;
printing a first conductive metal paste and a second conductive metal paste, respectively, on the first dielectric film and on the second dielectric film for a first power extraction electrode and a second power extraction electrode, wherein at least one of the first conductive metal paste and the second conductive metal paste contains metal powder and glass frit; and
forming the first extraction electrode and the second extraction electrode by subjecting the first conductive metal paste and the second conductive metal paste to heat treatment wherein the first extraction electrode penetrates through the first dielectric film and the passivation layer to make an electric contact between the first extraction electrode and the p-type surface of the substrate and the second extraction electrode penetrates through the second dielectric film to make an electric contact between the second extraction electrode and the surface of the n-type layer on the light receiving surface of the substrate, and wherein the passivation layer remains to be consisting essentially of amorphous aluminum oxide after the heat treatment.
2. A method of manufacturing a solar cell comprising steps of:
forming a p-type layer on a light receiving surface of a silicon crystal substrate of an n-type;
forming a passivation layer consisting essentially of amorphous aluminum oxide in contact with the p type layer on a light receiving surface of the silicon crystal substrate, the passivation layer having a thickness of 1 to 20 nm;
forming a first dielectric film on the passivation layer, a material of which is different from aluminum oxide;
forming a second dielectric film in direct contact with an n-type surface in a non-light receiving surface of the silicon crystal substrate;
printing a first conductive metal paste and a second conductive metal paste, respectively, on the first dielectric film and on the second dielectric film for a first power extraction electrode and a second power extraction electrode, wherein at least one of the first conductive metal paste and the second conductive metal paste contains metal powder and glass frit; and
forming the first extraction electrode and the second extraction electrode by subjecting the first metal paste and the second conductive metal paste to heat treatment wherein the first extraction electrode penetrates through the first dielectric film and the passivation layer to make an electric contact between the first extraction electrode and the surface of the p-type layer of the substrate and the second extraction electrode penetrates through the second dielectric film to make an electric contact between the second extraction electrode and the n-type surface of the substrate, and wherein the passivation layer remains to be consisting essentially of amorphous aluminum oxide after the heat treatment.
3. The method of manufacturing a solar cell according to claim 1 , wherein both of the first conductive metal paste and the second conductive metal paste contain metal powder and glass frit.
4. The method of manufacturing a solar cell according to claim 2 , wherein both of the first conductive metal paste and the second conductive metal paste contain metal powder and glass frit.
5. The method of manufacturing a solar cell according to claim 1 , wherein a built-in negative charge quantity (C/cm 2 ) in the passivation layer has increased from a value on the order of 10 10 in the state of the passivation layer as formed to a value on the order of 10 12 after the heat treatment, and the conversion efficiency of the solar cell is about 19%.
6. The method of manufacturing a solar cell according to claim 2 , wherein a built-in negative charge quantity (C/cm 2 ) in the passivation layer has increased from a value on the order of 10 10 in the state of the passivation layer as formed to a value on the order of 10 12 after the heat treatment, and the conversion efficiency of the solar cell is about 19%.
7. The method of manufacturing a solar cell according to claim 1 wherein the heat treatment is at from 500 to 820° C. for 1 second to 15 minutes.
8. The method of manufacturing a solar cell according to claim 2 wherein the heat treatment is at from 500 to 820° C. for 1 second to 15 minutes.