Deposition mask assembly for display devices
A deposition mask assembly for manufacturing a plurality of display devices includes a frame having an opening area, a first open mask disposed on the frame and having a first body portion defining a plurality of patterns overlapping the opening area, and a second open mask disposed on the first open mask and having a second body portion defining a plurality of opening portions overlapping the patterns of the first open mask, in which each of the patterns includes an auxiliary pattern spaced apart from the first body portion and a first bridge pattern connecting the first body portion and the auxiliary pattern.
1. A deposition mask assembly comprising:
a frame having an opening area;
a first open mask disposed on the frame, the first open mask having a first body portion defining a plurality of patterns, each of the patterns overlapping the opening area and having an opening through which a deposition material is configured to pass; and
a second open mask disposed on the first open mask, the second open mask having a second body portion defining a plurality of opening portions overlapping the patterns,
wherein each of the patterns comprises an auxiliary pattern within the corresponding opening and spaced apart from the first body portion, and a first bridge pattern connecting the first body portion and the auxiliary pattern,
wherein the first open mask is disposed between the frame and the second open mask, and
wherein a total opening area of the first open mask is less than a total opening area of the second open mask.
2. The deposition mask assembly of claim 1 , wherein the shapes of the first body portion and the second body portion are substantially the same.
3. The deposition mask assembly of claim 1 , wherein the auxiliary pattern has one of a circular shape, an elliptical shape, and a polygonal shape.
4. The deposition mask assembly of claim 1 , wherein the first bridge pattern comprises a plurality of lines.
5. The deposition mask assembly of claim 4 , wherein the lines connected to opposing sides of the auxiliary pattern are disposed along substantially the same imaginary straight line.
6. The deposition mask assembly of claim 5 , wherein each of the patterns further comprises a second bridge pattern parallel to the first bridge pattern.
7. The deposition mask assembly of claim 4 , wherein the lines of the first bridge pattern are substantially parallel to each other.
8. The deposition mask assembly of claim 4 , wherein the lines of the first bridge pattern extend longitudinally in directions that intersect each other.
9. The deposition mask assembly of claim 8 , wherein the first bridge pattern has a lattice shape.
10. The deposition mask assembly of claim 4 , wherein a ratio of a thickness of the second open mask to a width of the first bridge pattern is in a range from about 1:1 to about 1:10.
11. The deposition mask assembly of claim 10 , wherein the second open mask has a thickness in a range from about 50 μm to about 200 μm.
12. The deposition mask assembly of claim 1 , wherein the auxiliary pattern comprises a first auxiliary pattern and a second auxiliary pattern.
13. The deposition mask assembly of claim 12 , wherein the first auxiliary pattern has a size different from a size of the second auxiliary pattern when viewed in plan.
14. The deposition mask assembly of claim 1 , wherein each of the first open mask and the second open mask comprises one of stainless steel (SUS), a nickel steel alloy, nickel (Ni), cobalt (Co), a nickel alloy, and a nickel-cobalt alloy.
15. The deposition mask assembly of claim 14 , wherein the first open mask and the second open mask comprise substantially the same material.
16. The deposition mask assembly of claim 15 , wherein the first open mask and the second open mask are integrally formed.
17. The deposition mask assembly of claim 1 , wherein the auxiliary pattern and the first bridge pattern are formed on the same plane as the first open mask.
18. The deposition mask assembly of claim 1 , wherein the opening of each of the plurality of patterns defined by the first body portion has an area substantially the same in a plan view as an area of each corresponding one of the opening portions defined by the second body portion.
19. The deposition mask assembly of claim 1 , wherein a portion of the first body portion is disposed between the auxiliary patterns of adjacent patterns.
20. A deposition apparatus comprising:
a deposition source;
a deposition mask assembly; and
a display substrate to which the deposition source is deposited, the display substrate having a first area configured not to be deposited with material from the deposition source and a second area configured to be deposited with material from the deposition source,
wherein:
the deposition mask assembly comprises:
a frame having an opening area;
a first open mask disposed on the frame, the first open mask having a plurality of patterns overlapping the opening area and a first body portion surrounding the patterns, each of the patterns overlapping the opening area and having an opening through which the deposition source is configured to pass; and
a second open mask disposed on the first open mask, the second open mask having a plurality of opening portions overlapping the patterns of the first open mask and a second body portion surrounding the opening portions;
each of the patterns comprises:
an auxiliary pattern within the corresponding opening, spaced apart from the first body portion, and overlapping the first area; and
a first bridge pattern connecting the first body portion and the auxiliary pattern, and overlapping the second area;
the first open mask is disposed between the frame and the second open mask; and
a total opening area of the first open mask is less than a total opening area of the second open mask.
21. The deposition apparatus of claim 20 , wherein a ratio of a thickness of the second open mask to a width of the first bridge pattern is in a range from about 1:1 to about 1:10.
22. The deposition apparatus of claim 21 , wherein a portion of the display substrate overlapping the first bridge pattern is configured to be deposited with material from the deposition source.
23. The deposition apparatus of claim 20 , wherein the auxiliary pattern has a width greater than a width of the first bridge pattern.
24. A deposition mask assembly comprising:
a frame having an opening area;
a first open mask disposed on the frame, the first open mask having a first body portion defining a plurality of patterns, each of the patterns overlapping the opening area and having an opening through which a deposition material is configured to pass; and
a second open mask disposed on the first open mask, the second open mask having a second body portion defining a plurality of opening portions overlapping the patterns,
wherein each of the patterns comprises an auxiliary pattern within the corresponding opening and spaced apart from the first body portion, and a first bridge pattern connecting the first body portion and the auxiliary pattern,
wherein no opening is defined in the auxiliary pattern, and
wherein a total opening area of the first open mask is less than a total opening area of the second open mask.
25. The deposition mask assembly of claim 24 , wherein a width of the first bridge pattern is less than a width of the auxiliary pattern.