IP Library › Granted Patent US 11,551,929
Granted Patent B2
US 11,551,929 · App. 17/301,117 · Granted Jan 10, 2023

Method of growing crystalline layers on amorphous substrates using two-dimensional and atomic layer seeds

Inventors: Joshua A. Robinson (Spring Mills, PA); Natalie Briggs (Benton City, WA)
Assignee: THE PENN STATE RESEARCH FOUNDATION
H01L21/02568C30B1/02C30B1/023H01L21/02631
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 11,551,929
App. No.
17/301,117
Granted
Jan 10, 2023
Kind
B2
Abstract

This disclosure relates to methods of growing crystalline layers on amorphous substrates by way of an ultra-thin seed layer, methods for preparing the seed layer, and compositions comprising both. In an aspect of the invention, the crystalline layers can be thin films. In a preferred embodiment, these thin films can be free-standing.

Claims (18)

1. A method of using seed layers to grow a thin film, comprising:

(a) growing or depositing a two-dimensional (2D) layer on a substrate; wherein the two-dimensional (2D) layer comprises one or more group-III chalcogenides (GIIIC);

(b) treating the two-dimensional (2D) layer to form one or more seed layers; wherein the one or more seed layers comprise a Group III nitride; and wherein the one or more seed layers are formed by annealing the two-dimensional (2D) layer in ammonia; and

(c) transforming the one or more seed layers into a thin film.

2. The method of claim 1 , wherein the substrate comprises silicon dioxide (SiO 2 ), silicon (Si), alumina (Al 2 O 3 ), aluminum nitride (AlN), beryllia (BeO), quartz, titanate, ferrite, and/or sapphire.

3. The method of claim 1 , wherein the two-dimensional (2D) layer is deposited on the substrate, and wherein the two-dimensional (2D) layer is obtained by exfoliation, wherein the exfoliation is liquid or mechanical exfoliation.

4. The method of claim 1 , wherein the Group III nitride is GaN or InN.

5. The method of claim 1 , wherein the one or more group-III chalcogenides (GIIIC) comprises gallium selenide (GaSe) and/or indium selenide (InSe).

6. The method of claim 1 , wherein the transforming step comprises conducting epitaxial growth, wherein the epitaxial growth comprises hydride vapor phase epitaxy (HVPE), chemical vapor deposition (MOCVD), plasma enhanced chemical vapor deposition (PECVD), molecular beam epitaxy (MBE), liquid phase exfoliation, and/or remote epitaxy.

7. The method of claim 1 , wherein the two-dimensional (2D) layer is grown on the substrate using powder vaporization (PV).

8. The method of claim 1 , wherein the one or more seed layers have a thickness of less than about 3 nm.

9. The method of claim 1 , wherein the one or more seed layers is a monolayer.

10. The method of claim 9 , wherein the thin film is a single-crystal film.

11. The method of claim 1 , wherein the one or more seed layers is a multilayer.

12. The method of claim 11 , wherein the thin film is a polycrystalline film.

13. The method of claim 1 , wherein the substrate is amorphous.

14. The method of claim 1 , wherein the thin film has a thickness of between about 50 nm to about 5 microns.

15. The method of claim 1 , wherein the method further comprises (d) mechanically exfoliating the thin film providing a free-standing thin film.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 25, 2021
From: ROBINSON, JOSHUA A.; BRIGGS, NATALIE
To: THE PENN STATE RESEARCH FOUNDATION
Reel/Frame 055733/0373 →
Continuity (3)
Continuation PCTUS2019053450 · Sep 27, 2019
Provisional Application 62738846 · Sep 28, 2018
Related Publication 20210217617A1 · Jul 15, 2021