Magnetic tunnel junction structures and methods of manufacture thereof
Embodiments of magnetic tunnel junction (MTJ) structures discussed herein employ seed layers of one or more layer of chromium (Cr), NiCr, NiFeCr, RuCr, IrCr, or CoCr, or combinations thereof. These seed layers are used in combination with one or more pinning layers, a first pinning layer in contact with the seed layer can contain a single layer of cobalt, or can contain cobalt in combination with bilayers of cobalt and platinum (Pt), iridium (Ir), nickel (Ni), or palladium (Pd), The second pinning layer can be the same composition and configuration as the first, or can be of a different composition or configuration. The MTJ stacks discussed herein maintain desirable magnetic properties subsequent to high temperature annealing.
1. A magnetic tunnel junction stack comprising:
a buffer layer comprising a plurality of sublayers, wherein each sublayer of the plurality of sublayers comprises Co x Fe y B z , tantalum (Ta), tantalum nitride (TaN), or combinations thereof;
a seed layer formed on the buffer layer, the seed layer comprising chromium (Cr);
a first pinning layer in direct contact with the seed layer, the first pinning layer comprising at least one bilayer, the at least one bilayer comprising:
a first interlayer formed from cobalt (Co); and
a second interlayer formed from platinum (Pt), iridium (Ir), nickel (Ni), or palladium (Pd); and
a second pinning layer formed over the first pinning layer, wherein the buffer layer, the seed layer, the first pinning layer and the second pinning layer form a portion of the magnetic tunnel junction stack.
2. The stack of claim 1 , further comprising:
a magnetic reference layer formed over the second pinning layer;
a tunnel barrier layer formed over the magnetic reference layer;
a magnetic storage layer formed over the tunnel barrier layer;
a coupling layer in direct contact with the first pinning layer and the second pinning layer; and
a structure blocking layer in direct contact with the second pinning layer.
3. The stack of claim 1 , wherein each sublayer of the buffer layer has a thickness between about 1 Å and about 60 Å.
4. The stack of claim 1 , wherein the seed layer comprises nickel chromium (NiCr), iron nickel chromium (NiCrFe), ruthenium chromium (RuCr), iridium chromium (IrCr), cobalt chrome (CoCr), or a combination thereof.
5. The stack of claim 4 , wherein the seed layer comprises a plurality of sublayers, and wherein each sublayer of the seed layer comprises nickel chromium (NiCr), iron nickel chromium (NiCrFe), ruthenium chromium (RuCr), iridium chromium (IrCr), or cobalt chrome (CoCr).
6. The stack of claim 1 , wherein the seed layer has a thickness of about 100 Å or less.
7. The stack of claim 6 , wherein the seed layer has a thickness between about 30 Å and about 60 Å.
8. A magnetic tunnel junction stack comprising:
a buffer layer comprising a plurality of sublayers, wherein each sublayer comprises Co x Fe y B z , tantalum (Ta), tantalum nitride (TaN), or combinations thereof;
a seed layer formed in direct contact with the buffer layer, the seed layer comprising chromium (Cr);
a first pinning layer in direct contact with the seed layer, the first pinning layer comprising at least one bilayer, the at least one bilayer comprising:
a first interlayer comprising cobalt (Co); and
a second interlayer comprising platinum (Pt), iridium (Ir), nickel (Ni), or palladium (Pd);
a second pinning layer formed over the first pinning layer, the second pinning layer comprising at least one bilayer;
a magnetic reference layer formed over the second pinning layer;
a tunnel barrier layer formed over the magnetic reference layer; and
a magnetic storage layer formed over the tunnel barrier layer.
9. The stack of claim 8 , wherein the seed layer is nickel chromium (NiCr), iron nickel chromium (NiCrFe), ruthenium chromium (RuCr), iridium chromium (IrCr), cobalt chrome (CoCr), or a combination thereof.
10. The stack of claim 8 , wherein each sublayer of the buffer layer has a thickness between about 1 Å and about 60 Å.
11. The stack of claim 8 , wherein the seed layer comprises a plurality of sublayers, and wherein each sublayer of the seed layer comprises nickel chromium (NiCr), iron nickel chromium (NiCrFe), ruthenium chromium (RuCr), iridium chromium (IrCr), or cobalt chrome (CoCr).
12. The stack of claim 8 , wherein the seed layer has a thickness of about 100 Å or less.
13. The stack of claim 12 , wherein the seed layer has a thickness between about 30 Å and about 60 Å.
14. A magnetic tunnel junction stack comprising:
a substrate having a buffer layer formed thereon, the buffer layer comprising a plurality of sublayers, wherein each sublayer comprises Co x Fe y B z , tantalum (Ta), tantalum nitride (TaN), or combinations thereof;
a seed layer formed over the buffer layer, the seed layer comprising chromium (Cr), nickel chromium (NiCr), iron nickel chromium (NiCrFe), ruthenium chromium (RuCr), iridium chromium (IrCr), cobalt chrome (CoCr), or a combination thereof;
a first pinning layer in direct contact with the seed layer, the first pinning layer comprising at least one bilayer, the at least one bilayer of the first pinning layer comprising:
a first interlayer comprising cobalt (Co); and
a second interlayer comprising platinum (Pt), iridium (Ir), nickel (Ni), or palladium (Pd);
a coupling layer in contact with the first pinning layer;
a second pinning layer formed over the coupling layer, the second pinning layer comprising at least one bilayer, the at least one bilayer of the second pinning layer comprising:
a first interlayer comprising cobalt (Co); and
a second interlayer comprising platinum (Pt), iridium (Ir), nickel (Ni), or palladium (Pd);
a magnetic reference layer formed over the second pinning layer;
a tunnel barrier layer formed over the magnetic reference layer; and
a magnetic storage layer formed over the tunnel barrier layer.
15. The stack of claim 14 , wherein the seed layer comprises a plurality of sublayers, and wherein each sublayer of the seed layer comprises nickel chromium (NiCr), iron nickel chromium (NiCrFe), ruthenium chromium (RuCr), iridium chromium (IrCr), or cobalt chrome (CoCr).