Acoustic wave device, multiplexer, radio-frequency front end circuit, and communication device
An acoustic wave device includes a support substrate, a silicon nitride film stacked on the support substrate, a silicon oxide film stacked on the silicon nitride film, a piezoelectric body stacked on the silicon oxide film and made of lithium tantalite, and an IDT electrode provided on one main surface of the piezoelectric body. For a wavelength normalized film thickness of the piezoelectric body, an Euler angle of the piezoelectric body, a wavelength normalized film thickness of the silicon nitride film, a wavelength normalized film thickness of the silicon oxide film, and a wavelength normalized film thickness of the IDT electrode, values are set so that at least one of a response intensity of a first higher order mode, corresponding to the response intensity of a second higher order mode, and of a response intensity of a third higher mode is greater than about −2.4.
1. An acoustic wave device comprising:
a support substrate made of silicon;
a silicon nitride film on the support substrate;
a silicon oxide film on the silicon nitride film;
a piezoelectric body on the silicon oxide film and made of lithium tantalate; and
an InterDigital Transducer (IDT) electrode on one main surface of the piezoelectric body; wherein
when λ is a wavelength determined by an electrode finger pitch of the IDT electrode, T LT is a wavelength normalized film thickness of the piezoelectric body, θ LT is a Euler angle θ of the piezoelectric body, T N is a wavelength normalized film thickness of the silicon nitride film, T S is a wavelength normalized film thickness of the silicon oxide film, T E is a wavelength normalized film thickness of the IDT electrode obtained from a product of a wavelength normalized film thickness of the IDT electrode and a ratio of a density of the IDT electrode to a density of aluminum and expressed as an aluminum thickness, ψ Si is a propagation direction inside the support substrate, and T Si is a wavelength normalized film thickness of the support substrate, T LT , θ LT , T N , T S , T E , and ψ Si are set so that at least one of I h corresponding to a response intensity of a first higher order mode, I h corresponding to a response intensity of a second higher order mode, and I h corresponding to a response intensity of a third higher order mode is greater than about −2.4, and T Si >about 20;
Formula
(
1
)
I
h
=
a
T
LT
(
2
)
(
(
T
LT
-
c
T
LT
)
2
-
b
T
LT
(
2
)
)
+
a
T
LT
(
1
)
(
T
LT
-
c
T
LT
)
+
a
T
S
(
2
)
(
(
T
S
-
c
T
S
)
2
-
b
T
S
(
2
)
)
+
a
T
S
(
1
)
(
T
S
-
c
T
S
)
+
a
T
N
(
3
)
(
(
T
N
-
c
T
N
)
3
-
b
T
N
(
3
)
)
+
a
T
N
(
2
)
(
(
T
N
-
c
T
N
)
2
-
b
T
N
(
2
)
)
+
a
T
N
(
1
)
(
T
N
-
c
T
N
)
+
a
T
E
(
2
)
(
(
T
E
-
c
T
E
)
2
-
b
T
E
(
2
)
)
+
a
T
E
(
1
)
(
T
E
-
c
T
E
)
+
a
ψ
Si
(
4
)
(
(
ψ
Si
-
c
ψ
Si
)
4
-
b
ψ
Si
(
4
)
)
+
a
ψ
Si
(
3
)
(
(
ψ
Si
-
c
ψ
Si
)
3
-
b
ψ
Si
(
3
)
)
+
a
ψ
Si
(
2
)
(
(
ψ
Si
-
c
ψ
Si
)
2
-
b
ψ
Si
(
2
)
)
+
a
ψ
Si
(
1
)
(
ψ
Si
-
c
ψ
Si
)
+
a
θ
LT
(
2
)
(
(
θ
LT
-
c
θ
LT
)
2
-
b
θ
LT
(
2
)
)
+
a
θ
LT
(
1
)
(
θ
LT
-
c
θ
LT
)
+
d
T
LT
T
S
(
T
LT
-
c
T
LT
)
(
T
S
-
c
T
S
)
+
d
T
LT
T
N
(
T
LT
-
c
T
LT
)
(
T
N
-
c
T
N
)
+
d
T
LT
T
E
(
T
LT
-
c
T
LT
)
(
T
E
-
c
T
E
)
+
d
T
LT
ψ
Si
(
T
LT
-
c
T
LT
)
(
ψ
Si
-
c
ψ
Si
)
+
d
T
LT
θ
LT
(
T
LT
-
c
T
LT
)
(
θ
LT
-
c
θ
LT
)
+
d
T
S
T
N
(
T
S
-
c
T
S
)
(
T
N
-
c
T
N
)
+
d
T
S
T
E
(
T
S
-
c
T
E
)
(
T
E
-
c
T
E
)
+
d
T
S
ψ
Si
(
T
S
-
c
T
S
)
(
ψ
Si
-
c
ψ
Si
)
+
d
T
S
θ
LT
(
T
S
-
c
T
S
)
(
θ
TL
-
c
θ
LT
)
+
d
T
N
T
E
(
T
N
-
c
T
N
)
(
T
E
-
c
T
E
)
+
d
T
N
ψ
Si
(
T
N
-
c
T
N
)
(
ψ
Si
-
c
ψ
Si
)
+
d
T
N
θ
LT
(
T
N
-
c
T
N
)
(
θ
TL
-
c
θ
LT
)
+
d
T
E
ψ
Si
(
T
E
-
c
T
E
)
(
ψ
Si
-
c
ψ
Si
)
+
d
T
E
θ
LT
(
T
E
-
c
T
E
)
(
θ
TL
-
c
θ
LT
)
+
d
ψ
Si
θ
LT
(
ψ
Si
-
c
ψ
Si
)
(
θ
TL
-
c
θ
LT
)
+
e
;
coefficients a, b, c, d, and e in the above Formula (1) are values listed in Tables 1 to 11 below determined in accordance with a crystal orientation of the support substrate, a type of higher order mode indicating either the first higher order mode, the second higher order mode, or the third higher order mode, and respective ranges of the wavelength normalized film thickness T S of the silicon oxide film, the wavelength normalized film thickness T LT of the piezoelectric body, and the propagation direction ψ Si inside the support substrate:
TABLE 1
Si(100)
FIRST HIGHER ORDER MODE
0 < T LT < 0.25
0.25 ≤ T LT ≤ 3.5
a TLT (2)
0
0
a TLT (1)
−14.83429368
3.069902124
b TLT (2)
0
0
c TLT
0.221296296
0.274301676
a TS (2)
0
0
a TS (1)
−5.435055656
−11.51705287
b TS (2)
0
0
c TS
0.244907407
0.246648045
a TN (3)
0
0
a TN (2)
0
0
a TN (1)
0.954625056
2.416190553
b TN (3)
0
0
b TN (2)
0
0
c TN
0.32037037
0.345810056
a TE (2)
163.7465036
194.8374496
a TE (1)
8.852421424
2.920900643
b TE (2)
0.001465714
0.001392903
c TE
0.153587963
0.15377095
a ψSi (4)
0
0
a ψSi (3)
0
0
a ψSi (2)
0
0.004515779
a ψSi (1)
0.078396962
0.109748177
b ψSi (4)
0
0
b ψSi (3)
0
0
b ψSi (2)
0
64.80134827
c ψSi
7.083333333
10.05586592
a θLT (2)
0
0
a θLT (1)
−0.024815031
0.020111202
b θLT (2)
0
0
c θLT
−52.03703704
−51.79888268
d TLTTS
0
0
d TLTTN
0
0
d TLTTE
0
−307.8174848
d TLTψSi
0
0
d TLTθLT
1.483479323
0
d TSTN
0
0
d TSTE
0
0
d TSψSi
−1.673812731
−1.384976956
d TSθLT
0
0.672070071
d TNTE
0
0
d TNψSi
0
0
d TNψLT
0
−0.108878788
d TEψSi
0
0
d TEθLT
0
0
d ψSiθLT
0.002868735
0
e
−2.09327176
−2.154987875
TABLE 2
Si(110)
FIRST HIGHER ORDER MODE
0 ≤ ψ Si < 30
30 ≤ ψ Si ≤ 90
a TLT (2)
0
0
a TLT (1)
−12.83201212
−9.646567168
b TLT (2)
0
0
c TLT
0.256470538
0.250903614
a TS (2)
156.859599
0
a TS (1)
−21.52776656
−15.1877177
b TS (2)
0.001522145
0
c TS
0.261176471
0.243825301
a TN (3)
0
0
a TN (2)
0
0
a TN (1)
18.19696789
8.364202341
b TN (3)
0
0
b TN (2)
0
0
c TN
0.152941176
0.272891566
a TE (2)
0
0
a TE (1)
−6.461494684
−4.137739161
b TE (2)
0
0
c TE
0.152941176
0.153463855
a ψSi (4)
0
0
a ψSi (3)
0
0
a ψSi (2)
−0.007084639
−0.003013228
a ψSi (1)
−0.301466226
−0.031376567
b ψSi (4)
0
0
b ψSi (3)
0
0
b ψSi (2)
49.58131488
795.684243
c ψSi
25.35294118
60.63253012
a θLT (2)
0
0
a θLT (1)
0
0.009367138
b θLT (2)
0
0
c θLT
0
−52
d TLTTS
140.9204814
0
d TLTTN
0
24.32908352
d TLTTE
0
0
d TLTψSi
0
0
d TLTθLT
0
0
d TSTN
51.74259913
53.37502263
d TSTE
0
0
d TSψSi
0
0
d TSθLT
0
0
d TNTE
0
0
d TNψSi
0
−0.241253979
d TNψLT
0
0
d TEψSi
0
0
d TEθLT
0
0.503490956
d ψSiθLT
0
0
e
−1.714086264
−1.062610881
TABLE 3
Si(111)
FIRST HIGHER ORDER MODE
a TLT (2)
0
a TLT (1)
−11.07513554
b TLT (2)
0
c TLT
0.253819444
a TS (2)
0
a TS (1)
−14.53606605
b TS (2)
0
c TS
0.255555556
a TN (3)
0
a TN (2)
−27.47980058
a TN (1)
11.21718185
b TN (3)
0
b TN (2)
0.012775849
c TN
0.198611111
a TE (2)
0
a TE (1)
0
b TE (2)
0
c TE
0
a ψSi (4)
0
a ψSi (3)
0
a ψSi (2)
0
a ψSi (1)
0.199446167
b ψSi (4)
0
b ψSi (3)
0
b ψSi (2)
0
c ψSi
31.80555556
a θLT (2)
0
a θLT (1)
0.020411672
b θLT (2)
0
c θLT
−49.55555556
d TLTTS
0
d TLTTN
59.65672759
d TLTTE
0
d TLTψSi
0
d TLTθLT
0
d TSTN
118.0753788
d TSTE
0
d TSψSi
0
d TSθLT
0
d TNTE
0
d TNψSi
0
d TNψLT
0
d TEψSi
0
d TEθLT
0
d ψSiθLT
0
e
−1.633231485
TABLE 4
Si(100)
SECOND HIGHER ORDER MODE
a TLT (2)
0
a TLT (1)
−11.81358789
b TLT (2)
0
c TLT
0.233372093
a TS (2)
0
a TS (1)
12.8161063
b TS (2)
0
c TS
0.256511628
a TN (3)
51.69588497
a TN (2)
−32.3186317
a TN (1)
−4.371415613
b TN (3)
0.001717063
b TN (2)
0.027148945
c TN
0.29627907
a TE (2)
0
a TE (1)
1.615825178
b TE (2)
0
c TE
0.151744186
a ψSi (4)
0
a ψSi (3)
0.000212057
a ψSi (2)
−0.001603831
a ψSi (1)
−0.204451256
b ψSi (4)
0
b ψSi (3)
−751.8827776
b ψSi (2)
48.11032991
c ψSi
27.48837209
a θLT (2)
0
a θLT (1)
0.02976445
b θLT (2)
0
c θLT
−49.6744186
d TLTTS
0
d TLTTN
0
d TLTTE
107.5358299
d TLTψSi
0
d TLTθLT
0
d TSTN
0
d TSTE
0
d TSψSi
1.157163274
d TSθLT
0
d TNTE
0
d TNψSi
−0.328790695
d TNψLT
−0.146613553
d TEψSi
0
d TEθLT
0
d ψSiθLT
0
e
−3.188900929
TABLE 5
Si(110)
SECOND HIGHER ORDER MODE
0 ≤ ψ Si < 30
30 ≤ ψ Si ≤ 90
a TLT (2)
114.8844473
193.3812097
a TLT (1)
−8.088688831
0.512582429
b TLT (2)
0.0016209
0.001754662
c TLT
0.254008909
0.251239669
a TS (2)
0
0
a TS (1)
−7.32209573
−6.329562725
b TS (2)
0
0
c TS
0.252672606
0.271900826
a TN (3)
0
−81.37971878
a TN (2)
−8.528039509
39.7113193
a TN (1)
−1.120271161
0.826800765
b TN (3)
0
0.006887919
b TN (2)
0.053619178
0.025205929
c TN
0.423830735
0.200826446
a TE (2)
0
0
a TE (1)
9.909256206
0
b TE (2)
0
0
c TE
0.160523385
0
a ψSi (4)
0
0
a ψSi (3)
0
0
a ψSi (2)
0
0.003197968
a ψSi (1)
0.018063648
−0.015576788
b ψSi (4)
0
0
b ψSi (3)
0
0
b ψSi (2)
0
108.7630626
c ψSi
8.797327394
38.92561983
a θLT (2)
0
0
a θLT (1)
−0.003063309
0.049075185
b θLT (2)
0
0
c θLT
−49.54120267
−48.89256198
d TLTTS
0
−167.1962018
d TLTTN
−32.41085998
0
d TLTTE
0
0
d TLTψSi
0
0
d TLTθLT
0
0
d TSTN
33.06314431
0
d TSTE
124.8374401
0
d TSψSi
0
0.486860801
d TSθLT
0
0
d TNTE
−38.52108083
0
d TNψSi
0
0
d TNψLT
0
0
d TEψSi
0
0
d TEθLT
0.494639958
0
d ψSiθLT
−0.001623976
0.014724275
e
−2.271454108
−2.472699496
TABLE 6
Si(111)
SECOND HIGHER ORDER MODE
0 ≤ ψ Si < 30
30 ≤ ψ Si ≤ 60
a TLT (2)
0
0
a TLT (1)
−19.73613055
−14.94881654
b TLT (2)
0
0
c TLT
0.239145299
0.24607438
a TS (2)
0
0
a TS (1)
−6.009225958
0.384596926
b TS (2)
0
0
c TS
0.246837607
0.24862259
a TN (3)
0
0
a TN (2)
−20.54217049
−13.90920983
a TN (1)
−0.500198805
−1.907891682
b TN (3)
0
0
b TN (2)
0.036939908
0.04540127
c TN
0.399487179
0.382644628
a TE (2)
0
0
a TE (1)
5.085265993
1.386937823
b TE (2)
0
0
c TE
0.158376068
0.157438017
a ψSi (4)
0
0
a ψSi (3)
0
0
a ψSi (2)
0.001491321
0
a ψSi (1)
0.042768727
−0.007722013
b ψSi (4)
0
0
b ψSi (3)
0
0
b ψSi (2)
159.6686391
0
c ψSi
14.15384615
47.63085399
a θLT (2)
0
0
a θLT (1)
0.012313864
0
b θLT (2)
0
0
c θLT
−48.4034188
0
d TLTTS
0
0
d TLTTN
−34.27397947
−21.45483754
d TLTTE
0
0
d TLTψSi
0.278464342
0
d TLTθLT
−0.425894328
0
d TSTN
46.58606596
0
d TSTE
92.95289822
102.0248205
d TSψSi
0
0.493711224
d TSθLT
0
0
d TNTE
−26.83666562
0
d TNψSi
−0.133932768
−0.129081681
d TNψLT
−0.107712568
0
d TEψSi
0
0
d TEθLT
0
0
d ψSiθLT
0
0
e
−2.444079693
−1.863631594
TABLE 7
Si(100)
THIRD HIGHER ORDER MODE
a TLT (2)
0
a TLT (1)
−13.69744796
b TLT (2)
0
c TLT
0.242117117
a TS (2)
0
a TS (1)
−21.67672451
b TS (2)
0
c TS
0.24740991
a TN (3)
0
a TN (2)
0
a TN (1)
0
b TN (3)
0
b TN (2)
0
c TN
0
a TE (2)
0
a TE (1)
0
b TE (2)
0
c TE
0
a ψSi (4)
0
a ψSi (3)
0
a ψSi (2)
0
a ψSi (1)
−0.012294125
b ψSi (4)
0
b ψSi (3)
0
b ψSi (2)
0
c ψSi
23.5472973
a θLT (2)
0
a θLT (1)
−0.043141927
b θLT (2)
0
c θLT
−50.74774775
d TLTTS
0
d TLTTN
0
d TLTTE
0
d TLTψSi
0
d TLTθLT
1.006243214
d TSTN
0
d TSTE
0
d TSψSi
0
d TSθLT
0
d TNTE
0
d TNψSi
0
d TNψLT
0
d TEψSi
0
d TEθLT
0
d ψSiθLT
−0.002432123
e
−2.624644502
TABLE 8
Si(110)
THIRD HIGHER ORDER MODE
0 ≤ ψ Si < 30
30 ≤ ψ Si ≤ 90
a TLT (2)
0
0
a TLT (1)
−11.03265079
0
b TLT (2)
0
0
c TLT
0.256828704
0
a TS (2)
0
0
a TS (1)
−4.308771413
0.663966622
b TS (2)
0
0
c TS
0.254976852
0.252631579
a TN (3)
0
−41.616937
a TN (2)
0
15.26191272
a TN (1)
0.749735997
1.074574236
b TN (3)
0
0.006033304
b TN (2)
0
0.043147922
c TN
0.380092593
0.303157395
a TE (2)
0
0
a TE (1)
−0.678702233
11.03955295
b TE (2)
0
0
c TE
0.155960648
0.160921053
a ψSi (4)
0
0
a ψSi (3)
0
0
a ψSi (2)
0
0
a ψSi (1)
0.020332938
0.010235202
b ψSi (4)
0
0
b ψSi (3)
0
0
b ψSi (2)
0
0
c ψSi
5.99537037
66.78947368
a θLT (2)
−0.003658214
0
a θLT (1)
0.048112599
0.016635787
b θLT (2)
71.1933299
0
c θLT
−50.89814815
−49.93684211
d TLTTS
0
0
d TLTTN
0
0
d TLTTE
0
0
d TLTψSi
0
0
d TLTθLT
0
0
d TSTN
0
0
d TSTE
0
0
d TSψSi
0
−0.323118590
d TSθLT
0
0.713957036
d TNTE
0
0
d TNψSi
−0.144459086
0
d TNψLT
0
0
d TEψSi
0.79407423
0.334206608
d TEθLT
0
0
d ψSiθLT
−0.002496666
0.001289273
e
−2.360031711
−3.077359987
TABLE 9
Si(111)
THIRD HIGHER ORDER MODE
0 < T LT < 0.25
0 ≤ ψ Si < 30
a TLT (2)
0
a TLT (1)
−23.116307
b TLT (2)
0
c TLT
0.2289801
a TS (2)
0
a TS (1)
−14.28753349
b TS (2)
0
c TS
0.260572139
a TN (3)
0
a TN (2)
0
a TN (1)
−0.440595972
b TN (3)
0
b TN (2)
0
c TN
0.411940299
a TE (2)
0
a TE (1)
0
b TE (2)
0
c TE
0
a ψSi (4)
0
a ψSi (3)
0
a ψSi (2)
0
a ψSi (1)
0.029126872
b ψSi (4)
0
b ψSi (3)
0
b ψSi (2)
0
c ψSi
11.96517413
a θLT (2)
0
a θLT (1)
0
b θLT (2)
0
c θLT
0
d TLTTS
0
d TLTTN
0
d TLTTE
0
d TLTψSi
0
d TLTθLT
0
d TSTN
0
d TSTE
0
d TSψSi
0.930830627
d TSθLT
0
d TNTE
0
d TNψSi
−0.129081681
d TNψLT
0
d TEψSi
0
d TEθLT
0
d ψSiθLT
0
e
−2.122238265
TABLE 10
Si(111)
THIRD HIGHER ORDER MODE
0 < T LT < 0.25
30 ≤ ψ Si ≤ 60
0 < T N < 0.3
0.3 ≤ T N < 0.5
0.5 ≤ T N ≤ 2.0
a TLT (2)
0
0
0
a TLT (1)
−8.85598025
−13.00016665
−14.59159182
b TLT (2)
0
0
0
c TLT
0.228097345
0.22804878
0.228054299
a TS (2)
103.6914504
0
0
a TS (1)
−1.916300209
−1.043153875
−2.152482595
b TS (2)
0.001674808
0
0
c TS
0.25420354
0.254634146
0.251809955
a TN (3)
0
0
0
a TN (2)
0
0
0
a TN (1)
−2.052521715
1.895724222
−3.806230027
b TN (3)
0
0
0
b TN (2)
0
0
0
c TN
0.187610619
0.403414634
0.604072398
a TE (2)
0
0
0
a TE (1)
6.773288364
5.622244745
4.676153327
b TE (2)
0
0
0
c TE
0.163274336
0.167317073
0.46561086
a ψSi (4)
0
0
0
a ψSi (3)
0
0
0
a ψSi (2)
0
0
0
a ψSi (1)
−0.035810857
0
0.001284581
b ψSi (4)
0
0
0
b ψSi (3)
0
0
0
b ψSi (2)
0
0
0
c ψSi
50.7079646
0
47.46606335
a θLT (2)
−0.004232627
−0.004038546
0
a θLT (1)
0.047188385
0.050497193
0.025858407
b θLT (2)
70.63732477
71.2056157
0
c θLT
−50.2300885
−50.47804878
−50.00904977
d TLTTS
0
144.8256764
175.1562687
d TLTTN
0
−71.99871186
62.29352459
d TLTTE
0
0
0
d TLTψSi
0
0
0.579045093
d TLTθLT
0
0
0
d TSTN
0
0
0
d TSTE
0
0
0
d TSψSi
0
0.421981204
0
d TSθLT
0.662353425
0.864834339
0.455548641
d TNTE
0
0
0
d TNψSi
0
0
0.213878349
d TNψLT
0
0
−0.173003295
d TEψSi
0
0
0
d TEθLT
0
0
0
d ψSiθLT
0.002492698
0.002050178
0
e
−1.992833526
−1.990755952
−2.158637111
TABLE 11
Si(111)
THIRD HIGHER ORDER MODE
0.25 ≤ T LT ≤ 3.5
0 ≤ ψ Si < 30
30 ≤ ψ Si ≤ 60
a TLT (2)
0
0
a TLT (1)
−4.23090475
0
b TLT (2)
0
0
c TLT
0.275829876
0
a TS (2)
0
0
a TS (1)
−10.77092012
−1.545108081
b TS (2)
0
0
c TS
0.254356846
0.254105263
a TN (3)
0
0
a TN (2)
0
0
a TN (1)
−0.547621988
−0.893667583
b TN (3)
0
0
b TN (2)
0
0
c TN
0.396680498
0.392631579
a TE (2)
0
0
a TE (1)
0
0.708331426
b TE (2)
0
0
c TE
0
0.159684211
a ψSi (4)
0
0
a ψSi (3)
0
0
a ψSi (2)
0
0
a ψSi (1)
0.033675166
−0.011260677
b ψSi (4)
0
0
b ψSi (3)
0
0
b ψSi (2)
0
0
c ψSi
11.70124481
48.21052632
a θLT (2)
0
−0.003806532
a θLT (1)
−0.012544759
0.039951436
b θLT (2)
0
67.93672687
c θLT
−49.37759336
−49.42315789
d TLTTS
122.2019913
0
d TLTTN
0
0
d TLTTE
0
0
d TLTψSi
0
0
d TLTθLT
0
0
d TSTN
0
0
d TSTE
0
0
d TSψSi
0.657009296
−0.317058863
d TSθLT
0
0.702776192
d TNTE
0
−16.38117608
d TNψSi
−0.139004432
0.128605996
d TNψLT
0
0
d TEψSi
0
0
d TEθLT
0
0
d ψSiθLT
0.001351095
0.001928116
e
−2.653122338
−2.237232738.
2. The acoustic wave device according to claim 1 , wherein the thickness of the piezoelectric body is less than or equal to about 3.5λ.
3. The acoustic wave device according to claim 2 , wherein the thickness of the piezoelectric body is less than or equal to about 2.5λ.
4. The acoustic wave device according to claim 2 , wherein the thickness of the piezoelectric body is less than or equal to about 1.5λ.
5. The acoustic wave device according to claim 2 , wherein the thickness of the piezoelectric body is less than or equal to about 0.5λ.
6. A multiplexer comprising:
N acoustic wave filters having different pass bands, where N is greater than or equal to 2; wherein
first terminals of the N acoustic wave filters are connected to each other via a common connection on an antenna terminal side;
at least one acoustic wave filter of the N acoustic wave filters except for the acoustic wave filter having the highest pass band includes one or more acoustic wave resonators; and
at least one acoustic wave resonator of the one or more acoustic wave resonators is the acoustic wave device according to claim 1 .
7. The multiplexer according to claim 6 , wherein the multiplexer is a carrier aggregation composite filter device.
8. The multiplexer according to claim 6 , wherein the at least one acoustic wave filter includes a plurality of series arm resonators and a plurality of parallel arm resonators defining a ladder filter.
9. The multiplexer according to claim 6 , further comprising:
an antenna connected to the antenna common terminal.
10. The acoustic wave device according to claim 1 , wherein I h for the first higher order mode and I h for the second higher order mode are greater than about −2.4.
11. The acoustic wave device according to claim 1 , wherein I h for the first higher order mode and I h for the third higher order mode are greater than about −2.4.
12. The acoustic wave device according to claim 1 , wherein I h for the second higher order mode and I h for the third higher order mode are greater than about −2.4.
13. The acoustic wave device according to claim 1 , wherein I h for the first higher order mode, I h for the second higher order mode, and I h for the third higher order mode are all greater than about −2.4.
14. The acoustic wave device according to claim 1 , wherein the acoustic wave device is an acoustic wave resonator.
15. An acoustic wave filter comprising:
a plurality of resonators; wherein
at least one resonator of the plurality of resonators is the acoustic wave device according to claim 1 .
16. A radio-frequency front end circuit comprising:
an acoustic wave filter including the acoustic wave device according to claim 1 ; and
a power amplifier connected to the acoustic wave filter.
17. A communication device comprising:
a radio-frequency front end circuit including an acoustic wave filter including the acoustic wave device according to claim 1 , and a power amplifier connected to the acoustic wave filter; and
an RF signal processing circuit.
18. The acoustic wave device according to claim 1 , wherein
the support substrate is a single crystal silicon substrate doped with impurities; and
the piezoelectric body is made of lithium tantalate doped with iron.
19. The acoustic wave device according to claim 1 , wherein
the silicon oxide film or the silicon nitride film includes a multilayer structure including a plurality of layers; and
the plurality of layers include an intermediate layer made of titanium or nickel.